JPS6246266Y2 - - Google Patents

Info

Publication number
JPS6246266Y2
JPS6246266Y2 JP3297783U JP3297783U JPS6246266Y2 JP S6246266 Y2 JPS6246266 Y2 JP S6246266Y2 JP 3297783 U JP3297783 U JP 3297783U JP 3297783 U JP3297783 U JP 3297783U JP S6246266 Y2 JPS6246266 Y2 JP S6246266Y2
Authority
JP
Japan
Prior art keywords
storage box
wafer carrier
clean air
section
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3297783U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59140434U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3297783U priority Critical patent/JPS59140434U/ja
Publication of JPS59140434U publication Critical patent/JPS59140434U/ja
Application granted granted Critical
Publication of JPS6246266Y2 publication Critical patent/JPS6246266Y2/ja
Granted legal-status Critical Current

Links

JP3297783U 1983-03-08 1983-03-08 ウエハキヤリア搬送装置 Granted JPS59140434U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3297783U JPS59140434U (ja) 1983-03-08 1983-03-08 ウエハキヤリア搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3297783U JPS59140434U (ja) 1983-03-08 1983-03-08 ウエハキヤリア搬送装置

Publications (2)

Publication Number Publication Date
JPS59140434U JPS59140434U (ja) 1984-09-19
JPS6246266Y2 true JPS6246266Y2 (enrdf_load_stackoverflow) 1987-12-12

Family

ID=30163782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3297783U Granted JPS59140434U (ja) 1983-03-08 1983-03-08 ウエハキヤリア搬送装置

Country Status (1)

Country Link
JP (1) JPS59140434U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0741830B2 (ja) * 1988-09-22 1995-05-10 神鋼電機株式会社 自己クリーン機能付搬送車

Also Published As

Publication number Publication date
JPS59140434U (ja) 1984-09-19

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