JPS6264935A - 表面欠陥検査装置 - Google Patents
表面欠陥検査装置Info
- Publication number
- JPS6264935A JPS6264935A JP20591785A JP20591785A JPS6264935A JP S6264935 A JPS6264935 A JP S6264935A JP 20591785 A JP20591785 A JP 20591785A JP 20591785 A JP20591785 A JP 20591785A JP S6264935 A JPS6264935 A JP S6264935A
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- masking
- signal
- output
- bit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000873 masking effect Effects 0.000 claims abstract description 16
- 230000007547 defect Effects 0.000 claims description 22
- 238000007689 inspection Methods 0.000 claims description 16
- 230000000694 effects Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract description 2
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000009977 dual effect Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 210000003323 beak Anatomy 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20591785A JPS6264935A (ja) | 1985-09-18 | 1985-09-18 | 表面欠陥検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20591785A JPS6264935A (ja) | 1985-09-18 | 1985-09-18 | 表面欠陥検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6264935A true JPS6264935A (ja) | 1987-03-24 |
JPH0435027B2 JPH0435027B2 (enrdf_load_stackoverflow) | 1992-06-09 |
Family
ID=16514885
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20591785A Granted JPS6264935A (ja) | 1985-09-18 | 1985-09-18 | 表面欠陥検査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6264935A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0227239A (ja) * | 1988-07-15 | 1990-01-30 | Fujisawa Pharmaceut Co Ltd | 錠剤の外観不良検知方法および装置 |
-
1985
- 1985-09-18 JP JP20591785A patent/JPS6264935A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0227239A (ja) * | 1988-07-15 | 1990-01-30 | Fujisawa Pharmaceut Co Ltd | 錠剤の外観不良検知方法および装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0435027B2 (enrdf_load_stackoverflow) | 1992-06-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |