JPS626686Y2 - - Google Patents

Info

Publication number
JPS626686Y2
JPS626686Y2 JP14031581U JP14031581U JPS626686Y2 JP S626686 Y2 JPS626686 Y2 JP S626686Y2 JP 14031581 U JP14031581 U JP 14031581U JP 14031581 U JP14031581 U JP 14031581U JP S626686 Y2 JPS626686 Y2 JP S626686Y2
Authority
JP
Japan
Prior art keywords
sheet
filter
adhesive sheet
transparent
pellets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14031581U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5844849U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14031581U priority Critical patent/JPS5844849U/ja
Publication of JPS5844849U publication Critical patent/JPS5844849U/ja
Application granted granted Critical
Publication of JPS626686Y2 publication Critical patent/JPS626686Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14031581U 1981-09-21 1981-09-21 半導体ペレット用照明装置 Granted JPS5844849U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14031581U JPS5844849U (ja) 1981-09-21 1981-09-21 半導体ペレット用照明装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14031581U JPS5844849U (ja) 1981-09-21 1981-09-21 半導体ペレット用照明装置

Publications (2)

Publication Number Publication Date
JPS5844849U JPS5844849U (ja) 1983-03-25
JPS626686Y2 true JPS626686Y2 (cg-RX-API-DMAC7.html) 1987-02-16

Family

ID=29933477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14031581U Granted JPS5844849U (ja) 1981-09-21 1981-09-21 半導体ペレット用照明装置

Country Status (1)

Country Link
JP (1) JPS5844849U (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003284483A1 (en) * 2002-12-06 2004-06-30 Inter Action Corporation Instrument for testing solid-state imaging device

Also Published As

Publication number Publication date
JPS5844849U (ja) 1983-03-25

Similar Documents

Publication Publication Date Title
US11633804B2 (en) Laser processing apparatus and laser processing method
WO2020233208A1 (zh) 检测用精准出光装置和测量仪
CN111872586A (zh) 晶圆激光切割用的产品吸附装置
JP2002328094A (ja) Ledリング照明及びそれを備えた画像検査装置
JPS626686Y2 (cg-RX-API-DMAC7.html)
JP3009659B1 (ja) 傷検査用光源及び傷検査用光源ユニット
JPS62153737A (ja) 物品表面検査装置
JP3102850B2 (ja) 水晶ブランクの傷検査装置
JPH1164232A (ja) 水晶基板用載置台及び水晶基板の傷検査装置
JP2003059329A (ja) 照明装置
GB2170651A (en) Method and apparatus for aligning a filter onto a color charge-coupled device imager
ITMI981181A1 (it) Diffusore ottico e dispositivo di illuminazione provvisto dello stesso
JPH0861928A (ja) 外観検査用照明装置
CN109001228A (zh) 一种带背光照明的衬底缺陷检测用回转工作台
JP2019100968A (ja) ステージ表面上の突起物の上面を検査するマクロ検査装置
JPH06325996A (ja) レティクルフレーム
CN210136184U (zh) 一种带背光照明的衬底缺陷检测用回转工作台
JP2019168305A (ja) Oリング外観検査装置、物体外観検査装置、照明装置、外観検査方法、oリング製造方法及び物体製造方法
JPH0720913Y2 (ja) 光処理器
JPH06160064A (ja) 表面の検査方法および検査装置
TW200308005A (en) Microelectronic substrate edge bead processing apparatus and method
KR100579802B1 (ko) 펠리클 프레임용 내경 고정 지그
JPH04326508A (ja) 真空吸着固定台およびそれを用いた露光装置
CN107121892B (zh) 一种基板曝边设备
JPH0714649U (ja) 真空吸着チャック