JPS626642B2 - - Google Patents

Info

Publication number
JPS626642B2
JPS626642B2 JP52133693A JP13369377A JPS626642B2 JP S626642 B2 JPS626642 B2 JP S626642B2 JP 52133693 A JP52133693 A JP 52133693A JP 13369377 A JP13369377 A JP 13369377A JP S626642 B2 JPS626642 B2 JP S626642B2
Authority
JP
Japan
Prior art keywords
epitaxial layer
silicon epitaxial
sapphire substrate
silicon
sapphire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52133693A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5466767A (en
Inventor
Nobuo Sasaki
Motoo Nakano
Yasuo Kobayashi
Takashi Iwai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13369377A priority Critical patent/JPS5466767A/ja
Publication of JPS5466767A publication Critical patent/JPS5466767A/ja
Publication of JPS626642B2 publication Critical patent/JPS626642B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Recrystallisation Techniques (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP13369377A 1977-11-08 1977-11-08 Manufacture for sos construction Granted JPS5466767A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13369377A JPS5466767A (en) 1977-11-08 1977-11-08 Manufacture for sos construction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13369377A JPS5466767A (en) 1977-11-08 1977-11-08 Manufacture for sos construction

Publications (2)

Publication Number Publication Date
JPS5466767A JPS5466767A (en) 1979-05-29
JPS626642B2 true JPS626642B2 (enExample) 1987-02-12

Family

ID=15110659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13369377A Granted JPS5466767A (en) 1977-11-08 1977-11-08 Manufacture for sos construction

Country Status (1)

Country Link
JP (1) JPS5466767A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6376872A (ja) * 1986-09-18 1988-04-07 Agency Of Ind Science & Technol 膜の内部圧縮応力低減方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3900345A (en) * 1973-08-02 1975-08-19 Motorola Inc Thin low temperature epi regions by conversion of an amorphous layer
DE2344320C2 (de) * 1973-09-03 1975-06-26 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur Kompensation von Grenzflächenladungen bei epitaktisch auf ein Substrat aufgewachsenen Siliziumdünnschichten
JPS518869A (ja) * 1974-07-09 1976-01-24 Mitsubishi Electric Corp Handotaiepitakisharuehano seizohoho

Also Published As

Publication number Publication date
JPS5466767A (en) 1979-05-29

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