JPS6263928U - - Google Patents

Info

Publication number
JPS6263928U
JPS6263928U JP15534185U JP15534185U JPS6263928U JP S6263928 U JPS6263928 U JP S6263928U JP 15534185 U JP15534185 U JP 15534185U JP 15534185 U JP15534185 U JP 15534185U JP S6263928 U JPS6263928 U JP S6263928U
Authority
JP
Japan
Prior art keywords
photoresist
wafer
jig
coating
photoresist coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15534185U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15534185U priority Critical patent/JPS6263928U/ja
Publication of JPS6263928U publication Critical patent/JPS6263928U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)

Description

【図面の簡単な説明】
第１図は本考案によるフオトレジスト塗布装置
のスピナーヘツドを示し、ａ図はその正面図、ｂ
図はａ図のＡ―Ａ′断面図である。 １……回転板、２……吸着部、３……吸着口、
４……短形ウエハ、５……治具、６……切り込み
、７……治具固定ネジ。

Claims (1)

    【実用新案登録請求の範囲】
  1. スピナヘツドに半導体ウエハを固定しフオトレ
    ジストを塗布するフオトレジスト塗布装置におい
    て、固定されるウエハの外周の少なくともコーナ
    部に接触し、かつウエハ表面と同じ高さを有する
    治具を備えたことを特徴とするフオトレジスト塗
    布装置。
JP15534185U 1985-10-11 1985-10-11 Pending JPS6263928U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15534185U JPS6263928U (ja) 1985-10-11 1985-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15534185U JPS6263928U (ja) 1985-10-11 1985-10-11

Publications (1)

Publication Number Publication Date
JPS6263928U true JPS6263928U (ja) 1987-04-21

Family

ID=31075956

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15534185U Pending JPS6263928U (ja) 1985-10-11 1985-10-11

Country Status (1)

Country Link
JP (1) JPS6263928U (ja)

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