JPS6248898B2 - - Google Patents

Info

Publication number
JPS6248898B2
JPS6248898B2 JP818381A JP818381A JPS6248898B2 JP S6248898 B2 JPS6248898 B2 JP S6248898B2 JP 818381 A JP818381 A JP 818381A JP 818381 A JP818381 A JP 818381A JP S6248898 B2 JPS6248898 B2 JP S6248898B2
Authority
JP
Japan
Prior art keywords
forming
metal film
insulating film
growth
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP818381A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57121253A (en
Inventor
Hideaki Itakura
Katsuhiro Hirata
Kanji Konishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP818381A priority Critical patent/JPS57121253A/ja
Publication of JPS57121253A publication Critical patent/JPS57121253A/ja
Publication of JPS6248898B2 publication Critical patent/JPS6248898B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP818381A 1981-01-21 1981-01-21 Manufacture of semiconductor device Granted JPS57121253A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP818381A JPS57121253A (en) 1981-01-21 1981-01-21 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP818381A JPS57121253A (en) 1981-01-21 1981-01-21 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS57121253A JPS57121253A (en) 1982-07-28
JPS6248898B2 true JPS6248898B2 (enrdf_load_stackoverflow) 1987-10-16

Family

ID=11686184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP818381A Granted JPS57121253A (en) 1981-01-21 1981-01-21 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57121253A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054455A (ja) * 1983-09-05 1985-03-28 Mitsubishi Electric Corp 半導体装置の製造方法
JPH0612792B2 (ja) * 1987-03-10 1994-02-16 日本電気株式会社 半導体装置の配線構造

Also Published As

Publication number Publication date
JPS57121253A (en) 1982-07-28

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