JPS6265833U - - Google Patents

Info

Publication number
JPS6265833U
JPS6265833U JP1985156899U JP15689985U JPS6265833U JP S6265833 U JPS6265833 U JP S6265833U JP 1985156899 U JP1985156899 U JP 1985156899U JP 15689985 U JP15689985 U JP 15689985U JP S6265833 U JPS6265833 U JP S6265833U
Authority
JP
Japan
Prior art keywords
aperture
laser
aperture plate
air supply
storage chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985156899U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985156899U priority Critical patent/JPS6265833U/ja
Publication of JPS6265833U publication Critical patent/JPS6265833U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
JP1985156899U 1985-10-14 1985-10-14 Pending JPS6265833U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985156899U JPS6265833U (de) 1985-10-14 1985-10-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985156899U JPS6265833U (de) 1985-10-14 1985-10-14

Publications (1)

Publication Number Publication Date
JPS6265833U true JPS6265833U (de) 1987-04-23

Family

ID=31078947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985156899U Pending JPS6265833U (de) 1985-10-14 1985-10-14

Country Status (1)

Country Link
JP (1) JPS6265833U (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010016392A (ja) * 2001-10-01 2010-01-21 Xsil Technology Ltd 基板、特に半導体ウェハの加工

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010016392A (ja) * 2001-10-01 2010-01-21 Xsil Technology Ltd 基板、特に半導体ウェハの加工

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