JPS6257262A - ジヨセフソン接合素子の製造方法 - Google Patents
ジヨセフソン接合素子の製造方法Info
- Publication number
- JPS6257262A JPS6257262A JP60195945A JP19594585A JPS6257262A JP S6257262 A JPS6257262 A JP S6257262A JP 60195945 A JP60195945 A JP 60195945A JP 19594585 A JP19594585 A JP 19594585A JP S6257262 A JPS6257262 A JP S6257262A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- josephson junction
- superconducting layer
- superconducting
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 238000005530 etching Methods 0.000 claims abstract description 19
- 230000004888 barrier function Effects 0.000 claims abstract description 6
- 230000035515 penetration Effects 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 10
- 239000000470 constituent Substances 0.000 claims description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 12
- 238000010586 diagram Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910052758 niobium Inorganic materials 0.000 description 4
- 239000010955 niobium Substances 0.000 description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 229910000484 niobium oxide Inorganic materials 0.000 description 2
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000002887 superconductor Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60195945A JPS6257262A (ja) | 1985-09-06 | 1985-09-06 | ジヨセフソン接合素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60195945A JPS6257262A (ja) | 1985-09-06 | 1985-09-06 | ジヨセフソン接合素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6257262A true JPS6257262A (ja) | 1987-03-12 |
| JPH0260230B2 JPH0260230B2 (enrdf_load_stackoverflow) | 1990-12-14 |
Family
ID=16349584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60195945A Granted JPS6257262A (ja) | 1985-09-06 | 1985-09-06 | ジヨセフソン接合素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6257262A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4904619A (en) * | 1987-03-24 | 1990-02-27 | Hitachi Ltd. | Method of forming Josephson junction devices |
| JPH0461178A (ja) * | 1990-06-22 | 1992-02-27 | Agency Of Ind Science & Technol | ジョセフソン集積回路の作製方法 |
-
1985
- 1985-09-06 JP JP60195945A patent/JPS6257262A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4904619A (en) * | 1987-03-24 | 1990-02-27 | Hitachi Ltd. | Method of forming Josephson junction devices |
| JPH0461178A (ja) * | 1990-06-22 | 1992-02-27 | Agency Of Ind Science & Technol | ジョセフソン集積回路の作製方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0260230B2 (enrdf_load_stackoverflow) | 1990-12-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |