JPS6267729A - 垂直磁気記録媒体の製造方法 - Google Patents
垂直磁気記録媒体の製造方法Info
- Publication number
- JPS6267729A JPS6267729A JP20937885A JP20937885A JPS6267729A JP S6267729 A JPS6267729 A JP S6267729A JP 20937885 A JP20937885 A JP 20937885A JP 20937885 A JP20937885 A JP 20937885A JP S6267729 A JPS6267729 A JP S6267729A
- Authority
- JP
- Japan
- Prior art keywords
- film
- thin film
- substrate
- sputtering
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 41
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 239000010408 film Substances 0.000 claims abstract description 69
- 239000000758 substrate Substances 0.000 claims abstract description 61
- 239000010409 thin film Substances 0.000 claims abstract description 54
- 238000004544 sputter deposition Methods 0.000 claims abstract description 30
- 238000000151 deposition Methods 0.000 claims abstract description 16
- 239000002184 metal Substances 0.000 claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims abstract description 13
- 239000002245 particle Substances 0.000 claims abstract description 13
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 11
- 239000013078 crystal Substances 0.000 claims abstract description 10
- 229920002799 BoPET Polymers 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 12
- 230000001747 exhibiting effect Effects 0.000 claims description 2
- 230000003685 thermal hair damage Effects 0.000 abstract description 4
- 230000005415 magnetization Effects 0.000 description 15
- 230000008021 deposition Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 9
- 238000002474 experimental method Methods 0.000 description 6
- 229920000139 polyethylene terephthalate Polymers 0.000 description 6
- 229920001721 polyimide Polymers 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 239000002985 plastic film Substances 0.000 description 3
- 229920006255 plastic film Polymers 0.000 description 3
- 230000037303 wrinkles Effects 0.000 description 3
- 230000006378 damage Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- ZFXYFBGIUFBOJW-UHFFFAOYSA-N theophylline Chemical compound O=C1N(C)C(=O)N(C)C2=C1NC=N2 ZFXYFBGIUFBOJW-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Physical Vapour Deposition (AREA)
- Magnetic Record Carriers (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20937885A JPS6267729A (ja) | 1985-09-20 | 1985-09-20 | 垂直磁気記録媒体の製造方法 |
| US06/864,357 US4767516A (en) | 1985-05-20 | 1986-05-19 | Method for making magnetic recording media |
| EP86106807A EP0202645B1 (en) | 1985-05-20 | 1986-05-20 | Method and apparatus for making magnetic recording media |
| DE8686106807T DE3682942D1 (de) | 1985-05-20 | 1986-05-20 | Verfahren und vorrichtung zur erzeugung magnetischer aufzeichnungstraeger. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20937885A JPS6267729A (ja) | 1985-09-20 | 1985-09-20 | 垂直磁気記録媒体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6267729A true JPS6267729A (ja) | 1987-03-27 |
| JPH0555930B2 JPH0555930B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-08-18 |
Family
ID=16571927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20937885A Granted JPS6267729A (ja) | 1985-05-20 | 1985-09-20 | 垂直磁気記録媒体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6267729A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010059528A (ja) * | 2008-09-08 | 2010-03-18 | Fujifilm Corp | ガスバリアフィルムの製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5680831A (en) * | 1979-11-30 | 1981-07-02 | Toshiba Corp | Producing device for magnetic recording medium |
| JPS59129944A (ja) * | 1983-01-12 | 1984-07-26 | Anelva Corp | 磁気記録媒体の製造方法及び磁気記録媒体の製造装置 |
| JPS59210531A (ja) * | 1983-05-16 | 1984-11-29 | Teijin Ltd | 磁気記録媒体及びその製造法 |
-
1985
- 1985-09-20 JP JP20937885A patent/JPS6267729A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5680831A (en) * | 1979-11-30 | 1981-07-02 | Toshiba Corp | Producing device for magnetic recording medium |
| JPS59129944A (ja) * | 1983-01-12 | 1984-07-26 | Anelva Corp | 磁気記録媒体の製造方法及び磁気記録媒体の製造装置 |
| JPS59210531A (ja) * | 1983-05-16 | 1984-11-29 | Teijin Ltd | 磁気記録媒体及びその製造法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010059528A (ja) * | 2008-09-08 | 2010-03-18 | Fujifilm Corp | ガスバリアフィルムの製造方法 |
| US8236388B2 (en) | 2008-09-08 | 2012-08-07 | Fujifilm Corporation | Method of producing gas barrier film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0555930B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-08-18 |
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| Publication | Publication Date | Title |
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