JPH027183B2 - - Google Patents

Info

Publication number
JPH027183B2
JPH027183B2 JP60201668A JP20166885A JPH027183B2 JP H027183 B2 JPH027183 B2 JP H027183B2 JP 60201668 A JP60201668 A JP 60201668A JP 20166885 A JP20166885 A JP 20166885A JP H027183 B2 JPH027183 B2 JP H027183B2
Authority
JP
Japan
Prior art keywords
electron beam
scanning
scan
magnification
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60201668A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6262538A (ja
Inventor
Masaaki Kano
Hisashi Furukawa
Hiroshi Yamaji
Motosuke Myoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP60201668A priority Critical patent/JPS6262538A/ja
Publication of JPS6262538A publication Critical patent/JPS6262538A/ja
Publication of JPH027183B2 publication Critical patent/JPH027183B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP60201668A 1985-09-13 1985-09-13 位置決め装置 Granted JPS6262538A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60201668A JPS6262538A (ja) 1985-09-13 1985-09-13 位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60201668A JPS6262538A (ja) 1985-09-13 1985-09-13 位置決め装置

Publications (2)

Publication Number Publication Date
JPS6262538A JPS6262538A (ja) 1987-03-19
JPH027183B2 true JPH027183B2 (cs) 1990-02-15

Family

ID=16444916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60201668A Granted JPS6262538A (ja) 1985-09-13 1985-09-13 位置決め装置

Country Status (1)

Country Link
JP (1) JPS6262538A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05226460A (ja) * 1992-02-18 1993-09-03 Nec Yamagata Ltd 画像処理による半導体チップ位置検出方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60194537A (ja) * 1984-02-22 1985-10-03 ケイエルエイ・インストラメンツ・コ−ポレ−シヨン 整列装置

Also Published As

Publication number Publication date
JPS6262538A (ja) 1987-03-19

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