JPS6263829A - 微圧測定用圧力センサ - Google Patents

微圧測定用圧力センサ

Info

Publication number
JPS6263829A
JPS6263829A JP21717586A JP21717586A JPS6263829A JP S6263829 A JPS6263829 A JP S6263829A JP 21717586 A JP21717586 A JP 21717586A JP 21717586 A JP21717586 A JP 21717586A JP S6263829 A JPS6263829 A JP S6263829A
Authority
JP
Japan
Prior art keywords
thin
pressure sensor
pressure
strain gauge
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21717586A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0377452B2 (enExample
Inventor
Akio Yasukawa
彰夫 保川
Michitaka Shimazoe
島添　道隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP21717586A priority Critical patent/JPS6263829A/ja
Publication of JPS6263829A publication Critical patent/JPS6263829A/ja
Publication of JPH0377452B2 publication Critical patent/JPH0377452B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP21717586A 1986-09-17 1986-09-17 微圧測定用圧力センサ Granted JPS6263829A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21717586A JPS6263829A (ja) 1986-09-17 1986-09-17 微圧測定用圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21717586A JPS6263829A (ja) 1986-09-17 1986-09-17 微圧測定用圧力センサ

Publications (2)

Publication Number Publication Date
JPS6263829A true JPS6263829A (ja) 1987-03-20
JPH0377452B2 JPH0377452B2 (enExample) 1991-12-10

Family

ID=16700036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21717586A Granted JPS6263829A (ja) 1986-09-17 1986-09-17 微圧測定用圧力センサ

Country Status (1)

Country Link
JP (1) JPS6263829A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0359431A (ja) * 1989-07-22 1991-03-14 Hottinger Baldwin Messtech Gmbh 圧力センサ及び圧力センサの校正方法
US5156052A (en) * 1990-12-20 1992-10-20 Honeywell Inc. Ribbed and bossed pressure transducer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0359431A (ja) * 1989-07-22 1991-03-14 Hottinger Baldwin Messtech Gmbh 圧力センサ及び圧力センサの校正方法
US5156052A (en) * 1990-12-20 1992-10-20 Honeywell Inc. Ribbed and bossed pressure transducer

Also Published As

Publication number Publication date
JPH0377452B2 (enExample) 1991-12-10

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