JPS6260820B2 - - Google Patents

Info

Publication number
JPS6260820B2
JPS6260820B2 JP57201482A JP20148282A JPS6260820B2 JP S6260820 B2 JPS6260820 B2 JP S6260820B2 JP 57201482 A JP57201482 A JP 57201482A JP 20148282 A JP20148282 A JP 20148282A JP S6260820 B2 JPS6260820 B2 JP S6260820B2
Authority
JP
Japan
Prior art keywords
comb
electrode
transparent
shaped electrodes
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57201482A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5990966A (ja
Inventor
Masaharu Oono
Masatoshi Kitagawa
Shinichiro Ishihara
Takashi Hirao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57201482A priority Critical patent/JPS5990966A/ja
Publication of JPS5990966A publication Critical patent/JPS5990966A/ja
Publication of JPS6260820B2 publication Critical patent/JPS6260820B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/138—Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes

Landscapes

  • Light Receiving Elements (AREA)
JP57201482A 1982-11-16 1982-11-16 光電変換素子 Granted JPS5990966A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57201482A JPS5990966A (ja) 1982-11-16 1982-11-16 光電変換素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57201482A JPS5990966A (ja) 1982-11-16 1982-11-16 光電変換素子

Publications (2)

Publication Number Publication Date
JPS5990966A JPS5990966A (ja) 1984-05-25
JPS6260820B2 true JPS6260820B2 (enExample) 1987-12-18

Family

ID=16441793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57201482A Granted JPS5990966A (ja) 1982-11-16 1982-11-16 光電変換素子

Country Status (1)

Country Link
JP (1) JPS5990966A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110038165A (ko) 2003-02-05 2011-04-13 가부시키가이샤 한도오따이 에네루기 켄큐쇼 레지스트 패턴의 형성방법 및 반도체장치의 제조방법
WO2004070822A1 (ja) 2003-02-06 2004-08-19 Semiconductor Energy Laboratory Co., Ltd. 半導体装置及び表示装置の製造方法

Also Published As

Publication number Publication date
JPS5990966A (ja) 1984-05-25

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