JPS62451B2 - - Google Patents
Info
- Publication number
- JPS62451B2 JPS62451B2 JP51118051A JP11805176A JPS62451B2 JP S62451 B2 JPS62451 B2 JP S62451B2 JP 51118051 A JP51118051 A JP 51118051A JP 11805176 A JP11805176 A JP 11805176A JP S62451 B2 JPS62451 B2 JP S62451B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron beam
- detector
- thin film
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 23
- 239000010409 thin film Substances 0.000 claims description 18
- 238000000921 elemental analysis Methods 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000000851 scanning transmission electron micrograph Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11805176A JPS5343596A (en) | 1976-09-30 | 1976-09-30 | Microanalyzer of x ray and its similar device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11805176A JPS5343596A (en) | 1976-09-30 | 1976-09-30 | Microanalyzer of x ray and its similar device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5343596A JPS5343596A (en) | 1978-04-19 |
| JPS62451B2 true JPS62451B2 (enrdf_load_stackoverflow) | 1987-01-08 |
Family
ID=14726798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11805176A Granted JPS5343596A (en) | 1976-09-30 | 1976-09-30 | Microanalyzer of x ray and its similar device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5343596A (enrdf_load_stackoverflow) |
-
1976
- 1976-09-30 JP JP11805176A patent/JPS5343596A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5343596A (en) | 1978-04-19 |
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