JPS626691Y2 - - Google Patents
Info
- Publication number
- JPS626691Y2 JPS626691Y2 JP15810582U JP15810582U JPS626691Y2 JP S626691 Y2 JPS626691 Y2 JP S626691Y2 JP 15810582 U JP15810582 U JP 15810582U JP 15810582 U JP15810582 U JP 15810582U JP S626691 Y2 JPS626691 Y2 JP S626691Y2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- piston
- mounting table
- top surface
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 44
- 238000009423 ventilation Methods 0.000 claims description 12
- 235000012431 wafers Nutrition 0.000 description 40
- 238000000034 method Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15810582U JPS5963437U (ja) | 1982-10-19 | 1982-10-19 | 半導体ウエハの吸着保持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15810582U JPS5963437U (ja) | 1982-10-19 | 1982-10-19 | 半導体ウエハの吸着保持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5963437U JPS5963437U (ja) | 1984-04-26 |
| JPS626691Y2 true JPS626691Y2 (da) | 1987-02-16 |
Family
ID=30348392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15810582U Granted JPS5963437U (ja) | 1982-10-19 | 1982-10-19 | 半導体ウエハの吸着保持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5963437U (da) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6709457B2 (ja) * | 2016-05-26 | 2020-06-17 | 株式会社タカトリ | 被加工部材の加工方法及び加工装置 |
| WO2017086339A1 (ja) * | 2015-11-16 | 2017-05-26 | 株式会社タカトリ | ワイヤソー装置並びに被加工物の加工方法及び加工装置 |
| JP6615643B2 (ja) * | 2016-03-03 | 2019-12-04 | 株式会社タカトリ | 被加工部材の加工方法及び加工装置 |
-
1982
- 1982-10-19 JP JP15810582U patent/JPS5963437U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5963437U (ja) | 1984-04-26 |
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