JPS6251736U - - Google Patents
Info
- Publication number
- JPS6251736U JPS6251736U JP14137385U JP14137385U JPS6251736U JP S6251736 U JPS6251736 U JP S6251736U JP 14137385 U JP14137385 U JP 14137385U JP 14137385 U JP14137385 U JP 14137385U JP S6251736 U JPS6251736 U JP S6251736U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- conductor
- power supply
- threaded
- external
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 230000001133 acceleration Effects 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000007740 vapor deposition Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14137385U JPS6251736U (fr) | 1985-09-18 | 1985-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14137385U JPS6251736U (fr) | 1985-09-18 | 1985-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6251736U true JPS6251736U (fr) | 1987-03-31 |
Family
ID=31049091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14137385U Pending JPS6251736U (fr) | 1985-09-18 | 1985-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6251736U (fr) |
-
1985
- 1985-09-18 JP JP14137385U patent/JPS6251736U/ja active Pending
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