JPS624336A - ウエ−ハボ−ト搬送用具 - Google Patents

ウエ−ハボ−ト搬送用具

Info

Publication number
JPS624336A
JPS624336A JP14249585A JP14249585A JPS624336A JP S624336 A JPS624336 A JP S624336A JP 14249585 A JP14249585 A JP 14249585A JP 14249585 A JP14249585 A JP 14249585A JP S624336 A JPS624336 A JP S624336A
Authority
JP
Japan
Prior art keywords
wafer boat
arm
support part
supporting part
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14249585A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0525179B2 (cs
Inventor
Takashi Tanaka
隆 田中
Shunkichi Sato
佐藤　俊吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP14249585A priority Critical patent/JPS624336A/ja
Publication of JPS624336A publication Critical patent/JPS624336A/ja
Publication of JPH0525179B2 publication Critical patent/JPH0525179B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Furnace Charging Or Discharging (AREA)
  • Furnace Details (AREA)
JP14249585A 1985-07-01 1985-07-01 ウエ−ハボ−ト搬送用具 Granted JPS624336A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14249585A JPS624336A (ja) 1985-07-01 1985-07-01 ウエ−ハボ−ト搬送用具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14249585A JPS624336A (ja) 1985-07-01 1985-07-01 ウエ−ハボ−ト搬送用具

Publications (2)

Publication Number Publication Date
JPS624336A true JPS624336A (ja) 1987-01-10
JPH0525179B2 JPH0525179B2 (cs) 1993-04-12

Family

ID=15316655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14249585A Granted JPS624336A (ja) 1985-07-01 1985-07-01 ウエ−ハボ−ト搬送用具

Country Status (1)

Country Link
JP (1) JPS624336A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63132299U (cs) * 1987-02-20 1988-08-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63132299U (cs) * 1987-02-20 1988-08-30

Also Published As

Publication number Publication date
JPH0525179B2 (cs) 1993-04-12

Similar Documents

Publication Publication Date Title
US3272350A (en) Method and apparatus for semiconductor wafer handling
US6457929B2 (en) Apparatus and method for automatically transferring wafers between wafer holders in a liquid environment
JPH04294535A (ja) 表面処理装置のウエハ移替装置
US4767251A (en) Cantilever apparatus and method for loading wafer boats into cantilever diffusion tubes
JPS624336A (ja) ウエ−ハボ−ト搬送用具
JPS63208223A (ja) ウエハ処理装置
JP2736127B2 (ja) 被処理体ボート及びそれを用いた縦型熱処理装置
KR920007120A (ko) 종형 열처리장치
JPS6245020A (ja) 半導体加熱用石英管のシ−ル方法
JPS60143628A (ja) 熱処理用管
JPS6038018B2 (ja) 半導体ウエ−ハの減圧熱処理炉
JPH0645294A (ja) 半導体ウェハーの不純物拡散装置
JPS6373620A (ja) 高温処理装置
JPH1131639A (ja) 半導体製造装置
JPH04142743A (ja) 熱処理装置
JPS60143629A (ja) 半導体の減圧熱処理法
KR100869644B1 (ko) 자가 건조형 반도체 웨이퍼 이송용 로봇암 장치
JP2507771B2 (ja) 熱処理炉への反応管の挿入及び取出し方法
JPH10163119A (ja) 熱処理装置メンテナンス用治工具
JPH0463542B2 (cs)
JP2763893B2 (ja) 縦型熱処理炉
JPS6021538A (ja) 半導体オ−トロ−デイング用搬送用具
JPS605218B2 (ja) 熱バランス用治具
JPS60187027A (ja) 部品の洗浄方法
JPS6139544A (ja) ウエ−ハ保持具