JPS6252924B2 - - Google Patents
Info
- Publication number
- JPS6252924B2 JPS6252924B2 JP17038381A JP17038381A JPS6252924B2 JP S6252924 B2 JPS6252924 B2 JP S6252924B2 JP 17038381 A JP17038381 A JP 17038381A JP 17038381 A JP17038381 A JP 17038381A JP S6252924 B2 JPS6252924 B2 JP S6252924B2
- Authority
- JP
- Japan
- Prior art keywords
- thermistor
- temperature
- chip
- heat
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010408 film Substances 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 6
- 230000000694 effects Effects 0.000 description 10
- 238000011282 treatment Methods 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000000137 annealing Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17038381A JPS5871603A (ja) | 1981-10-23 | 1981-10-23 | 薄膜サ−ミスタの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17038381A JPS5871603A (ja) | 1981-10-23 | 1981-10-23 | 薄膜サ−ミスタの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5871603A JPS5871603A (ja) | 1983-04-28 |
| JPS6252924B2 true JPS6252924B2 (ru) | 1987-11-07 |
Family
ID=15903911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17038381A Granted JPS5871603A (ja) | 1981-10-23 | 1981-10-23 | 薄膜サ−ミスタの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5871603A (ru) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2727541B2 (ja) * | 1987-06-12 | 1998-03-11 | エヌオーケー株式会社 | 薄膜サーミスタの製造法 |
| JP2504309B2 (ja) * | 1990-08-23 | 1996-06-05 | 株式会社村田製作所 | 磁器半導体素子の電極形成方法 |
| JPH07123082B2 (ja) * | 1990-08-23 | 1995-12-25 | 株式会社村田製作所 | 磁器半導体素子の電極形成方法 |
-
1981
- 1981-10-23 JP JP17038381A patent/JPS5871603A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5871603A (ja) | 1983-04-28 |
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