JPH0290663U - - Google Patents
Info
- Publication number
- JPH0290663U JPH0290663U JP16903488U JP16903488U JPH0290663U JP H0290663 U JPH0290663 U JP H0290663U JP 16903488 U JP16903488 U JP 16903488U JP 16903488 U JP16903488 U JP 16903488U JP H0290663 U JPH0290663 U JP H0290663U
- Authority
- JP
- Japan
- Prior art keywords
- ionization
- vacuum container
- heater
- gas
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007733 ion plating Methods 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 5
- 239000012495 reaction gas Substances 0.000 claims 2
- 239000007795 chemical reaction product Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 239000000376 reactant Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16903488U JPH0290663U (fr) | 1988-12-27 | 1988-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16903488U JPH0290663U (fr) | 1988-12-27 | 1988-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0290663U true JPH0290663U (fr) | 1990-07-18 |
Family
ID=31458739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16903488U Pending JPH0290663U (fr) | 1988-12-27 | 1988-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0290663U (fr) |
-
1988
- 1988-12-27 JP JP16903488U patent/JPH0290663U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GR860944B (en) | Electric device evaporating insecticidal substance | |
| JPS56102577A (en) | Method and device for forming thin film | |
| JPH05331640A (ja) | イオン化蒸着装置 | |
| JPS56139673A (en) | Manufacture of lead coat | |
| JPH0290663U (fr) | ||
| JPS62199767A (ja) | イオンプレ−テイング装置 | |
| EP0029747A1 (fr) | Installation pour le dépôt par vaporisation sous vide et procédé pour former une couche mince en utilisant cette installation | |
| JPS62101860U (fr) | ||
| JP3330159B2 (ja) | ダイナミックミキシング装置 | |
| JPH0334059U (fr) | ||
| JPH0322063U (fr) | ||
| JPH0139712Y2 (fr) | ||
| JPH01279751A (ja) | 薄膜形成装置 | |
| JPS6318056A (ja) | ア−ク式蒸発源 | |
| JPS6251736U (fr) | ||
| JPH06116719A (ja) | 高周波イオンプレーティング装置 | |
| JP3026145B2 (ja) | プラズマ処理方法及び装置 | |
| Morimoto et al. | Ion Plating Apparatus | |
| JPS6167765A (ja) | イオンプレ−テイング装置 | |
| JPS575867A (en) | Vapor depositing apparatus | |
| JPH0375360A (ja) | 薄膜形成装置 | |
| JPH02194165A (ja) | イオンプレーティングにおけるイオン化方法およびイオンプレーティング装置 | |
| JPH0784652B2 (ja) | イオンプレ−テイング装置 | |
| JPS57171666A (en) | Thin film vapor-deposition device | |
| JPS61187373U (fr) |