JPH0370174B2 - - Google Patents

Info

Publication number
JPH0370174B2
JPH0370174B2 JP60201639A JP20163985A JPH0370174B2 JP H0370174 B2 JPH0370174 B2 JP H0370174B2 JP 60201639 A JP60201639 A JP 60201639A JP 20163985 A JP20163985 A JP 20163985A JP H0370174 B2 JPH0370174 B2 JP H0370174B2
Authority
JP
Japan
Prior art keywords
mirror
light beam
photoelectric
scanning
scanning mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60201639A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6262204A (ja
Inventor
Yoshiaki Morizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP20163985A priority Critical patent/JPS6262204A/ja
Publication of JPS6262204A publication Critical patent/JPS6262204A/ja
Publication of JPH0370174B2 publication Critical patent/JPH0370174B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP20163985A 1985-09-13 1985-09-13 光ビ−ム偏向用走査ミラ−の面倒れを検出あるいは測定する装置 Granted JPS6262204A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20163985A JPS6262204A (ja) 1985-09-13 1985-09-13 光ビ−ム偏向用走査ミラ−の面倒れを検出あるいは測定する装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20163985A JPS6262204A (ja) 1985-09-13 1985-09-13 光ビ−ム偏向用走査ミラ−の面倒れを検出あるいは測定する装置

Publications (2)

Publication Number Publication Date
JPS6262204A JPS6262204A (ja) 1987-03-18
JPH0370174B2 true JPH0370174B2 (enExample) 1991-11-06

Family

ID=16444416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20163985A Granted JPS6262204A (ja) 1985-09-13 1985-09-13 光ビ−ム偏向用走査ミラ−の面倒れを検出あるいは測定する装置

Country Status (1)

Country Link
JP (1) JPS6262204A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009258559A (ja) * 2008-04-21 2009-11-05 Hitachi Via Mechanics Ltd スキャナ装置
GB2488386B (en) 2011-10-07 2013-01-16 David Teng Pong Method and apparatus for producing cut to length bars in a steel mill

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57208391A (en) * 1981-06-17 1982-12-21 Tokyo Shibaura Electric Co Extra-low temperature transfer tube
JPS5875000A (ja) * 1981-10-30 1983-05-06 Hitachi Ltd 液化ガス汲上げ装置

Also Published As

Publication number Publication date
JPS6262204A (ja) 1987-03-18

Similar Documents

Publication Publication Date Title
US4838632A (en) Two-dimensional beam scanner
JPS63136017A (ja) 光ビ−ム走査装置
US4433894A (en) Method and apparatus for generating optical scans
JP2780409B2 (ja) 角度検出装置
US4561778A (en) Apparatus for measuring the dimensions of cylindrical objects by means of a scanning laser beam
JP2554026B2 (ja) マイケルソン干渉計
JPH0370174B2 (enExample)
US8294971B2 (en) Apparatus comprising an optical path delay scanner
JP2709949B2 (ja) 走査式描画装置の描画面調整機構
JPS5815768B2 (ja) ソウサコウガクケイ
JPS597331A (ja) 光走査装置
SU1603190A1 (ru) Устройство дл измерени линейных размеров
SU1384944A1 (ru) Устройство дл поворота объекта
JP3374941B2 (ja) 透明板の厚み測定装置
JP2772556B2 (ja) 走査式光学装置
JP3327638B2 (ja) 回転型干渉計
CN111043990B (zh) 一种自准直仪及其使用方法
SU1442824A1 (ru) Способ контрол фотоэлектрических автоколлиматоров
KR100213870B1 (ko) 레이저 스캐닝 유니트용 홀로그램 주사장치의 초점 보정장치
JPH0628820U (ja) 焦点調整装置
JPH0627399A (ja) 光走査用ミラー
JP3069896B2 (ja) レーザプレーナー
JPS60244804A (ja) 角度測定方法
JPH09318438A (ja) 走査光学系のビーム形状測定装置
JPH04155225A (ja) レーザダイオードの放射特性測定装置