JPS6260835B2 - - Google Patents

Info

Publication number
JPS6260835B2
JPS6260835B2 JP58196057A JP19605783A JPS6260835B2 JP S6260835 B2 JPS6260835 B2 JP S6260835B2 JP 58196057 A JP58196057 A JP 58196057A JP 19605783 A JP19605783 A JP 19605783A JP S6260835 B2 JPS6260835 B2 JP S6260835B2
Authority
JP
Japan
Prior art keywords
pattern
photoresist
film
substrate
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58196057A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6088484A (ja
Inventor
Koji Yamada
Shinichiro Yano
Nobuo Myamoto
Hiroyuki Mori
Mikio Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58196057A priority Critical patent/JPS6088484A/ja
Publication of JPS6088484A publication Critical patent/JPS6088484A/ja
Publication of JPS6260835B2 publication Critical patent/JPS6260835B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP58196057A 1983-10-21 1983-10-21 ジヨセフソン素子のパタ−ン形成方法 Granted JPS6088484A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58196057A JPS6088484A (ja) 1983-10-21 1983-10-21 ジヨセフソン素子のパタ−ン形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58196057A JPS6088484A (ja) 1983-10-21 1983-10-21 ジヨセフソン素子のパタ−ン形成方法

Publications (2)

Publication Number Publication Date
JPS6088484A JPS6088484A (ja) 1985-05-18
JPS6260835B2 true JPS6260835B2 (enExample) 1987-12-18

Family

ID=16351477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58196057A Granted JPS6088484A (ja) 1983-10-21 1983-10-21 ジヨセフソン素子のパタ−ン形成方法

Country Status (1)

Country Link
JP (1) JPS6088484A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0457139U (enExample) * 1990-09-17 1992-05-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0457139U (enExample) * 1990-09-17 1992-05-15

Also Published As

Publication number Publication date
JPS6088484A (ja) 1985-05-18

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