JPS6242796Y2 - - Google Patents

Info

Publication number
JPS6242796Y2
JPS6242796Y2 JP1983171883U JP17188383U JPS6242796Y2 JP S6242796 Y2 JPS6242796 Y2 JP S6242796Y2 JP 1983171883 U JP1983171883 U JP 1983171883U JP 17188383 U JP17188383 U JP 17188383U JP S6242796 Y2 JPS6242796 Y2 JP S6242796Y2
Authority
JP
Japan
Prior art keywords
vibrator
electrostrictive
cleaning
magnetostrictive
electrostrictive vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983171883U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6079588U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17188383U priority Critical patent/JPS6079588U/ja
Publication of JPS6079588U publication Critical patent/JPS6079588U/ja
Application granted granted Critical
Publication of JPS6242796Y2 publication Critical patent/JPS6242796Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP17188383U 1983-11-08 1983-11-08 振動帰還型超音波洗浄装置 Granted JPS6079588U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17188383U JPS6079588U (ja) 1983-11-08 1983-11-08 振動帰還型超音波洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17188383U JPS6079588U (ja) 1983-11-08 1983-11-08 振動帰還型超音波洗浄装置

Publications (2)

Publication Number Publication Date
JPS6079588U JPS6079588U (ja) 1985-06-03
JPS6242796Y2 true JPS6242796Y2 (enrdf_load_html_response) 1987-11-02

Family

ID=30374826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17188383U Granted JPS6079588U (ja) 1983-11-08 1983-11-08 振動帰還型超音波洗浄装置

Country Status (1)

Country Link
JP (1) JPS6079588U (enrdf_load_html_response)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55128834A (en) * 1979-03-28 1980-10-06 Nec Corp Method of ultrasonically cleaning semiconductor wafer

Also Published As

Publication number Publication date
JPS6079588U (ja) 1985-06-03

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