JPS6245717B2 - - Google Patents
Info
- Publication number
- JPS6245717B2 JPS6245717B2 JP14240982A JP14240982A JPS6245717B2 JP S6245717 B2 JPS6245717 B2 JP S6245717B2 JP 14240982 A JP14240982 A JP 14240982A JP 14240982 A JP14240982 A JP 14240982A JP S6245717 B2 JPS6245717 B2 JP S6245717B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- dielectric
- electrode
- gas laser
- silent discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 16
- 229920002379 silicone rubber Polymers 0.000 claims description 9
- 239000004945 silicone rubber Substances 0.000 claims description 9
- 239000000843 powder Substances 0.000 claims description 6
- 230000005284 excitation Effects 0.000 claims description 3
- 239000012784 inorganic fiber Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 18
- 239000004568 cement Substances 0.000 description 7
- 239000012212 insulator Substances 0.000 description 6
- 230000010355 oscillation Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000011491 glass wool Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
この発明は、無声放電式ガスレーザ装置の電極
構造の改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in the electrode structure of a silent discharge type gas laser device.
従来、無声放電式ガスレーザ装置の一例として
三軸直交型CO2レーザ装置がある。 Conventionally, a three-axis orthogonal CO 2 laser device is an example of a silent discharge gas laser device.
第１図は従来の三軸直交型CO2レーザの構成原
理を示す図である。第２図はその誘電体電極の断
面図、第３図は第２図の−線による断面図で
放電状態を示す図である。第１図において、レー
ザ発振器１内には接地金属電極２と高周波高電圧
が印加される誘電体電極３が相対向して配置され
ている。この両電極２，３間には放電空間４が形
成され、この放電空間４内には炭酸ガス
（CO2）・ヘリウムガス（He）、窒素ガス（N2）等
の混合ガスから成るガスレーザ媒質が熱交換器６
にて冷却され、ブロア７により加速され毎秒30ｍ
程度の高速度で循環供給されるようになつてい
る。放電空間４の両端には全反射鏡８および部分
反射鏡９が固定配置され、光共振器が形成されて
いる。誘電体電極３は、第２図に示すように金属
電極１０を誘電体１１が被覆し、さらに誘電体電
極３が接地金属電極２と対向する面である主要放
電部５以外の誘電体１１の表面が無機セメント１
２で覆われた構造となつている。誘電体電極３に
は交流電源１４から100KHz、10KV（実効値）
程度の高周波高電圧が印加され、放電空間４に無
声放電として知られている安定したグロー状の放
電が生起される。放電空間４においては、前記ブ
ロア７によるガスレーザの媒質ガス循環流Ｇaと
両電極２，３間の無声放電Ｓpとが第３図に示す
ように直交する状態となり、この時の放電エネル
ギーがガスレーザ媒質に与えられ、この例では炭
酸ガス（CO2）分子がレーザ励起され、前述した
媒質ガス循環流Ｇaおよび無声放電Ｓpとが直交す
ることになる。すなわち、放電空間４とその両端
に固定配置された全反射鏡８と部分反射鏡９で形
成される光共振器の光軸に対してレーザビーム１
５の励起が行われ、光共振器による共振増幅が行
われた後、その一部が部分反射鏡９からレーザビ
ーム１５として外部へ放出されるのである。放電
空間４における放電エネルギーによるガスレーザ
媒質の温度上昇は、レーザ発振のエネルギー効率
を低下させる原因となるので、放電空間４の媒質
ガスの循環流は熱交換器６にて冷却され、ブロア
７にて高速度で強制循環させられることにより、
ガスレーザ媒質の温度上昇を一定以下に抑制して
いる。また、誘電体電極３の温度上昇による誘電
体電極３を構成する誘電体１１の破壊を防止する
ために、誘電体電極３の内部にはポンプ１６から
冷却器１７および純水器１８を通つて冷却され、
かつ電気抵抗の増加された純水冷却水が供給さ
れ、誘電体電極３の発熱が直接冷却水によつて冷
却されるようになつている。 FIG. 1 is a diagram showing the principle of construction of a conventional three-axis orthogonal CO 2 laser. FIG. 2 is a sectional view of the dielectric electrode, and FIG. 3 is a sectional view taken along the - line in FIG. 2, showing a discharge state. In FIG. 1, inside a laser oscillator 1, a ground metal electrode 2 and a dielectric electrode 3 to which a high frequency and high voltage is applied are arranged facing each other. A discharge space 4 is formed between these electrodes 2 and 3, and a gas laser medium consisting of a mixed gas of carbon dioxide (CO 2 ), helium gas (He), nitrogen gas (N 2 ), etc. is formed in this discharge space 4. is heat exchanger 6
It is cooled by the blower 7 and accelerated to 30 m/s.
It is designed to be circulated and supplied at a relatively high speed. A total reflection mirror 8 and a partial reflection mirror 9 are fixedly arranged at both ends of the discharge space 4 to form an optical resonator. As shown in FIG. 2, the dielectric electrode 3 includes a metal electrode 10 covered with a dielectric 11, and a dielectric 11 covering the surface of the dielectric 11 other than the main discharge portion 5, which is the surface facing the ground metal electrode 2. Surface is inorganic cement 1
It has a structure covered with 2. Dielectric electrode 3 receives 100KHz, 10KV (effective value) from AC power supply 14
A stable glow-like discharge known as a silent discharge is generated in the discharge space 4. In the discharge space 4, the medium gas circulating flow G a of the gas laser caused by the blower 7 and the silent discharge S p between the electrodes 2 and 3 are in a state of being perpendicular to each other as shown in FIG. 3, and the discharge energy at this time is In this example, carbon dioxide (CO 2 ) molecules are excited by the laser, and the medium gas circulating flow Ga and the silent discharge Sp are orthogonal to each other. That is, the laser beam 1 is directed toward the optical axis of the optical resonator formed by the discharge space 4 and the total reflection mirror 8 and partial reflection mirror 9 fixedly arranged at both ends of the discharge space 4.
After the laser beam 5 is excited and resonantly amplified by the optical resonator, a portion of the laser beam is emitted from the partially reflecting mirror 9 to the outside as a laser beam 15. The temperature rise of the gas laser medium due to the discharge energy in the discharge space 4 causes a decrease in the energy efficiency of laser oscillation. By forced circulation at high speed,
The temperature rise of the gas laser medium is suppressed below a certain level. In addition, in order to prevent the dielectric 11 constituting the dielectric electrode 3 from being destroyed due to a rise in temperature of the dielectric electrode 3, a pump 16 is connected to a cooler 17 and a deionizer 18 to cooled,
Further, pure water cooling water with increased electrical resistance is supplied, so that the heat generated by the dielectric electrode 3 is directly cooled down by the cooling water.
従来の三軸直交型CO2レーザ装置の構成は以上
の通りであるが、以下接地金属電極２、誘電体電
極３間に印加される高周波高電圧に基づく無声放
電によるレーザ励起作用を説明する。 Although the configuration of the conventional triaxial orthogonal CO 2 laser device is as described above, the laser excitation effect by silent discharge based on the high frequency high voltage applied between the ground metal electrode 2 and the dielectric electrode 3 will be explained below.
無声放電は両電極２，３間に印加される高周波
高電圧（約10KV）に基づき放電空間４内に誘電
体１１を介して生ずる交流放電であり、電源電圧
の各印加周期の上昇過程において放電開始電圧
（約5KV）に達するとパルス的放電が生じる。こ
の放電により誘電体１１の表面には放電電流によ
り電荷が蓄積され、その結果放電空間４の電圧が
低下して、パルス放電が消滅する。以上のパルス
放電が電源電圧の各周期における上昇過程におい
て繰り返えされ、通常の場合、交流電源電圧の半
サイクル中数回〜数十回の繰り返えしパルス放電
が得られる。また、極性の反転する次の半サイク
ルには逆極性の同様のパルス放電が繰り返えされ
る。従つて、放電空間４への放電電力供給は継続
的な繰り返しとなるが、レーザ励起およびレーザ
発振出力はガスレーザ媒質中の窒素がエネルギー
プールとして作用するため時間的にほぼ一様の出
力として得ることができる。 The silent discharge is an alternating current discharge that occurs in the discharge space 4 via the dielectric 11 based on the high frequency high voltage (approximately 10 KV) applied between the electrodes 2 and 3, and the discharge occurs in the rising process of each application cycle of the power supply voltage. When the starting voltage (approximately 5KV) is reached, a pulsed discharge occurs. Due to this discharge, charge is accumulated on the surface of the dielectric 11 due to the discharge current, and as a result, the voltage in the discharge space 4 decreases, and the pulse discharge disappears. The above-described pulse discharge is repeated during the rising process of each cycle of the power supply voltage, and normally, pulse discharge is repeated several times to several tens of times during a half cycle of the AC power supply voltage. Further, in the next half cycle in which the polarity is reversed, similar pulse discharges of opposite polarity are repeated. Therefore, although the supply of discharge power to the discharge space 4 is repeated continuously, the laser excitation and laser oscillation outputs can be obtained as substantially uniform outputs over time because the nitrogen in the gas laser medium acts as an energy pool. Can be done.
以上のような無声放電では誘電体電極３内の金
属電極１０の電圧は約10KV（実効値）と、放電
空間４内の放電開始電圧約5KVよりも大きいの
で、第３図に示すように誘電体１１の背後まで沿
面放電が広がる可能性がある。また、この放電
（以下沿面放電と称する）により放電エネルギー
が有効に放電空間４内（すなわち光共振器空間）
に入らないため発振効率が低下することになる。 In the silent discharge as described above, the voltage of the metal electrode 10 in the dielectric electrode 3 is about 10 KV (effective value), which is higher than the discharge starting voltage of about 5 KV in the discharge space 4. There is a possibility that the creeping discharge will spread to the back of the body 11. In addition, this discharge (hereinafter referred to as creeping discharge) allows the discharge energy to be effectively transferred within the discharge space 4 (that is, the optical resonator space).
Since it does not enter the range, the oscillation efficiency decreases.
そこでこの対策として従来のレーザ発振器１の
誘電体電極３は主要放電部５以外の誘電体１１の
表面を無機セメント１２で覆つていた。また、絶
縁物として無機セメント１２を用いた理由は、無
機セメントは沿面放電にさらされても発振効率を
低下させる有機性アウトガスの発生がないためで
ある。 As a countermeasure against this problem, the surface of the dielectric electrode 3 of the conventional laser oscillator 1 is covered with an inorganic cement 12, except for the main discharge section 5. Furthermore, the reason why the inorganic cement 12 is used as the insulator is that even when inorganic cement is exposed to creeping discharge, it does not generate organic outgas that reduces oscillation efficiency.
従来の無声放電式ガスレーザ装置の電極は以上
のように構成され柔軟性のない無機セメント１２
が誘電体１１に密着しているので放電に基づく誘
電体電極３の熱膨張による歪みのために誘電体１
１が破壊される事故が頻発し、また、沿面放電を
減少させる目的で無機セメント１２の層の厚さを
増すと、ますます接合面で生ずる歪を増す結果と
なるので厚く無機セメント１２の層を施すことが
できないという欠点があつた。 The electrodes of conventional silent discharge gas laser devices are constructed as described above and are made of inorganic cement 12 which has no flexibility.
Since the dielectric electrode 3 is in close contact with the dielectric 11, the dielectric 1 is distorted due to thermal expansion of the dielectric electrode 3 due to discharge.
Accidents in which the inorganic cement 12 is destroyed frequently occur, and if the thickness of the inorganic cement 12 layer is increased for the purpose of reducing creeping discharge, the strain that occurs at the joint surface will further increase. The disadvantage was that it was not possible to apply
この発明は、上述の点にかんがみてなされたも
ので、誘電体の主要放電部以外の表面を柔軟性を
有する絶縁物層で被覆することにより上述の欠点
を解消し、高効率、高信頼性を有する無声放電式
ガスレーザ装置を提供することを目的とする。以
下この発明を図面に基づいて説明する。 This invention was made in view of the above points, and it solves the above drawbacks by coating the surface of the dielectric other than the main discharge part with a flexible insulating layer, thereby achieving high efficiency and high reliability. An object of the present invention is to provide a silent discharge type gas laser device having the following features. The present invention will be explained below based on the drawings.
第４図はこの発明の一実施例をなす誘電体電極
の断面図、第５図は第４図の−線による断面
図で、無声放電Ｓpおよび媒質ガス循環流Ｇaの状
態を示す図である。第４図、第５図において、第
１図〜第３図と同一符号を付した部分は同一部分
を示すので説明は省略する。第４図、第５図に示
すように誘電体電極３′は金属電極１０を誘電体
１１で被覆し、さらにシリコンゴム系絶縁物層１
３にて誘電体電極３′が接地金属電極２と対向す
る誘電体１１の主要放電部５以外の表面を被覆す
る構造となつている。 FIG. 4 is a cross-sectional view of a dielectric electrode constituting an embodiment of the present invention, and FIG. 5 is a cross-sectional view taken along the - line in FIG. 4, showing the state of silent discharge S p and medium gas circulating flow G a It is. In FIGS. 4 and 5, parts given the same reference numerals as those in FIGS. 1 to 3 indicate the same parts, and therefore the description thereof will be omitted. As shown in FIGS. 4 and 5, the dielectric electrode 3' includes a metal electrode 10 covered with a dielectric 11, and a silicone rubber insulating layer 1.
3, the dielectric electrode 3' covers the surface of the dielectric 11 facing the ground metal electrode 2 other than the main discharge portion 5.
上述のように、第４図、第５図に示す実施例に
おいては、誘電体電極３′が接地金属電極２と対
向する誘電体１１の主要放電部５以外の表面を、
柔軟性を有し、有機性アウトガスの発生の少ない
シリコンゴム系絶縁物層１３により被覆する構造
とした。従つて放電エネルギーにより誘電体電極
３′が熱膨脹してもシリコンゴム系絶縁物層１３
がその柔軟性により誘電体１１の膨張変化を吸収
することになり、誘電体１１が破壊されるという
ことはない。さらにシリコンゴム系絶縁物層１３
は厚さを増すことができ、第５図に示すように誘
電体電極３′の主要放電部５以外の沿面放電を防
ぎ有効に放電エネルギーがガスレーザ媒質に与え
られることになる。また、シリコンゴム系絶縁物
層１３はその性質上多少の沿面放電にさらされて
も有機性アウトガスの発生が極めて少ない。 As described above, in the embodiment shown in FIGS. 4 and 5, the dielectric electrode 3' covers the surface of the dielectric 11 other than the main discharge portion 5 facing the ground metal electrode 2.
The structure is such that it is covered with a silicone rubber-based insulating layer 13 that is flexible and generates little organic outgas. Therefore, even if the dielectric electrode 3' thermally expands due to discharge energy, the silicone rubber insulator layer 13
Because of its flexibility, it absorbs the expansion change of the dielectric 11, and the dielectric 11 is not destroyed. Furthermore, silicone rubber insulator layer 13
The thickness of the dielectric electrode 3' can be increased, and as shown in FIG. 5, creeping discharge other than the main discharge portion 5 of the dielectric electrode 3' can be prevented and discharge energy can be effectively applied to the gas laser medium. Furthermore, due to its properties, the silicone rubber insulator layer 13 generates very little organic outgas even if it is exposed to some creeping discharge.
なお、上記実施例では誘電体電極３′が接地金
属電極２と対向する誘電体１１の主要放電部５以
外の表面をシリコンゴム系絶縁物層１３で覆うこ
とにより主要放電部５以外の沿面放電を防ぎ無声
放電を放電空間４内のみに発生させてレーザの発
振効率を増すようにしたが、シリコンゴム系絶縁
物層１３を以下の(イ)、(ロ)で示す条件を満す材料お
よび構造のものに換えても上記実施例と同様の効
果を得ることができる。 In the above embodiment, by covering the surface of the dielectric 11 other than the main discharge part 5 of the dielectric 11 facing the ground metal electrode 2 with the silicone rubber insulator layer 13, the dielectric electrode 3' prevents creeping discharge other than the main discharge part 5. In order to increase the laser oscillation efficiency by preventing silent discharge from occurring only in the discharge space 4, the silicone rubber insulating layer 13 is made of a material that satisfies the conditions shown in (a) and (b) below. Even if the structure is changed, the same effects as in the above embodiment can be obtained.
(イ) 絶縁材料面と誘電体面との間に誘電体が熱膨
張しても歪みが生じない（ストレスが誘電体に
かからない）構造または材料であること。(b) The structure or material should not cause distortion (no stress is applied to the dielectric) even when the dielectric expands thermally between the insulating material surface and the dielectric material surface.
(ロ) 沿面放電にさらされても有機性アウトガスの
発生が少ない絶縁材料であること。(b) The insulating material must generate little organic outgas even when exposed to creeping discharge.
第６図は上記(イ)、(ロ)の条件を満すこの発明の他
の実施例を示す図である。この図において、第１
図乃至第３図と同一符号を付した部分は同一部分
を示すので説明は省略する。１９はセラミツクス
パウダ等からなる無機質粉体、２０は絶縁性枠で
ある。無機質粉体１９は適当な手段にて圧縮充填
し、空隙含有率の小さい状態とされ、実質的に主
要放電部５以外の沿面放電が進展するのを防ぐ作
用を奏する。また、第６図に示す類似の構造であ
れば、グラスウール等の無機質繊維をもつてセラ
ミツクスパウダにかえることも可能である。 FIG. 6 is a diagram showing another embodiment of the present invention that satisfies the conditions (a) and (b) above. In this figure, the first
The parts given the same reference numerals as those in FIGS. 3 to 3 indicate the same parts, and therefore the description thereof will be omitted. 19 is an inorganic powder such as ceramic powder, and 20 is an insulating frame. The inorganic powder 19 is compressed and filled by an appropriate means to have a small void content, and has the effect of substantially preventing creeping discharge from developing in areas other than the main discharge portion 5. Further, if the structure is similar to that shown in FIG. 6, it is also possible to use inorganic fibers such as glass wool to make ceramic powder.
以上説明したようにこの発明に係る無声放電式
ガスレーザ装置は、誘電体電極を構成する金属電
極を被覆する誘電体の接地金属電極と対向する部
分以外の表面に柔軟性を有する絶縁物層を設けた
ので、誘電体電極の熱膨張による誘電体の破壊を
防止し、電極の信頼性が向上すると共に、沿面放
電の進展を抑え発振効率が上昇するという極めて
すぐれた効果を有するものである。 As explained above, in the silent discharge gas laser device according to the present invention, a flexible insulating layer is provided on the surface of the dielectric covering the metal electrode constituting the dielectric electrode other than the portion facing the ground metal electrode. Therefore, it has extremely excellent effects of preventing breakdown of the dielectric due to thermal expansion of the dielectric electrode, improving the reliability of the electrode, and suppressing the progress of creeping discharge and increasing the oscillation efficiency.
第１図は従来の無声放電式ガスレーザの一例を
示す概略図、第２図は第１図の要部電極構造を示
す断面図、第３図は第２図の−線による断面
図、第４図はこの発明に係るガスレーザの実施例
の要部電極構造を示す断面図、第５図は第４図の
−線による断面図、第６図はこの発明の他の
実施例を示す断面図である。
図中、２は接地金属電極、３，３′は誘電体電
極、４は放電空間、５は主要放電部、１０は金属
電極、１１は誘電体、１３はシリコンゴム系絶縁
物層、１４は交流電源、１９は無機質粉体、２０
は絶縁性枠である。なお、図中の同一符号は同一
または相当部分を示す。
Fig. 1 is a schematic diagram showing an example of a conventional silent discharge type gas laser, Fig. 2 is a sectional view showing the main electrode structure of Fig. 1, Fig. 3 is a sectional view taken along the - line in Fig. 2, and Fig. 4 The figure is a sectional view showing the main electrode structure of an embodiment of a gas laser according to the present invention, FIG. 5 is a sectional view taken along the - line in FIG. 4, and FIG. 6 is a sectional view showing another embodiment of the invention. be. In the figure, 2 is a grounded metal electrode, 3 and 3' are dielectric electrodes, 4 is a discharge space, 5 is a main discharge part, 10 is a metal electrode, 11 is a dielectric, 13 is a silicone rubber insulator layer, and 14 is a AC power supply, 19 is inorganic powder, 20
is an insulating frame. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
電極の間に交流高電圧を印加し前記両電極間に無
声放電を発生させ、この無声放電をレーザ励起源
とする無声放電式ガスレーザ装置において、前記
誘電体電極を構成する金属電極を被覆する誘電体
の前記接地金属電極と対向する部分以外の表面に
柔軟性を有する絶縁物層を設けたことを特徴とす
る無声放電式ガスレーザ装置。 ２ 柔軟性を有する絶縁物層として、シリコンゴ
ム系絶縁物層を用いることを特徴とする特許請求
の範囲第１項記載の無声放電式ガスレーザ装置。 ３ 柔軟性を有する絶縁物層として、無機質粉体
の層を用いることを特徴とする特許請求の範囲第
１項記載の無声放電式ガスレーザ装置。 ４ 柔軟性を有する絶縁物層として、無機質繊維
の層を用いることを特徴とする特許請求の範囲第
１項記載の無声放電式ガスレーザ装置。[Claims] 1. A high AC voltage is applied between a grounded metal electrode and a dielectric electrode that are arranged opposite each other to generate a silent discharge between the two electrodes, and this silent discharge is used as a laser excitation source. A silent discharge type gas laser device, characterized in that a flexible insulating layer is provided on a surface of a dielectric covering a metal electrode constituting the dielectric electrode other than a portion facing the ground metal electrode. Discharge type gas laser device. 2. The silent discharge gas laser device according to claim 1, wherein a silicone rubber-based insulating layer is used as the flexible insulating layer. 3. The silent discharge gas laser device according to claim 1, wherein a layer of inorganic powder is used as the flexible insulating layer. 4. The silent discharge gas laser device according to claim 1, wherein an inorganic fiber layer is used as the flexible insulating layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14240982A JPS5932187A (en) | 1982-08-17 | 1982-08-17 | Silent discharge type gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14240982A JPS5932187A (en) | 1982-08-17 | 1982-08-17 | Silent discharge type gas laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5932187A JPS5932187A (en) | 1984-02-21 |
| JPS6245717B2 true JPS6245717B2 (en) | 1987-09-28 |
Family
ID=15314665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14240982A Granted JPS5932187A (en) | 1982-08-17 | 1982-08-17 | Silent discharge type gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5932187A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6197047A (en) * | 1984-10-18 | 1986-05-15 | 日本酸素株式会社 | Attritor |
| US4737964A (en) * | 1985-11-12 | 1988-04-12 | Hughes Aircraft Company | RF discharge suppression in low pressure gas devices |
| JPH0770770B2 (en) * | 1986-02-07 | 1995-07-31 | 三菱電機株式会社 | Silent discharge gas laser device |
| JP2628313B2 (en) * | 1987-09-07 | 1997-07-09 | 株式会社小松製作所 | Gas laser device |
| JP4767128B2 (en) * | 2005-08-16 | 2011-09-07 | 株式会社山本製作所 | Production method and production apparatus for pregelatinized flour |
-
1982
- 1982-08-17 JP JP14240982A patent/JPS5932187A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5932187A (en) | 1984-02-21 |
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