JPS6246980B2 - - Google Patents
Info
- Publication number
- JPS6246980B2 JPS6246980B2 JP54084262A JP8426279A JPS6246980B2 JP S6246980 B2 JPS6246980 B2 JP S6246980B2 JP 54084262 A JP54084262 A JP 54084262A JP 8426279 A JP8426279 A JP 8426279A JP S6246980 B2 JPS6246980 B2 JP S6246980B2
- Authority
- JP
- Japan
- Prior art keywords
- transistor
- substrate
- current
- semiconductor device
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 33
- 239000004065 semiconductor Substances 0.000 claims description 24
- 230000006866 deterioration Effects 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 10
- 238000012544 monitoring process Methods 0.000 claims description 4
- 239000003990 capacitor Substances 0.000 claims description 3
- 230000001186 cumulative effect Effects 0.000 claims 1
- 239000012535 impurity Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 230000005855 radiation Effects 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010893 electron trap Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8426279A JPS568840A (en) | 1979-07-03 | 1979-07-03 | Monitoring method for deterioration of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8426279A JPS568840A (en) | 1979-07-03 | 1979-07-03 | Monitoring method for deterioration of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS568840A JPS568840A (en) | 1981-01-29 |
| JPS6246980B2 true JPS6246980B2 (xx) | 1987-10-06 |
Family
ID=13825532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8426279A Granted JPS568840A (en) | 1979-07-03 | 1979-07-03 | Monitoring method for deterioration of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS568840A (xx) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4944556A (xx) * | 1972-09-06 | 1974-04-26 |
-
1979
- 1979-07-03 JP JP8426279A patent/JPS568840A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4944556A (xx) * | 1972-09-06 | 1974-04-26 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS568840A (en) | 1981-01-29 |
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