JPS6262204A - 光ビ−ム偏向用走査ミラ−の面倒れを検出あるいは測定する装置 - Google Patents

光ビ−ム偏向用走査ミラ−の面倒れを検出あるいは測定する装置

Info

Publication number
JPS6262204A
JPS6262204A JP20163985A JP20163985A JPS6262204A JP S6262204 A JPS6262204 A JP S6262204A JP 20163985 A JP20163985 A JP 20163985A JP 20163985 A JP20163985 A JP 20163985A JP S6262204 A JPS6262204 A JP S6262204A
Authority
JP
Japan
Prior art keywords
mirror
light beam
scanning mirror
light
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20163985A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0370174B2 (enExample
Inventor
Yoshiaki Morizumi
森住　義明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP20163985A priority Critical patent/JPS6262204A/ja
Publication of JPS6262204A publication Critical patent/JPS6262204A/ja
Publication of JPH0370174B2 publication Critical patent/JPH0370174B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP20163985A 1985-09-13 1985-09-13 光ビ−ム偏向用走査ミラ−の面倒れを検出あるいは測定する装置 Granted JPS6262204A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20163985A JPS6262204A (ja) 1985-09-13 1985-09-13 光ビ−ム偏向用走査ミラ−の面倒れを検出あるいは測定する装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20163985A JPS6262204A (ja) 1985-09-13 1985-09-13 光ビ−ム偏向用走査ミラ−の面倒れを検出あるいは測定する装置

Publications (2)

Publication Number Publication Date
JPS6262204A true JPS6262204A (ja) 1987-03-18
JPH0370174B2 JPH0370174B2 (enExample) 1991-11-06

Family

ID=16444416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20163985A Granted JPS6262204A (ja) 1985-09-13 1985-09-13 光ビ−ム偏向用走査ミラ−の面倒れを検出あるいは測定する装置

Country Status (1)

Country Link
JP (1) JPS6262204A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009258559A (ja) * 2008-04-21 2009-11-05 Hitachi Via Mechanics Ltd スキャナ装置
US9085382B2 (en) 2011-10-07 2015-07-21 David Teng Pong Method and apparatus for producing cut to length bars in a steel mill

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57208391A (en) * 1981-06-17 1982-12-21 Tokyo Shibaura Electric Co Extra-low temperature transfer tube
JPS5875000A (ja) * 1981-10-30 1983-05-06 Hitachi Ltd 液化ガス汲上げ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57208391A (en) * 1981-06-17 1982-12-21 Tokyo Shibaura Electric Co Extra-low temperature transfer tube
JPS5875000A (ja) * 1981-10-30 1983-05-06 Hitachi Ltd 液化ガス汲上げ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009258559A (ja) * 2008-04-21 2009-11-05 Hitachi Via Mechanics Ltd スキャナ装置
US9085382B2 (en) 2011-10-07 2015-07-21 David Teng Pong Method and apparatus for producing cut to length bars in a steel mill

Also Published As

Publication number Publication date
JPH0370174B2 (enExample) 1991-11-06

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