JPS6248178B2 - - Google Patents
Info
- Publication number
- JPS6248178B2 JPS6248178B2 JP7774279A JP7774279A JPS6248178B2 JP S6248178 B2 JPS6248178 B2 JP S6248178B2 JP 7774279 A JP7774279 A JP 7774279A JP 7774279 A JP7774279 A JP 7774279A JP S6248178 B2 JPS6248178 B2 JP S6248178B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- mtf
- measurement
- solid
- pitch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 18
- 238000010606 normalization Methods 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000000691 measurement method Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0292—Testing optical properties of objectives by measuring the optical modulation transfer function
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7774279A JPS562523A (en) | 1979-06-20 | 1979-06-20 | Frequency chart for mtf measurement |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7774279A JPS562523A (en) | 1979-06-20 | 1979-06-20 | Frequency chart for mtf measurement |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS562523A JPS562523A (en) | 1981-01-12 |
JPS6248178B2 true JPS6248178B2 (enrdf_load_stackoverflow) | 1987-10-13 |
Family
ID=13642354
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7774279A Granted JPS562523A (en) | 1979-06-20 | 1979-06-20 | Frequency chart for mtf measurement |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS562523A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020159241A1 (ko) * | 2019-01-30 | 2020-08-06 | 삼성전자 주식회사 | 이미지를 처리하기 위한 방법 및 그에 따른 장치 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2005203031A1 (en) * | 2005-07-12 | 2007-02-01 | Canon Kabushiki Kaisha | Optical transfer function measurement system |
-
1979
- 1979-06-20 JP JP7774279A patent/JPS562523A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020159241A1 (ko) * | 2019-01-30 | 2020-08-06 | 삼성전자 주식회사 | 이미지를 처리하기 위한 방법 및 그에 따른 장치 |
Also Published As
Publication number | Publication date |
---|---|
JPS562523A (en) | 1981-01-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6876443B2 (en) | Process and apparatus for automatically determining the modulation transfer function of focal plane array cameras | |
US5289264A (en) | Method and apparatus for ascertaining the absolute coordinates of an object | |
US4147052A (en) | Hardness tester | |
JPH0533525B2 (enrdf_load_stackoverflow) | ||
US5090811A (en) | Optical radius gauge | |
US4291990A (en) | Apparatus for measuring the distribution of irregularities on a mirror surface | |
KR100267809B1 (ko) | 촬상수단에 의한 실공간길이 측정방법과 광학계의 교정방법 및 광학계의 교정에 사용하는 기준게이지 | |
JP2004191092A (ja) | 3次元情報取得システム | |
US7301613B2 (en) | Device for analysing a wavefront with enhanced resolution | |
JPS6248178B2 (enrdf_load_stackoverflow) | ||
US3438713A (en) | Device for measuring or testing the image forming quality of lens systems | |
JPS6248177B2 (enrdf_load_stackoverflow) | ||
US6323945B1 (en) | Coma aberration automatic measuring mark and measuring method | |
US11029214B2 (en) | Method and device for analysing an electromagnetic wave in high definition | |
JP2024512852A (ja) | モアレパターンを形成するオーバーレイマーク、これを用いたオーバーレイ測定方法、及び半導体素子の製造方法 | |
SU1275248A1 (ru) | Способ измерени дисторсии оптических систем | |
JP2609270B2 (ja) | Ccdカメラによる測長方法 | |
US7190444B1 (en) | System and method of measuring field-of-view of an optical sensor | |
JPS6411887B2 (enrdf_load_stackoverflow) | ||
JPH051127Y2 (enrdf_load_stackoverflow) | ||
JPS6235052B2 (enrdf_load_stackoverflow) | ||
JPS6118128A (ja) | パタ−ンの重ね合せ誤差測定方法 | |
JPS597240A (ja) | Mtf測定機 | |
JPH0260120A (ja) | 重ね合せ精度評価方法 | |
US7586075B1 (en) | Method for analyzing output data of array subelements of an imaging segmented array |