JPH02280876A - Method for driving ultrasonic vibrator - Google Patents

Method for driving ultrasonic vibrator

Info

Publication number
JPH02280876A
JPH02280876A JP10098989A JP10098989A JPH02280876A JP H02280876 A JPH02280876 A JP H02280876A JP 10098989 A JP10098989 A JP 10098989A JP 10098989 A JP10098989 A JP 10098989A JP H02280876 A JPH02280876 A JP H02280876A
Authority
JP
Japan
Prior art keywords
ultrasonic vibrator
ultrasonic transducer
ultrasonic
magnetostrictive
electrostrictive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10098989A
Other languages
Japanese (ja)
Inventor
Masami Ishizuka
石塚 政美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suncorporation
Original Assignee
Sun Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sun Electronics Co Ltd filed Critical Sun Electronics Co Ltd
Priority to JP10098989A priority Critical patent/JPH02280876A/en
Publication of JPH02280876A publication Critical patent/JPH02280876A/en
Pending legal-status Critical Current

Links

Landscapes

  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

PURPOSE:To dispense with a matching coil or a matching condenser and to enhance the conversion efficiency of an ultrasonic vibrator by connecting an electrostriction type ultrasonic vibrator and a magnetostriction type ultrasonic vibrator in series and driving an oscillator. CONSTITUTION:An electrostriction type ultrasonic vibrator 1 and a magnetostriction type ultrasonic vibrator 7 are connected in series and an oscillator 2 is driven. The electrostriction type ultrasonic vibrator 1 is capacitive and the magnetostriction type ultrasonic vibrator 7 is inductive and, therefore, by connecting both vibrators 1, 7 in series, an object can be resonated by the capacitance of the electrostriction type ultrasonic vibrator 1 and the inductance of the magnetostriction type ultrasonic vibrator 7. That is, the frequency of the aforementioned resonance is set to the same value as the resonance frequency of both ultrasonic vibrators 1, 7 to make it possible to achieve the improvement of a power factor and the matching of impedance.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、超音波洗浄装置等に使用する超音波振動子の
、駆動方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for driving an ultrasonic vibrator used in an ultrasonic cleaning device or the like.

〔従来の技術] 第3図は、従来の超音波振動子の駆動方法を説明する原
理図で、(a)は電歪型超音波振動子の駆動方法を説明
する図、(b)は磁歪型超音波振動子の駆動方法を説明
する図、である。
[Prior Art] Fig. 3 is a principle diagram explaining the conventional method of driving an ultrasonic transducer, in which (a) is a diagram explaining the method of driving an electrostrictive ultrasonic transducer, and (b) is a diagram explaining the method of driving an electrostrictive ultrasonic transducer. FIG. 3 is a diagram illustrating a method of driving a type ultrasonic transducer.

(1)電歪型超音波振動子の駆動方法 電歪型超音波振動子1は、圧電素子を使用し、発振器2
の駆動電力を機械的振動に変換するトランスデユーサで
あり、電気的には容量性である。
(1) Driving method of electrostrictive ultrasonic vibrator The electrostrictive ultrasonic vibrator 1 uses a piezoelectric element, and the oscillator 2
It is a transducer that converts the drive power of a motor into mechanical vibration, and is electrically capacitive.

他方、発振器2の駆動電力を効率良く供給するために、
超音波駆動装置4a内に整合用コイル3を設け、該発振
器2と電歪型超音波振動子1との間に直列に接続し、該
電歪型超音波振動子1のキャパシタンスと共振させるこ
とで、力率の改善とインピーダンスの整合を図っている
On the other hand, in order to efficiently supply driving power to the oscillator 2,
A matching coil 3 is provided in the ultrasonic drive device 4a, connected in series between the oscillator 2 and the electrostrictive ultrasonic vibrator 1, and resonated with the capacitance of the electrostrictive ultrasonic vibrator 1. This is aimed at improving the power factor and matching impedance.

ちなみに、第3図(a)は、洗浄用液6の入っている洗
浄槽5に電歪型超音波振動子1を取り付けた、超音波洗
浄装置の例である。
Incidentally, FIG. 3(a) shows an example of an ultrasonic cleaning apparatus in which an electrostrictive ultrasonic vibrator 1 is attached to a cleaning tank 5 containing a cleaning liquid 6.

(2)磁歪型超音波振動子の駆動方法 磁歪型超音波振動子7は、磁歪素子を使用し、発振器2
の駆動電力を機械的振動に変換するトランスデューサで
あり、磁歪素子に磁界をかけるためにコイルを用いる。
(2) Driving method of magnetostrictive ultrasonic transducer The magnetostrictive ultrasonic transducer 7 uses a magnetostrictive element, and the oscillator 2
It is a transducer that converts the drive power of the magnetostrictive element into mechanical vibration, and uses a coil to apply a magnetic field to the magnetostrictive element.

したがって、電気的には誘導性である。Therefore, it is electrically inductive.

他方、発振器2の駆動電力を効率良く供給するために、
超音波駆動装置4b内に整合用キャパシタンス8を設け
、該発振器2と磁歪型超音波振動子7との間に直列に接
続し、該磁歪型超音波振動子7のインダクタンスと共振
させることで、力率の改善とインピーダンスの整合を図
っている。
On the other hand, in order to efficiently supply driving power to the oscillator 2,
A matching capacitance 8 is provided in the ultrasonic drive device 4b, connected in series between the oscillator 2 and the magnetostrictive ultrasonic vibrator 7, and resonated with the inductance of the magnetostrictive ultrasonic vibrator 7. The aim is to improve the power factor and match impedance.

ちなみに、第3図(b)は、洗浄用液6の入っている洗
浄槽5に磁歪型超音波振動子7を取り付けた、超音波洗
浄装置の例である。
Incidentally, FIG. 3(b) shows an example of an ultrasonic cleaning apparatus in which a magnetostrictive ultrasonic vibrator 7 is attached to a cleaning tank 5 containing a cleaning liquid 6.

(3)電歪型超音波振動子と磁歪型超音波振動子の共用 第4図は、従来の電歪型超音波振動子と磁歪型超音波振
動子の共用例を説明する原理図である。
(3) Sharing of electrostrictive ultrasonic transducers and magnetostrictive ultrasonic transducers Figure 4 is a principle diagram illustrating an example of common use of conventional electrostrictive ultrasonic transducers and magnetostrictive ultrasonic transducers. .

1つの装置、例えば1つの洗浄槽5に、電歪型超音波振
動子1と磁歪型超音波振動子7とを取り付け、そして、
該両部音波振動子1.7を駆動する場合は、整合用コイ
ル3を有する超音波駆動装置4aで電歪型超音波振動子
lを、整合用コンデンサ8を有する超音波駆動装置4b
で磁歪型超音波振動子7を、別々に駆動している。
The electrostrictive ultrasonic vibrator 1 and the magnetostrictive ultrasonic vibrator 7 are attached to one device, for example, one cleaning tank 5, and
When driving the double-sided sonic transducer 1.7, the electrostrictive ultrasonic transducer 1 is driven by the ultrasonic driving device 4a having the matching coil 3, and the ultrasonic driving device 4b having the matching capacitor 8.
The magnetostrictive ultrasonic transducer 7 is driven separately.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

従来の駆動方法における最大の問題点は、電歪型超音波
振動子1では整合用コイル3が必要であり、磁歪型超音
波振動子7では整合用コンデンサ8が必要であることで
ある。
The biggest problem with conventional driving methods is that the electrostrictive ultrasonic transducer 1 requires a matching coil 3, and the magnetostrictive ultrasonic transducer 7 requires a matching capacitor 8.

特に電歪型超音波振動子lでは、整合用コイル3の銅損
、ヒステリシス損、渦電流損などの大きさがかなりの大
きさとなり、過大な発熱源となるのである。
In particular, in the electrostrictive ultrasonic transducer 1, the copper loss, hysteresis loss, eddy current loss, etc. of the matching coil 3 are quite large, and become an excessive heat source.

したがって、該発熱量分の効率低下を生じるばかりか、
超音波駆動装置4aを加熱する原因となり、該超音波駆
動装置4aの電子回路の作動環境を、劣悪なものとする
Therefore, not only does efficiency decrease by the amount of heat generated,
This causes the ultrasonic drive device 4a to heat up, making the operating environment of the electronic circuit of the ultrasonic drive device 4a poor.

また、整合用コイル3の大きさや重量も大きいものであ
り、超音波駆動装置4aの小型化や軽量化を妨げる要因
ともなっているのである。
Furthermore, the size and weight of the matching coil 3 are large, which is a factor that prevents the ultrasonic driving device 4a from being made smaller and lighter.

そのため、整合用コイル3を超音波駆動装置4aの外部
に別置きとする場合もある程である。
Therefore, the matching coil 3 is sometimes placed separately outside the ultrasonic driving device 4a.

他方、磁歪型超音波振動子7でも、整合用コンデンサ8
が必要であり、発熱はほとんどないものの、超音波駆動
装置4bの小型化を妨げる要因となっている。
On the other hand, even in the magnetostrictive ultrasonic transducer 7, the matching capacitor 8
Although it generates almost no heat, it is a factor that prevents miniaturization of the ultrasonic driving device 4b.

本発明の技術的課題は、従来の超音波振動子の駆動方法
における以上のような問題を解消し、整合用コイルや整
合用コンデンサを不要とする駆動方法を確立することに
よって、超音波振動子の変換効率を助長し、同時に超音
波駆動装置の発熱量を低減し、小型、軽量、高信顛性の
超音波駆動装置を低コストで実現することにある。
The technical problem of the present invention is to solve the above-mentioned problems in the conventional method of driving an ultrasonic transducer, and to establish a driving method that does not require a matching coil or a matching capacitor. The object of the present invention is to improve the conversion efficiency of the ultrasonic drive device, reduce the amount of heat generated by the ultrasonic drive device, and realize a small, lightweight, highly reliable ultrasonic drive device at low cost.

〔課題を解決するための手段〕[Means to solve the problem]

第1図は、本発明の基本原理を説明する図で、(a)は
電歪型超音波振動子と磁歪型超音波振動子を同一の装置
に取り付けた場合の図、(b)は電歪型超音波振動子と
磁歪型超音波振動子を別々の装置に取り付けた場合の図
、である。
FIG. 1 is a diagram explaining the basic principle of the present invention, (a) is a diagram when an electrostrictive ultrasonic transducer and a magnetostrictive ultrasonic transducer are installed in the same device, and (b) is an illustration of an electrostrictive ultrasonic transducer and a magnetostrictive ultrasonic transducer installed in the same device. FIG. 3 is a diagram showing a case where a strain type ultrasonic transducer and a magnetostrictive type ultrasonic transducer are attached to separate devices.

本発明は、電歪型超音波振動子と磁歪型超音波振動子と
を、−緒にしかも直列接続で使用するところに特徴があ
る。
The present invention is characterized in that an electrostrictive ultrasonic transducer and a magnetostrictive ultrasonic transducer are used together and in series connection.

すなわち、電歪型超音波振動子lと磁歪型超音波振動子
7を直列に接続して発振器2で駆動し、電歪型超音波振
動子lの整合用コイルの代わりに磁歪型超音波振動子7
を使用し、磁歪型超音波振動子7の整合用コンデンサの
代わりに電歪型超音波振動子1を使用し、整合用コイル
と整合用コンデンサを使用しない駆動方法である。
That is, an electrostrictive ultrasonic vibrator l and a magnetostrictive ultrasonic vibrator 7 are connected in series and driven by an oscillator 2, and the magnetostrictive ultrasonic vibrator is used instead of the matching coil of the electrostrictive ultrasonic vibrator l. Child 7
This is a driving method in which the electrostrictive ultrasonic vibrator 1 is used in place of the matching capacitor of the magnetostrictive ultrasonic vibrator 7, and the matching coil and matching capacitor are not used.

この場合、電歪型超音波振動子1と磁歪型超音波振動子
7とは、異なる装置、例えば洗浄槽5aと洗浄槽5bと
に別々に取り付けてあってもよい。
In this case, the electrostrictive ultrasonic transducer 1 and the magnetostrictive ultrasonic transducer 7 may be separately attached to different devices, for example, the cleaning tank 5a and the cleaning tank 5b.

〔作用〕[Effect]

電歪型超音波振動子1は容量性である。他方、磁歪型超
音波振動子7は誘導性である。
The electrostrictive ultrasonic transducer 1 is capacitive. On the other hand, the magnetostrictive ultrasonic transducer 7 is inductive.

したがって、該両振動子1.7を直列に接続することに
よって、電歪型超音波振動子1のキャパシタンスと磁歪
型超音波振動子7のインダクタンスとで共振させること
ができる。
Therefore, by connecting both the transducers 1.7 in series, the capacitance of the electrostrictive ultrasonic transducer 1 and the inductance of the magnetostrictive ultrasonic transducer 7 can resonate.

すなわち、前記共振の周波数を、該再起音波振動子1,
7の共振周波数と同じ値にすることによって、力率改善
とインピーダンスの整合を図ることができる。
That is, the frequency of the resonance is set by the recurrent acoustic wave transducer 1,
By setting the value to be the same as the resonance frequency of No. 7, power factor improvement and impedance matching can be achieved.

そのため、発振器2と該再起音波振動子1.7との間に
、整合用のコイルやコンデンサを設ける必要がない。
Therefore, there is no need to provide a matching coil or capacitor between the oscillator 2 and the recurrent sound wave transducer 1.7.

〔実施例〕〔Example〕

第2図は、実施例を説明するブロック図である。 FIG. 2 is a block diagram illustrating the embodiment.

発振回路9の発振出力を、電力増幅回路10で所定電力
まで増幅し、該駆動電力を出カドランス11を介して超
音波振動子に供給する。
The oscillation output of the oscillation circuit 9 is amplified to a predetermined power by a power amplification circuit 10, and the driving power is supplied to the ultrasonic transducer via an output transformer 11.

他方、超音波振動子は、電歪型超音波振動子12と磁歪
型超音波振動子13とを直列に接続し、出カドランス1
1に接続する。
On the other hand, the ultrasonic transducer has an electrostrictive ultrasonic transducer 12 and a magnetostrictive ultrasonic transducer 13 connected in series, and an output transformer 1.
Connect to 1.

いま、電歪型超音波振動子12の共振周波数を28゜2
KHz、キャパシタンスを4000PFであるとすると
、共振周波数が28.2 KHzの磁歪素子に、インダ
クタンスが約811IHとなるようにコイルを巻き、力
率改善とインピーダンス整合を行うことにより、電気的
共振周波数が最適となる。
Now, the resonance frequency of the electrostrictive ultrasonic transducer 12 is set to 28°2.
KHz, and the capacitance is 4000PF, the electrical resonance frequency can be adjusted by winding a coil around a magnetostrictive element with a resonance frequency of 28.2KHz so that the inductance is approximately 811IH, and performing power factor correction and impedance matching. Optimal.

もちろん、発振回路9の発振周波数も前記の電気的共振
周波数に設定する。
Of course, the oscillation frequency of the oscillation circuit 9 is also set to the above-mentioned electrical resonance frequency.

〔発明の効果〕〔Effect of the invention〕

以上のように本説明の駆動方法によれば、電歪型超音波
振動子と磁歪型超音波振動子とを直列接続して発振器で
駆動することによって、整合用コイルや整合用コンデン
サは不要となる。
As described above, according to the driving method described in this explanation, the electrostrictive ultrasonic transducer and the magnetostrictive ultrasonic transducer are connected in series and driven by an oscillator, thereby eliminating the need for a matching coil or a matching capacitor. Become.

したがって、超音波振動子の変換効率が向上し、超音波
駆動装置の発熱量も非常に少ないものとなり、該装置の
小型・軽量化を図ることができる。
Therefore, the conversion efficiency of the ultrasonic transducer is improved, and the amount of heat generated by the ultrasonic drive device is also extremely small, making it possible to reduce the size and weight of the device.

その結果、高効率で信頼性の高い超音波駆動装置を低コ
ストで実現することができる。
As a result, a highly efficient and reliable ultrasonic driving device can be realized at low cost.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の基本原理を説明する図で、(a>は
電歪型超音波振動子と磁歪型超音波振動子を同一の装置
に取り付けた場合の図、(b)は電歪型超音波振動子と
磁歪型超音波振動子を別々の装置に取り付けた場合の図
、 第2図は、実施例を説明するブロック図、第3図は、従
来の超音波振動子の駆動方法を説明する原理図で、(a
)は電歪型超音波振動子の駆動方法を説明する図、(b
)は磁歪型超音波振動子の駆動方法を説明する図、 第4図は、従来の電歪型超音波振動子と磁歪型超音波振
動子の共用例を説明する原理図、である。 図において、1は電歪型超音波振動子、2は発振器、3
は整合用コイル、4a、4bは超音波駆動装置、5.5
a、5bは洗浄槽、6.6a、6bは洗浄用液、7は磁
歪型超音波振動子、8は整合用コンデンサ、9は発振回
路、10は電力増幅回路、11は出カドランス、12は
電歪型超音波振動子、13は磁歪型超音波振動子、をそ
れぞれ示している。 特許出願人   株式会社サン電子 代理人 弁理士  福 島 康 文 失疵例 第2t21 ムコ 淡承の超音云皮湘I防5の11力方ヲを第3図 従来の電歪型超音淑磁勤3乙 磁孟型超曾淑雀動子ω長用4ケ1 第40 手続補正書 ■。 事件の表示 特願平1−100989 2゜ 発明の名称 超音波振動子の駆動方法 5゜ 補正命令の日付 (自発) 6゜ 補正の対象 図面全図
FIG. 1 is a diagram explaining the basic principle of the present invention, (a> is a diagram when an electrostrictive ultrasonic transducer and a magnetostrictive ultrasonic transducer are installed in the same device, and (b) A diagram showing the case where a strain type ultrasonic transducer and a magnetostrictive type ultrasonic transducer are installed in separate devices. Fig. 2 is a block diagram explaining the embodiment. Fig. 3 is a diagram showing the drive of a conventional ultrasonic transducer. In the principle diagram explaining the method, (a
) is a diagram explaining the driving method of an electrostrictive ultrasonic transducer, (b
) is a diagram explaining a method of driving a magnetostrictive ultrasonic transducer, and FIG. 4 is a principle diagram explaining an example of common use of a conventional electrostrictive ultrasonic transducer and a magnetostrictive ultrasonic transducer. In the figure, 1 is an electrostrictive ultrasonic transducer, 2 is an oscillator, and 3
is a matching coil, 4a and 4b are ultrasonic drive devices, 5.5
a and 5b are cleaning tanks, 6a and 6b are cleaning liquids, 7 is a magnetostrictive ultrasonic transducer, 8 is a matching capacitor, 9 is an oscillation circuit, 10 is a power amplifier circuit, 11 is an output transformer, and 12 is a An electrostrictive ultrasonic transducer is shown, and 13 is a magnetostrictive ultrasonic transducer. Patent applicant: Yasushi Fukushima, Patent attorney, Sun Denshi Co., Ltd. Patent attorney Yasushi Fukushima Case No. 2t21 The 11 power methods of Muco's inconspicuous ultrasonic wave I-5 are shown in Figure 3. Conventional electrostrictive type ultrasonic wave. Qin 3 Otomagi Meng type Super Zeng Shujaku moving child ω length 4 ke 1 No. 40 Procedural amendment ■. Indication of the case Patent application Hei 1-100989 2゜Name of the invention Ultrasonic transducer driving method 5゜Date of amendment order (voluntary) 6゜All drawings subject to amendment

Claims (1)

【特許請求の範囲】 電歪型超音波振動子(1)と磁歪型超音波振動子(7)
を直列に接続して発振器(2)で駆動し、電歪型超音波
振動子(1)の整合用コイルの代わりに磁歪型超音波振
動子(7)を使用し、 磁歪型超音波振動子(7)の整合用コンデンサの代わり
に電歪型超音波振動子(1)を使用し、整合用コイルと
整合用コンデンサを使用しないことを特徴とする超音波
振動子の駆動方法。
[Claims] Electrostrictive ultrasonic transducer (1) and magnetostrictive ultrasonic transducer (7)
are connected in series and driven by an oscillator (2), and a magnetostrictive ultrasonic vibrator (7) is used instead of the matching coil of the electrostrictive ultrasonic vibrator (1). A method for driving an ultrasonic transducer, characterized in that an electrostrictive ultrasonic transducer (1) is used instead of the matching capacitor of (7), and a matching coil and a matching capacitor are not used.
JP10098989A 1989-04-20 1989-04-20 Method for driving ultrasonic vibrator Pending JPH02280876A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10098989A JPH02280876A (en) 1989-04-20 1989-04-20 Method for driving ultrasonic vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10098989A JPH02280876A (en) 1989-04-20 1989-04-20 Method for driving ultrasonic vibrator

Publications (1)

Publication Number Publication Date
JPH02280876A true JPH02280876A (en) 1990-11-16

Family

ID=14288725

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10098989A Pending JPH02280876A (en) 1989-04-20 1989-04-20 Method for driving ultrasonic vibrator

Country Status (1)

Country Link
JP (1) JPH02280876A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116683883A (en) * 2023-04-07 2023-09-01 苏州科技大学 Impedance matching circuit and method for rotary ultrasonic processing system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116683883A (en) * 2023-04-07 2023-09-01 苏州科技大学 Impedance matching circuit and method for rotary ultrasonic processing system
CN116683883B (en) * 2023-04-07 2024-05-17 苏州科技大学 Impedance matching circuit and method for rotary ultrasonic processing system

Similar Documents

Publication Publication Date Title
ATE181857T1 (en) DEVICE FOR COUPLING ULTRASOUND INTO A LIQUID OR PASTY MEDIUM
JPH04281373A (en) Vibration wave motor
JPH02280876A (en) Method for driving ultrasonic vibrator
Lin Study on the parallel electric matching of high power piezoelectric transducers
JPH02199994A (en) Frequency variable vibrator
JP4309160B2 (en) Driving method of ultrasonic composite vibrator
GB966859A (en) Improvements in or relating to vibratory apparatus
JPH053270Y2 (en)
JPS61203873A (en) Drive circuit of vibration wave motor
US5389852A (en) Ultrasonic signal converter
JPH0379199A (en) Transmitter/receiver
JPH04247268A (en) Ultrasonic vibrating device
JPH07231683A (en) Ultrasonic actuator drive circuit
JPS6242796Y2 (en)
JP2592110Y2 (en) Transducer for ultrasonic cleaner
JPH0128492Y2 (en)
JPH0434950Y2 (en)
SU720577A1 (en) Vibratory motor
KR200218882Y1 (en) Apparatus for elimination of resonance noise in supersonic scrubber
JPH0414154Y2 (en)
JP3769735B2 (en) Ultrasonic exciter
JPH062664Y2 (en) Powerful ultrasonic probe
JPS5930278B2 (en) piezoelectric sound oscillator
JPS6018228B2 (en) Electrostrictive vibrator drive circuit
JPS6318798A (en) Non-directional underwater ultrasonic transducer