JPS6251648U - - Google Patents

Info

Publication number
JPS6251648U
JPS6251648U JP14366585U JP14366585U JPS6251648U JP S6251648 U JPS6251648 U JP S6251648U JP 14366585 U JP14366585 U JP 14366585U JP 14366585 U JP14366585 U JP 14366585U JP S6251648 U JPS6251648 U JP S6251648U
Authority
JP
Japan
Prior art keywords
ionization chamber
electrode
acceleration electrode
gas
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14366585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0145068Y2 (US06650917-20031118-M00005.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14366585U priority Critical patent/JPH0145068Y2/ja
Publication of JPS6251648U publication Critical patent/JPS6251648U/ja
Application granted granted Critical
Publication of JPH0145068Y2 publication Critical patent/JPH0145068Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
JP14366585U 1985-09-20 1985-09-20 Expired JPH0145068Y2 (US06650917-20031118-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14366585U JPH0145068Y2 (US06650917-20031118-M00005.png) 1985-09-20 1985-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14366585U JPH0145068Y2 (US06650917-20031118-M00005.png) 1985-09-20 1985-09-20

Publications (2)

Publication Number Publication Date
JPS6251648U true JPS6251648U (US06650917-20031118-M00005.png) 1987-03-31
JPH0145068Y2 JPH0145068Y2 (US06650917-20031118-M00005.png) 1989-12-26

Family

ID=31053558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14366585U Expired JPH0145068Y2 (US06650917-20031118-M00005.png) 1985-09-20 1985-09-20

Country Status (1)

Country Link
JP (1) JPH0145068Y2 (US06650917-20031118-M00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02236933A (ja) * 1989-03-08 1990-09-19 Japan Atom Energy Res Inst ビーム照射装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02236933A (ja) * 1989-03-08 1990-09-19 Japan Atom Energy Res Inst ビーム照射装置

Also Published As

Publication number Publication date
JPH0145068Y2 (US06650917-20031118-M00005.png) 1989-12-26

Similar Documents

Publication Publication Date Title
JPS6251648U (US06650917-20031118-M00005.png)
GB987371A (en) Charged particle generator
ES378259A1 (es) Perfeccionamientos en las fuentes de iones de densidad ra- dial cuasiuniforme.
GB1062168A (en) Improvements in or relating to ion sources
GB971770A (en) Ion source
US4939425A (en) Four-electrode ion source
GB1351582A (en) Ion source
GB1398167A (en) High pressure ion sources
JPH0353402Y2 (US06650917-20031118-M00005.png)
CN212907638U (zh) 潘宁离子源
JP2569913Y2 (ja) イオン注入装置
JPS61206257U (US06650917-20031118-M00005.png)
JPH069040U (ja) イオン源
JPS62203265U (US06650917-20031118-M00005.png)
JPS5719941A (en) Negative ion source
JPS62163242A (ja) プラズマ源
JPH0379153U (US06650917-20031118-M00005.png)
GB938133A (en) Improvements relating to ion guns
JPH02204940A (ja) フリーマン型イオン源
JPS5974659U (ja) イオン注入装置のイオン発生装置
JPS5912258U (ja) 電子線照射装置
JPS6084759A (ja) 熱陰極電子衝撃型イオン源
GB1507087A (en) Extractor ion source
JP2989989B2 (ja) イオン発生装置
JPH01158573U (US06650917-20031118-M00005.png)