JPS6246990B2 - - Google Patents
Info
- Publication number
- JPS6246990B2 JPS6246990B2 JP55079781A JP7978180A JPS6246990B2 JP S6246990 B2 JPS6246990 B2 JP S6246990B2 JP 55079781 A JP55079781 A JP 55079781A JP 7978180 A JP7978180 A JP 7978180A JP S6246990 B2 JPS6246990 B2 JP S6246990B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- gate
- type layer
- type
- fet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012535 impurity Substances 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 claims description 13
- 230000005669 field effect Effects 0.000 claims description 6
- 239000000758 substrate Substances 0.000 description 7
- 238000005468 ion implantation Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
Landscapes
- Bipolar Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7978180A JPS575365A (en) | 1980-06-13 | 1980-06-13 | Field effect semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7978180A JPS575365A (en) | 1980-06-13 | 1980-06-13 | Field effect semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS575365A JPS575365A (en) | 1982-01-12 |
JPS6246990B2 true JPS6246990B2 (enrdf_load_stackoverflow) | 1987-10-06 |
Family
ID=13699740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7978180A Granted JPS575365A (en) | 1980-06-13 | 1980-06-13 | Field effect semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS575365A (enrdf_load_stackoverflow) |
-
1980
- 1980-06-13 JP JP7978180A patent/JPS575365A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS575365A (en) | 1982-01-12 |
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