JPS6244525Y2 - - Google Patents
Info
- Publication number
- JPS6244525Y2 JPS6244525Y2 JP7813984U JP7813984U JPS6244525Y2 JP S6244525 Y2 JPS6244525 Y2 JP S6244525Y2 JP 7813984 U JP7813984 U JP 7813984U JP 7813984 U JP7813984 U JP 7813984U JP S6244525 Y2 JPS6244525 Y2 JP S6244525Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rod
- holding
- hole
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010453 quartz Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7813984U JPS6027430U (ja) | 1984-05-28 | 1984-05-28 | ウエハ保持具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7813984U JPS6027430U (ja) | 1984-05-28 | 1984-05-28 | ウエハ保持具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6027430U JPS6027430U (ja) | 1985-02-25 |
| JPS6244525Y2 true JPS6244525Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-25 |
Family
ID=30208142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7813984U Granted JPS6027430U (ja) | 1984-05-28 | 1984-05-28 | ウエハ保持具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6027430U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1984
- 1984-05-28 JP JP7813984U patent/JPS6027430U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6027430U (ja) | 1985-02-25 |