JPS6248177B2 - - Google Patents
Info
- Publication number
- JPS6248177B2 JPS6248177B2 JP7708679A JP7708679A JPS6248177B2 JP S6248177 B2 JPS6248177 B2 JP S6248177B2 JP 7708679 A JP7708679 A JP 7708679A JP 7708679 A JP7708679 A JP 7708679A JP S6248177 B2 JPS6248177 B2 JP S6248177B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- mtf
- solid
- scanning element
- state scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0292—Testing optical properties of objectives by measuring the optical modulation transfer function
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7708679A JPS561330A (en) | 1979-06-19 | 1979-06-19 | Frequency chart for measuring mtf |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7708679A JPS561330A (en) | 1979-06-19 | 1979-06-19 | Frequency chart for measuring mtf |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS561330A JPS561330A (en) | 1981-01-09 |
JPS6248177B2 true JPS6248177B2 (enrdf_load_stackoverflow) | 1987-10-13 |
Family
ID=13623963
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7708679A Granted JPS561330A (en) | 1979-06-19 | 1979-06-19 | Frequency chart for measuring mtf |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS561330A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100349976C (zh) * | 2004-09-24 | 2007-11-21 | 中国石油化工股份有限公司 | 橡胶改性的尼龙组合物 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0522847Y2 (enrdf_load_stackoverflow) * | 1987-05-18 | 1993-06-11 |
-
1979
- 1979-06-19 JP JP7708679A patent/JPS561330A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100349976C (zh) * | 2004-09-24 | 2007-11-21 | 中国石油化工股份有限公司 | 橡胶改性的尼龙组合物 |
Also Published As
Publication number | Publication date |
---|---|
JPS561330A (en) | 1981-01-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4291990A (en) | Apparatus for measuring the distribution of irregularities on a mirror surface | |
JP2657505B2 (ja) | マーク位置検出装置およびマーク配置方法 | |
JPH0666241B2 (ja) | 位置検出方法 | |
US5767523A (en) | Multiple detector alignment system for photolithography | |
TW200952042A (en) | Measurement apparatus, measurement method, exposure apparatus, and device manufacturing method | |
US4266876A (en) | Automatic alignment apparatus | |
JPS6248177B2 (enrdf_load_stackoverflow) | ||
US6603561B2 (en) | Chromatic diffraction range finder | |
JPH0135492B2 (enrdf_load_stackoverflow) | ||
JPS6248178B2 (enrdf_load_stackoverflow) | ||
JP2024512852A (ja) | モアレパターンを形成するオーバーレイマーク、これを用いたオーバーレイ測定方法、及び半導体素子の製造方法 | |
JPS59225320A (ja) | 走査ビ−ム径測定装置 | |
US7190444B1 (en) | System and method of measuring field-of-view of an optical sensor | |
JPH0798429A (ja) | 距離計測装置 | |
JP3099875B2 (ja) | 複数レーザビームの走査装置およびレーザビームの走査位置調整方法 | |
JP2946629B2 (ja) | 光ビーム位置検出装置 | |
JPH0572967B2 (enrdf_load_stackoverflow) | ||
JPS5892903A (ja) | 立体形状検出方法および同装置 | |
US7586075B1 (en) | Method for analyzing output data of array subelements of an imaging segmented array | |
JPH0575050B2 (enrdf_load_stackoverflow) | ||
JP2620982B2 (ja) | 位置検出方法 | |
JPH109832A (ja) | 干渉測定装置 | |
JP2890056B2 (ja) | 探針検査方法 | |
JPH0629702B2 (ja) | スペツクル写真解析装置 | |
JPH02122517A (ja) | 位置検出方法および位置検出用マーク |