JPS6242796Y2 - - Google Patents
Info
- Publication number
- JPS6242796Y2 JPS6242796Y2 JP1983171883U JP17188383U JPS6242796Y2 JP S6242796 Y2 JPS6242796 Y2 JP S6242796Y2 JP 1983171883 U JP1983171883 U JP 1983171883U JP 17188383 U JP17188383 U JP 17188383U JP S6242796 Y2 JPS6242796 Y2 JP S6242796Y2
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- electrostrictive
- cleaning
- magnetostrictive
- electrostrictive vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 16
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 3
- 230000003321 amplification Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 230000005284 excitation Effects 0.000 description 3
- 238000004804 winding Methods 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Description
【考案の詳細な説明】
本考案は電歪振動子を洗浄槽の底面外部(又は
必要に応じて側面外部)に接着して固定し、槽内
の洗浄液中に超音波を送り出して物品の洗浄を行
う形式の超音波洗浄装置に関するものである。[Detailed description of the invention] This invention uses an electrostrictive vibrator that is glued and fixed to the outside of the bottom of the cleaning tank (or to the outside of the side if necessary), and sends out ultrasonic waves into the cleaning liquid in the tank to clean items. The present invention relates to an ultrasonic cleaning device that performs the following steps.
この種の超音波洗浄装置を使用する際には、振
動子を駆動する発振器の周波数を振動子の物理的
共振周波数と一致させ、かつ例えば電源電圧が変
動したり、振動子に対する音響負荷が変わつて
も、その変動巾が極端でない限り、共振周波数を
追尾するように配慮し、通常一般には帰還発振方
式を採用している。 When using this type of ultrasonic cleaning equipment, the frequency of the oscillator that drives the vibrator must match the physical resonance frequency of the vibrator, and the frequency of the oscillator that drives the vibrator must match the physical resonance frequency of the vibrator. However, unless the range of fluctuation is extreme, care is taken to track the resonant frequency, and a feedback oscillation method is generally adopted.
第1図は従来の代表的な洗浄装置の構成をブロ
ツク図で示したものであり、1は洗浄槽、2は洗
浄液、3は洗浄槽1の底面下部に接着した例えば
チタン酸バリウムからなる電歪振動子、4は該電
歪振動子3に励振電力を供給するタンク回路、5
は増巾回路、、6は帰還用変成器、7はタンク回
路4から帰還用変成器6に電圧を帰還する帰還回
路、矢印Aは帰還ループである。 FIG. 1 is a block diagram showing the configuration of a typical conventional cleaning device, in which 1 is a cleaning tank, 2 is a cleaning solution, and 3 is a battery made of, for example, barium titanate, bonded to the bottom of the cleaning tank 1. A strain oscillator 4 is a tank circuit 5 that supplies excitation power to the electrostrictive oscillator 3.
, 6 is a feedback transformer, 7 is a feedback circuit that feeds back voltage from the tank circuit 4 to the feedback transformer 6, and arrow A is a feedback loop.
こゝに示した構成で一応の成果を得ているが、
より一層効果的に振動子の共振周波数を確実に追
尾するためには、超音波振動それ自身に比例する
電圧を検出して帰還するように配慮することが望
ましい。 I have achieved some results with the configuration shown here, but
In order to track the resonant frequency of the vibrator more effectively and reliably, it is desirable to detect and feed back a voltage proportional to the ultrasonic vibration itself.
本考案はかゝる観点に立つてなされたもので、
電歪振動子と同じ共振周波数を有する磁歪振動子
を併設し、電歪振動子が駆動されて発生する超音
波振動を磁歪振動子で検出し、振動子の捲線に誘
起される振動に比例する電圧を取り出して帰還す
るようにしたものである。 The present invention was developed from this perspective.
A magnetostrictive vibrator with the same resonance frequency as the electrostrictive vibrator is installed, and the ultrasonic vibration generated when the electrostrictive vibrator is driven is detected by the magnetostrictive vibrator, and the vibration is proportional to the vibration induced in the winding of the vibrator. It extracts voltage and returns it back.
以下に本考案の実施例に就いて説明する。第2
図は実施例の構成を示すブロツク図で、前に示し
た第1図と同じものは同一の符号を付してあり、
8は磁歪振動子で例えばπ型に形成されたフエラ
イト振動子(図では脚部に捲いた捲線を省略)で
電歪振動子3と同じ共振周波数を有す、9は磁歪
振動子でピツクアツプした振動に比例する電圧を
増巾回路5に帰還する帰還回路、矢印Bは帰還ル
ープである。 Examples of the present invention will be described below. Second
The figure is a block diagram showing the configuration of the embodiment, and the same parts as in FIG. 1 shown above are given the same reference numerals.
Numeral 8 is a magnetostrictive vibrator, for example, a ferrite vibrator formed in a π-shape (the windings wound around the legs are omitted in the figure) and has the same resonance frequency as electrostrictive vibrator 3. Numeral 9 is a magnetostrictive vibrator that has been picked up. A feedback circuit, arrow B, is a feedback loop that feeds back a voltage proportional to the vibration to the amplification circuit 5.
タンク回路4の出力によつて電歪振動子3が駆
動されると、超音波振動は洗浄槽1の底面を介し
て洗浄液2に伝達され、一方磁歪振動子8は電歪
振動子3とならんで同じ底面に接着してあるか
ら、電歪振動子3によつて発生される超音波振動
に比例する電圧が取り出され(すなわち第1図の
帰還用変成器に代わる役目をする)、この電圧は
帰還回路9を通して増巾回路5に帰還され、増巾
のあとタンク回路4を経て電歪振動子3を駆動す
る励振ループが形成される。 When the electrostrictive vibrator 3 is driven by the output of the tank circuit 4, the ultrasonic vibration is transmitted to the cleaning liquid 2 through the bottom surface of the cleaning tank 1, while the magnetostrictive vibrator 8 is driven by the electrostrictive vibrator 3. Since they are bonded to the same bottom surface, a voltage proportional to the ultrasonic vibrations generated by the electrostrictive vibrator 3 is extracted (i.e., it serves as an alternative to the feedback transformer in FIG. 1), and this voltage is fed back to the amplification circuit 5 through the feedback circuit 9, and after amplification, an excitation loop for driving the electrostrictive vibrator 3 via the tank circuit 4 is formed.
かくして電歪振動子3は忠実に共振周波数の近
傍の周波数で励振されるから、安定した超音波出
力で洗浄が続行される。 In this way, the electrostrictive vibrator 3 is excited at a frequency close to the resonant frequency, so cleaning can be continued with stable ultrasonic output.
以上説明の通り本考案は、洗浄液を駆動する電
歪振動子と同じ共振周波数を有する磁歪振動子を
併設し、洗浄の時に発生する超音波振動それ自身
に比例する電圧をピツクアツプし、これを帰還電
圧として帰還する励振ループを形成したので、振
動子の共振周波数と近接した周波数で安定した作
動をするので効果的に洗浄できる。 As explained above, the present invention is equipped with a magnetostrictive vibrator that has the same resonance frequency as the electrostrictive vibrator that drives the cleaning liquid, picks up a voltage proportional to the ultrasonic vibration itself generated during cleaning, and returns this voltage. Since an excitation loop is formed that feeds back as a voltage, it operates stably at a frequency close to the resonant frequency of the vibrator, allowing effective cleaning.
第1図は従来の洗浄装置の代表的な構成を示す
ブロツク図。第2図は実施例の構成を示すブロツ
ク図。
1……洗浄槽、2……洗浄液、3……電歪振動
子、4……タンク回路、5……増巾回路、6……
帰還用変圧器、7……帰還回路、8……磁歪振動
子、9……帰還回路。
FIG. 1 is a block diagram showing a typical configuration of a conventional cleaning device. FIG. 2 is a block diagram showing the configuration of the embodiment. 1...Cleaning tank, 2...Cleaning liquid, 3...Electrostrictive vibrator, 4...Tank circuit, 5...Width amplification circuit, 6...
Feedback transformer, 7... feedback circuit, 8... magnetostrictive vibrator, 9... feedback circuit.
Claims (1)
該電歪振動子と等しい共振周波数を有し、かつ該
電歪振動子と近接した位置に併設された磁歪振動
子とを具備しており、電気的駆動系の出力が前記
電歪振動子に印加されて超音波振動が発生され、
前記磁歪振動子に検出される振動に比例する出力
が、電気的駆動系の入力側に帰還されるように構
成されていることを特徴とする振動帰還型超音波
洗浄装置。 An electrostrictive vibrator fixed at an appropriate position in the cleaning tank,
The device includes a magnetostrictive vibrator that has a resonance frequency equal to that of the electrostrictive vibrator and is located close to the electrostrictive vibrator, and the output of the electric drive system is directed to the electrostrictive vibrator. is applied to generate ultrasonic vibrations,
A vibration feedback type ultrasonic cleaning device characterized in that an output proportional to the vibration detected by the magnetostrictive vibrator is fed back to an input side of an electric drive system.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17188383U JPS6079588U (en) | 1983-11-08 | 1983-11-08 | Vibration feedback type ultrasonic cleaning device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17188383U JPS6079588U (en) | 1983-11-08 | 1983-11-08 | Vibration feedback type ultrasonic cleaning device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6079588U JPS6079588U (en) | 1985-06-03 |
JPS6242796Y2 true JPS6242796Y2 (en) | 1987-11-02 |
Family
ID=30374826
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17188383U Granted JPS6079588U (en) | 1983-11-08 | 1983-11-08 | Vibration feedback type ultrasonic cleaning device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6079588U (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55128834A (en) * | 1979-03-28 | 1980-10-06 | Nec Corp | Method of ultrasonically cleaning semiconductor wafer |
-
1983
- 1983-11-08 JP JP17188383U patent/JPS6079588U/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55128834A (en) * | 1979-03-28 | 1980-10-06 | Nec Corp | Method of ultrasonically cleaning semiconductor wafer |
Also Published As
Publication number | Publication date |
---|---|
JPS6079588U (en) | 1985-06-03 |
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