JPS6262538A - 位置決め装置 - Google Patents

位置決め装置

Info

Publication number
JPS6262538A
JPS6262538A JP60201668A JP20166885A JPS6262538A JP S6262538 A JPS6262538 A JP S6262538A JP 60201668 A JP60201668 A JP 60201668A JP 20166885 A JP20166885 A JP 20166885A JP S6262538 A JPS6262538 A JP S6262538A
Authority
JP
Japan
Prior art keywords
scanning
electron beam
section
magnification
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60201668A
Other languages
English (en)
Japanese (ja)
Other versions
JPH027183B2 (cs
Inventor
Masaaki Kano
加納　正明
Hisashi Furukawa
古川　寿志
Hiroshi Yamaji
山地　廣
Motosuke Miyoshi
元介 三好
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP60201668A priority Critical patent/JPS6262538A/ja
Publication of JPS6262538A publication Critical patent/JPS6262538A/ja
Publication of JPH027183B2 publication Critical patent/JPH027183B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP60201668A 1985-09-13 1985-09-13 位置決め装置 Granted JPS6262538A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60201668A JPS6262538A (ja) 1985-09-13 1985-09-13 位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60201668A JPS6262538A (ja) 1985-09-13 1985-09-13 位置決め装置

Publications (2)

Publication Number Publication Date
JPS6262538A true JPS6262538A (ja) 1987-03-19
JPH027183B2 JPH027183B2 (cs) 1990-02-15

Family

ID=16444916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60201668A Granted JPS6262538A (ja) 1985-09-13 1985-09-13 位置決め装置

Country Status (1)

Country Link
JP (1) JPS6262538A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05226460A (ja) * 1992-02-18 1993-09-03 Nec Yamagata Ltd 画像処理による半導体チップ位置検出方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60194537A (ja) * 1984-02-22 1985-10-03 ケイエルエイ・インストラメンツ・コ−ポレ−シヨン 整列装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60194537A (ja) * 1984-02-22 1985-10-03 ケイエルエイ・インストラメンツ・コ−ポレ−シヨン 整列装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05226460A (ja) * 1992-02-18 1993-09-03 Nec Yamagata Ltd 画像処理による半導体チップ位置検出方法

Also Published As

Publication number Publication date
JPH027183B2 (cs) 1990-02-15

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