JPS6253948B2 - - Google Patents
Info
- Publication number
- JPS6253948B2 JPS6253948B2 JP57098073A JP9807382A JPS6253948B2 JP S6253948 B2 JPS6253948 B2 JP S6253948B2 JP 57098073 A JP57098073 A JP 57098073A JP 9807382 A JP9807382 A JP 9807382A JP S6253948 B2 JPS6253948 B2 JP S6253948B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafers
- holding plate
- grooves
- side member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging For Recording Disks (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9807382A JPS58215052A (ja) | 1982-06-08 | 1982-06-08 | ウエハ−収納治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9807382A JPS58215052A (ja) | 1982-06-08 | 1982-06-08 | ウエハ−収納治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58215052A JPS58215052A (ja) | 1983-12-14 |
| JPS6253948B2 true JPS6253948B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-12 |
Family
ID=14210166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9807382A Granted JPS58215052A (ja) | 1982-06-08 | 1982-06-08 | ウエハ−収納治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58215052A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6389247U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-11-28 | 1988-06-10 | ||
| TW296361B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1995-06-26 | 1997-01-21 | Kakizaki Seisakusho Kk |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5758760Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1978-03-22 | 1982-12-15 | ||
| JPS5832783B2 (ja) * | 1978-08-09 | 1983-07-15 | 三菱電機株式会社 | 薄板体把持具 |
-
1982
- 1982-06-08 JP JP9807382A patent/JPS58215052A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58215052A (ja) | 1983-12-14 |