CN116683883B - Impedance matching circuit and method for rotary ultrasonic processing system - Google Patents
Impedance matching circuit and method for rotary ultrasonic processing system Download PDFInfo
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Abstract
The invention relates to an impedance matching circuit and a method of a rotary ultrasonic processing system, wherein the rotary ultrasonic processing system comprises an ultrasonic power supply, an induction transmitter and an ultrasonic vibrator, the induction transmitter comprises a primary coil connected with the ultrasonic power supply to form a primary loop and a secondary coil connected with the ultrasonic vibrator to form a secondary loop, the matching circuit comprises a first matching capacitor and a second matching capacitor, the first matching capacitor is connected with the primary coil in series, and the second matching capacitor is connected with the primary coil in parallel; wherein specific matched capacitance parameters exist to cause the primary and secondary loops to resonate simultaneously. According to the invention, the impedance matching of the rotary ultrasonic vibration processing system can be realized by only adding the double-capacitor matching combination at the output end of the power supply without changing the structure of the rotary part, so that the optimal output characteristic is achieved, and the structural design and practical application of various rotary ultrasonic vibration processing systems are facilitated.
Description
Technical Field
The invention relates to the technical field of ultrasonic processing equipment, in particular to an impedance matching circuit and method of a rotary ultrasonic processing system.
Background
The rotary ultrasonic processing technology (RUM for short) is a novel processing technology which has been raised in recent years, and has unique advantages in precise and efficient processing of hard and brittle materials which are difficult to process. In the rotary ultrasonic vibration processing system, an ultrasonic vibrator composed of an ultrasonic transducer, an amplitude transformer and a processing tool is driven by a machine tool spindle to rotate at a high speed, and simultaneously ultrasonic vibration is generated under the drive of an ultrasonic power supply, so that rotary ultrasonic processing is realized. Under the condition of high-speed rotation, reliable transmission of electric energy between an ultrasonic power supply and an ultrasonic vibrator is one of key technologies for stable and reliable operation of a rotary ultrasonic vibration processing system. The conventional brush-slip ring structure is difficult to meet the requirement of high-speed rotation processing. Inductive non-contact power transmission devices (ICPT for short) proposed in recent years realize non-contact transmission of ultrasonic electric signals based on an electromagnetic induction principle. After ICPT is connected between the ultrasonic power supply and the ultrasonic vibrator, the input impedance of the ultrasonic power supply contains reactance components due to the influence of piezoelectric ceramics of the ultrasonic transducer and ICPT coils, so that the output efficiency of the power supply is influenced; the impedance of the secondary loop also has reactance components, which influence the output efficiency and resonance state of the ultrasonic vibrator. In addition, the energy transmission efficiency of ICPT is significantly affected by the gap existing between the primary and secondary coils. Therefore, resonance matching must be performed on the input load impedance and the secondary loop impedance of the power supply of the rotary ultrasonic vibration processing system, so that the load impedance imaginary part and the secondary loop impedance imaginary part of the power supply are zero, reactive power loss is eliminated, and the optimal working state of the power supply and the ultrasonic vibrator is realized.
The current researches on impedance matching modes of transmission devices can be divided into two main categories: the first type is a bilateral matching method for respectively adding matching elements to a primary loop and a secondary loop of a transmission device to match; the other is a single-side matching method which only matches the primary loop. The bilateral matching method is to connect reactance elements in parallel or in series respectively in the primary loop and the secondary loop, so that series resonance is respectively realized in the resonance frequency point of the ultrasonic vibrator by the loops on both sides, and the impedance imaginary parts of the loops on both sides at the resonance frequency point are equal to zero (called bilateral resonance). Based on the idea, researchers put forward the matching method of connecting reactance elements in the primary side and secondary side loops by adopting parallel-parallel, parallel-serial, serial-parallel and serial-serial modes respectively, and research is carried out on the circuit transmission characteristics of different methods, and the research shows that the bilateral matching mode can realize the ideal effect of bilateral resonance, so that both the power supply and the ultrasonic vibrator have the optimal working state. However, reactance elements are required to be added in both primary and secondary side loops, and in a rotary ultrasonic processing system, because the ultrasonic vibrator and the secondary side coil need to rotate at high speed, and the ultrasonic knife handle or the main shaft structure is limited, adding a matching element in the secondary side loop brings great difficulty to the structural design and dynamic balance of the rotary part, and is difficult to apply in practice. The unilateral matching method only accesses the reactance element in the primary loop, avoids the modification of the secondary loop, is convenient to apply in the rotary ultrasonic vibration processing system, and has obvious practicability compared with the bilateral matching method. The unilateral matching method adopts a mode of serial or parallel matching of single reactance elements at the primary side, and also adopts a mode of serial-parallel combination matching of L-C double elements or three elements at the primary side loop. After the matching element is added to the primary side, the primary side loop reaches a resonance state (called primary side resonance), so that the output efficiency of the ultrasonic power supply is improved, but the secondary side loop does not reach the resonance state, reactive loss still exists, and the output efficiency and the output useful power of the ultrasonic vibrator are influenced.
Accordingly, there is a strong need to provide an innovative impedance matching circuit and method for a rotary ultrasonic processing system to overcome the above-mentioned technical drawbacks of the prior art.
Disclosure of Invention
Therefore, the technical problem to be solved by the invention is to overcome the technical defects in the prior art, and provide the impedance matching circuit and the method of the rotary ultrasonic processing system, which can realize impedance matching of the rotary ultrasonic vibration processing system by only adding a double-capacitor matching combination at the output end of a power supply without changing the structure of a rotary part, thereby achieving the optimal output characteristic and being convenient for the structural design and practical application of various rotary ultrasonic vibration processing systems.
In order to solve the technical problems, the invention provides an impedance matching circuit of a rotary ultrasonic processing system, the rotary ultrasonic processing system comprises an ultrasonic power supply, an induction transmitter and an ultrasonic vibrator, the induction transmitter comprises a primary coil connected with the ultrasonic power supply to form a primary loop and a secondary coil connected with the ultrasonic vibrator to form a secondary loop, the matching circuit comprises a first matching capacitor and a second matching capacitor, the first matching capacitor is connected with the primary coil in series, and the second matching capacitor is connected with the primary coil in parallel; wherein specific matched capacitance parameters exist to cause the primary and secondary loops to resonate simultaneously.
In one embodiment of the invention, the ultrasound transducer comprises a static capacitance in series with the secondary coil.
In one embodiment of the invention, the ultrasonic vibrator comprises a dynamic branch comprising a dynamic capacitance, a dynamic inductance and a dynamic resistance connected in series, and the dynamic capacitance, the dynamic inductance and the dynamic resistance connected in series are connected in parallel with a static capacitance.
In one embodiment of the present invention, when the signal frequency of the ultrasonic power supply is equal to the resonant frequency of the ultrasonic vibrator, the dynamic branch of the ultrasonic vibrator generates series resonance, the resonance impedance of the dynamic branch of the ultrasonic vibrator is represented as a pure resistor, and the impedance of the dynamic resistor and the static capacitor connected in parallel is the resonance impedance of the ultrasonic vibrator.
In addition, the invention also provides an impedance matching method of the rotary ultrasonic processing system, which is realized based on the impedance matching circuit of the rotary ultrasonic processing system, and comprises the following steps:
When the primary loop and the secondary loop generate resonance, solving to obtain parameter curves of a first matching capacitor and a second matching capacitor which meet the primary resonance and the secondary resonance;
and taking the intersection point of the parameter curve of the first matching capacitor and the parameter curve of the second matching capacitor as a matching capacitor parameter.
In one embodiment of the invention, a method for solving a parameter curve of a first matching capacitor and a second matching capacitor which meet primary resonance and secondary resonance comprises:
calculating the impedance of the primary loop and the induction current of the secondary loop;
And respectively calculating parameter curves of the first matching capacitor and the second matching capacitor which meet primary side resonance and secondary side resonance according to the impedance of the primary side loop and the induction current of the secondary side loop.
In one embodiment of the invention, the ultrasonic power supply is calculated according to an ideal constant voltage source when calculating the parameter curves of the first matching capacitor and the second matching capacitor which meet the primary resonance and the secondary resonance.
In one embodiment of the invention, a method of calculating the impedance of a primary loop includes:
Setting the impedance of a primary coil as Z p＝Rp+jXp＝Rp +ωj, and the impedance of a secondary coil as Z s＝Rs+jXs＝Rs +ωj, wherein RP represents the internal resistance of the primary coil, and ω represents the signal frequency of an ultrasonic power supply; l p represents the primary coil self-inductance, R s represents the secondary coil internal resistance, and L s represents the secondary coil self-inductance;
From kirchhoff's law, a primary loop is obtained:
I＝I1+Ip (3)
Wherein R represents the internal resistance of the ultrasonic power supply, I represents the output current of the ultrasonic power supply, C represents the capacitance value of the first matching capacitor, Z p represents the impedance of the primary coil, I p represents the current flowing through the primary coil, jωMI s represents the induced potential of the secondary loop in the primary loop, I 1 represents the current flowing through the second matching capacitor, and C 1 represents the capacitance value of the second matching capacitor;
secondary side loop:
ZstIs-jωMIp＝0 (4)
wherein Z st represents the resonance impedance of the secondary coil and the ultrasonic vibrator, I s represents the secondary coil induced current, and jωMI p represents the induced potential of the primary loop in the secondary loop;
the solution is obtained according to the formulas (1) to (4):
Wherein:
Wherein M represents the mutual inductance of the primary and secondary coils, and X st represents the imaginary part of the resonance impedance Z st of the secondary coil and the ultrasonic vibrator; ;
According to equation (5), the impedance Zy of the primary loop is:
Wherein:
A＝Rst-ωC1D
B＝Xst+ωC1E
D＝XpRst+XstRp
E＝(RpRst-XpXst)+ω2M2；
Where R y represents the real part of the impedance and X y represents the imaginary part of the impedance.
In one embodiment of the invention, a method of calculating an induced current of a secondary loop includes:
the secondary side induced current is obtained according to equation (6):
in the formula, M represents the mutual inductance of the primary coil and the secondary coil.
In one embodiment of the present invention, a method for calculating a parametric curve of a first matching capacitor and a second matching capacitor satisfying primary side resonance and secondary side resonance, includes:
when both the primary and secondary loop resonate, the result is obtained according to equations (7) and (8):
ω(C+C1)[(XpXst-RpRst)-ω2M2]-Xst＝0 (10)
Wherein X st represents the imaginary part of the resonance impedance Z st of the secondary coil and the ultrasonic vibrator;
Combined type (9) and (10), push:
wherein, H＝Rst 2+Xst 2；
And calculating the matching capacitance of the bilateral resonance under different ICPT inductance parameters according to the formulas (11) and (12).
Compared with the prior art, the technical scheme of the invention has the following advantages:
According to the impedance matching circuit and the impedance matching method for the rotary ultrasonic processing system, the structure of the rotary part is not required to be changed, and the impedance matching of the rotary ultrasonic processing system can be realized by only adding the double-capacitor matching combination at the output end of the power supply, so that the best output characteristic is achieved, and the structural design and practical application of various rotary ultrasonic vibration processing systems are facilitated.
Drawings
In order that the invention may be more readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof that are illustrated in the appended drawings, in which
Fig. 1 is a schematic diagram of a primary side matching rotary ultrasonic vibration processing system according to an embodiment of the present invention.
Fig. 2 is a diagram of an impedance matching circuit according to an embodiment of the present invention.
Fig. 3 is a simplified circuit of an ultrasonic vibrator according to an embodiment of the present invention at resonance.
Fig. 4 is a schematic diagram of a matching capacitance calculation curve according to an embodiment of the present invention.
Fig. 5 is a schematic diagram illustrating an effect of an inductance on a matching parameter according to an embodiment of the present invention.
Fig. 6 is a schematic diagram of the influence of mutual inductance on matching parameters according to an embodiment of the present invention.
Fig. 7 is a schematic diagram of an influence of a resonant frequency of an ultrasonic vibrator on a matching capacitor according to an embodiment of the present invention.
Fig. 8 is a schematic diagram of an influence of an ultrasonic vibrator dynamic resistance on a matching capacitor according to an embodiment of the present invention.
Fig. 9 is an impedance characteristic of the impedance matching experimental device a according to the embodiment of the present invention at the time of double-sided resonance.
Fig. 10 shows impedance characteristics of the impedance matching experimental device B according to the embodiment of the invention during bilateral resonance.
Fig. 11 shows the voltage and current waveforms of the primary side at the time of the measured bilateral resonance.
Fig. 12 shows the voltage and current waveforms of the secondary side at the time of the measured double side resonance.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the invention and practice it.
The embodiment of the invention provides an impedance matching circuit of a rotary ultrasonic processing system, which comprises an ultrasonic power supply, an induction transmitter and an ultrasonic vibrator, wherein the induction transmitter comprises a primary coil connected with the ultrasonic power supply to form a primary loop and a secondary coil connected with the ultrasonic vibrator to form a secondary loop, the matching circuit comprises a first matching capacitor and a second matching capacitor, the first matching capacitor is connected in series with the primary coil, and the second matching capacitor is connected in parallel with the primary coil; wherein specific matched capacitance parameters exist to cause the primary and secondary loops to resonate simultaneously.
The invention provides an impedance matching circuit of a rotary ultrasonic processing system, which provides a primary side loop C-C double-capacitor serial-parallel combination matching mode, so that the rotary ultrasonic vibration processing system works in a bilateral resonance state, and the optimal energy output is realized; and a theoretical model of double-sided resonance under the condition of single-sided matching is established, a parameter design method of C-C double-capacitance serial-parallel matching is deduced based on the model, and guidance is provided for structure and parameter optimization of the transmission device.
The ultrasonic vibrator comprises a static capacitor and a dynamic branch, wherein the static capacitor is connected with the secondary coil in series, the dynamic branch comprises a dynamic capacitor, a dynamic inductor and a dynamic resistor which are connected in series, and the dynamic capacitor, the dynamic inductor and the dynamic resistor which are connected in series are connected with the static capacitor in parallel. When the signal frequency of the ultrasonic power supply is equal to the resonance frequency of the ultrasonic vibrator, the dynamic branch of the ultrasonic vibrator generates series resonance, the resonance impedance of the dynamic branch of the ultrasonic vibrator is represented as a pure resistance, and the impedance of the dynamic resistance and the static capacitance connected in parallel is the resonance impedance of the ultrasonic vibrator.
Corresponding to the embodiment of the matching circuit, the embodiment of the invention also provides an impedance matching method of the rotary ultrasonic processing system, which is realized based on the impedance matching circuit of the rotary ultrasonic processing system, and comprises the following steps: when the primary loop and the secondary loop generate resonance, solving to obtain parameter curves of a first matching capacitor and a second matching capacitor which meet the primary resonance and the secondary resonance; and taking the intersection point of the parameter curve of the first matching capacitor and the parameter curve of the second matching capacitor as a matching capacitor parameter.
Specifically, fig. 1 shows a schematic diagram of a primary side matching rotary ultrasonic vibration processing system. In the figure, CE, LE and RE are respectively dynamic capacitance, dynamic inductance and dynamic resistance of an equivalent circuit of an ultrasonic vibrator, C0 is static capacitance of the ultrasonic vibrator, LP and RP are respectively self inductance and internal resistance of a primary coil of an ICPT, LS and RS are respectively self inductance and internal resistance of a secondary coil of the ICPT, M is mutual inductance of the primary coil and the secondary coil, C, C1 is respectively a first matching capacitance and a second matching capacitance of the primary coil, and R is internal resistance of an output end of an ultrasonic power supply.
Let ultrasonic power supply be the voltage source, output voltage Is U, output current Is I, the current flowing through primary coil Is IP, secondary coil induced current Is, the current flowing through dynamic branch of ultrasonic vibrator Is IE, jωMIp Is induced potential of primary loop at secondary loop, jωMIS Is induced potential of secondary loop at primary loop. When the power signal frequency omega is equal to the resonance frequency of the ultrasonic vibrator, the dynamic branch of the ultrasonic vibrator generates series resonance, and the resonance impedance of the dynamic branch appears as a pure resistor RE. The impedance ZT of RE and the static capacitor C0 in parallel connection is the resonance impedance of the ultrasonic vibrator. The circuit can be simplified to fig. 3.
Setting:
The impedance of the primary coil is:
Zp＝Rp+jXp＝Rp+jωLp
The secondary coil impedance is:
Zs＝Rs+jXs＝Rs+jωLs
The resonance impedance Zst of the secondary coil and the ultrasonic vibrator is:
Zst＝Zs+ZT＝Rst+jXst＝(Rs+Rt)+j(Xs+Xt)
from Kirchhoff's law, it is available:
Primary loop:
I＝I1+Ip (3)
secondary side loop:
ZstIs-jωMIp＝0 (4)
The solution is obtained by the formulas (1) to (4):
wherein,
As can be obtained from equation (5), the impedance Zy of the primary loop is:
Wherein:
A＝Rst-ωC1D
B＝Xst+ωC1E
D＝XpRst+XstRp
E＝(RpRst-XpXst)+ω2M2
obviously, the impedance of the primary side includes the reflected impedance of the secondary side loop at the primary side, and thus this is also the load impedance of the ultrasonic power supply.
The secondary side induced current is as follows, as can be obtained from equation (6):
After the primary side of the icpt is connected to the ultrasonic power supply, the primary side impedance Z y is essentially the load impedance of the rotary ultrasonic vibration processing system to the ultrasonic power supply, and the characteristics of Z y determine the output power and output efficiency of the power supply. For a voltage source, when Z y is pure, the output efficiency of the power supply is highest. The internal resistance R of the power supply has no influence on the impedance imaginary part of the primary loop, so that the power supply can be regarded as an ideal constant voltage source, i.e., r=0, in impedance matching analysis. When both the primary and secondary loops resonate, there is:
ω(C+C1)[(XpXst-RpRst)-ω2M2]-Xst＝0 (10)
As can be seen from equations (9) and (10), the matching capacitance of the primary side affects not only the load impedance characteristics of the power supply, but also the impedance characteristics of the secondary side loop. And (3) respectively solving two matching capacitance parameter curves meeting the primary side resonance and the secondary side resonance by the formulas (9) and (10), wherein the intersection point of the two curves is the matching capacitance parameter meeting the complete resonance. The ultrasonic vibrator parameters are set as follows: the resonance frequency f=20.15 KHz, the dynamic resistance R E =30Ω, the free capacitance C 0 =3nf. The parameters of the non-contact transmission device are as follows: the self inductance of the primary side and the secondary side is L p＝720μH,Ls =636 mu H, the internal resistance is R p＝0.8Ω,Rs =0.7Ω, and the leakage inductance from the primary side to the secondary side is L d =287 mu H. The calculated matching capacitance of the primary side and the secondary side is shown in fig. 4, and the intersection point of the two curves in the diagram is the matching capacitance parameter in bilateral resonance. The research finds that: when the internal resistance R of the power supply is changed, only the slope of the secondary matching curve is changed, and the intersection point of the two curves is not changed, namely, the matching capacitance parameter of bilateral resonance is not affected, so that the capacitance parameter of bilateral matching can be calculated according to the internal resistance r=0.
Obviously, under the condition that the parameters of the ultrasonic vibrator are unchanged, the matching capacitance of the bilateral resonance is mainly influenced by self inductance and mutual inductance of the primary side coil and the secondary side coil of the ICPT. The combined type (9) and (10) can be deduced that:
wherein, H＝Rst 2+Xst 2。
Mutual inductance coefficient of ICPT coilThe matching capacitance at the bilateral resonance under different ICPT inductance parameters can be calculated by the formulas (11) and (12). For the given ultrasonic vibrator parameters in table 1, the law that the matching capacitance changes along with the self inductance of the primary side and the secondary side and the mutual inductance coefficient K is calculated and known is shown in fig. 5 and 6 respectively. As can be seen from the figure, the parameters of the matching capacitor are mainly affected by the primary self-inductance, and decrease with the increase of the primary self-inductance L P. The secondary inductance L S has little effect on the matching capacitance. The mutual inductance K has obvious influence on the series capacitance C and has no influence on the parallel capacitance C 1.
In a rotary ultrasonic vibration processing system, the ultrasonic vibrator parameter is another major factor affecting the matching capacitance parameter. Fig. 7 and 8 show the change rule of the matching capacitance when the resonant frequency and the dynamic resistance change, respectively. As the resonant frequency increases, the matching capacitance decreases; as the dynamic resistance increases, the matching capacitance C increases, while C 1 does not change much. Therefore, parameters of the ultrasonic vibrator and the I CPT are considered simultaneously, and the matching capacitance in bilateral resonance is calculated through the formulas (11) and (12), so that the rotary ultrasonic vibration processing system can work in the bilateral resonance state, and the optimal energy output is realized.
The vibration system after matching was tested using an impedance analyzer. And respectively testing the impedance characteristics of the input end of the matching circuit and the two ends of the ultrasonic vibrator. The front end of the ultrasonic transducer adopts an ER16 elastic chuck to install a hard alloy milling cutter with the diameter of 6mm, thus forming the ultrasonic vibrator. The ultrasonic vibrators are respectively combined with ICPT with different parameters to form different ultrasonic vibration processing experimental systems, and the gap between the primary side and the secondary side is kept to be 0.5mm. The experimental system parameters are shown in table 1.
Table 1 impedance matching experimental device and bilateral matching capacitance parameters
And (3) calculating the matching capacitance in bilateral resonance according to parameters of the ultrasonic vibrator and the ICPT by using the formulas (11) and (12), respectively measuring the primary side impedance characteristic and the secondary side impedance characteristic of the two experimental systems by using an impedance analyzer, and analyzing the test result. Fig. 9 and 10 show impedance characteristics at the time of bilateral resonance of the device a and the device B, respectively. Fig. 11 and 12 show the voltage and current waveforms of the primary and secondary sides at the measured double side resonance.
As can be seen from the experimental results, when the double-sided resonance is performed, the voltage and the current waveforms of the primary side and the secondary side loops of the ICPT are approximately in phase under the driving of the ultrasonic power supply. Both sides of the ICPT are in a resonance state, and the system has good transmission characteristics. In the figure, a small phase difference exists between the voltage and the current, which is mainly caused by a small signal measurement error of vibrator parameters and the deviation of an actual matching capacitance from a theoretical calculated value. When only the primary side resonates, although the primary side can be in a resonant state, the secondary side does not realize resonant matching, reactance components exist in loop impedance, reactive loss exists in the ultrasonic vibrator during operation, and the transmission efficiency of the system is reduced. Comparing the effective electromechanical coupling coefficient K eff in the two matching cases can also see that the value of K eff in the double-sided resonance is approximately 1 time greater than that in the primary resonance. The superiority of the bilateral resonance matching method is also demonstrated.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations and modifications of the present invention will be apparent to those of ordinary skill in the art in light of the foregoing description. It is not necessary here nor is it exhaustive of all embodiments. And obvious variations or modifications thereof are contemplated as falling within the scope of the present invention.
Claims (9)
1. An impedance matching method of a rotary ultrasonic processing system is characterized in that: the method is realized based on a rotary ultrasonic processing system impedance matching circuit, and the rotary ultrasonic processing system impedance matching circuit comprises: the rotary ultrasonic processing system comprises an ultrasonic power supply, an induction transmitter and an ultrasonic vibrator, wherein the induction transmitter comprises a primary coil connected with the ultrasonic power supply to form a primary loop and a secondary coil connected with the ultrasonic vibrator to form a secondary loop, the matching circuit comprises a first matching capacitor and a second matching capacitor, the first matching capacitor is connected with the primary coil in series, and the second matching capacitor is connected with the primary coil in parallel; wherein, specific matched capacitance parameters exist to enable the primary loop and the secondary loop to resonate simultaneously;
The impedance matching method of the rotary ultrasonic processing system comprises the following steps:
When the primary loop and the secondary loop generate resonance, solving to obtain parameter curves of a first matching capacitor and a second matching capacitor which meet the primary resonance and the secondary resonance;
and taking the intersection point of the parameter curve of the first matching capacitor and the parameter curve of the second matching capacitor as a matching capacitor parameter.
2. The method of impedance matching for a rotary ultrasonic processing system of claim 1, wherein: the ultrasonic vibrator comprises a static capacitor, and the static capacitor is connected with the secondary coil in series.
3. The method of impedance matching for a rotary ultrasonic processing system of claim 2, wherein: the ultrasonic vibrator comprises a dynamic branch circuit, wherein the dynamic branch circuit comprises a dynamic capacitor, a dynamic inductor and a dynamic resistor which are connected in series, and the dynamic capacitor, the dynamic inductor and the dynamic resistor which are connected in series are connected in parallel with a static capacitor.
4. A method of impedance matching for a rotary ultrasonic processing system according to claim 3, wherein: when the signal frequency of the ultrasonic power supply is equal to the resonance frequency of the ultrasonic vibrator, the dynamic branch of the ultrasonic vibrator generates series resonance, the resonance impedance of the dynamic branch of the ultrasonic vibrator is represented as a pure resistance, and the impedance of the dynamic resistance and the static capacitance connected in parallel is the resonance impedance of the ultrasonic vibrator.
5. The method of impedance matching for a rotary ultrasonic processing system of claim 1, wherein: the method for solving the parameter curves of the first matching capacitor and the second matching capacitor which meet the primary side resonance and the secondary side resonance comprises the following steps:
calculating the impedance of the primary loop and the induction current of the secondary loop;
And respectively calculating parameter curves of the first matching capacitor and the second matching capacitor which meet primary side resonance and secondary side resonance according to the impedance of the primary side loop and the induction current of the secondary side loop.
6. The method of impedance matching for a rotary ultrasonic processing system of claim 5, wherein: and when parameter curves of the first matching capacitor and the second matching capacitor which meet primary side resonance and secondary side resonance are calculated, the ultrasonic power supply is calculated according to an ideal constant voltage source.
7. The method of impedance matching for a rotary ultrasonic processing system according to claim 5 or 6, wherein: a method of calculating the impedance of a primary loop, comprising:
Setting the impedance of a primary coil as Z p＝Rp+jXp＝Rp+jωLp and the impedance of a secondary coil as Z s＝Rs+jXs＝Rs+jωLs, wherein R P represents the internal resistance of the primary coil, and ω represents the signal frequency of an ultrasonic power supply; l p represents the primary coil self-inductance, R s represents the secondary coil internal resistance, and L s represents the secondary coil self-inductance;
From kirchhoff's law, a primary loop is obtained:
I＝I1+Ip (3)
Wherein R represents the internal resistance of the ultrasonic power supply, I represents the output current of the ultrasonic power supply, C represents the capacitance value of the first matching capacitor, Z p represents the impedance of the primary coil, I p represents the current flowing through the primary coil, jωMI s represents the induced potential of the secondary loop in the primary loop, I 1 represents the current flowing through the second matching capacitor, and C 1 represents the capacitance value of the second matching capacitor;
secondary side loop:
ZstIs-jωMIp＝0 (4)
wherein Z st represents the resonance impedance of the secondary coil and the ultrasonic vibrator, I s represents the secondary coil induced current, and jωMI p represents the induced potential of the primary loop in the secondary loop;
the solution is obtained according to the formulas (1) to (4):
Wherein:
Wherein M represents the mutual inductance of the primary and secondary coils, and X st represents the imaginary part of the resonance impedance Z st of the secondary coil and the ultrasonic vibrator;
According to equation (5), the impedance b of the primary loop is:
Wherein:
A＝Rst-ωC1D
B＝Xst+ωC1E
D＝XpRst+XstRp
E＝(RpRst-XpXst)+ω2M2；
Where R y represents the real part of the impedance and X y represents the imaginary part of the impedance.
8. The method of impedance matching for a rotary ultrasonic processing system of claim 7, wherein: a method of calculating an induced current of a secondary loop, comprising:
the secondary side induced current is obtained according to equation (6):
in the formula, M represents the mutual inductance of the primary coil and the secondary coil.
9. The method of impedance matching for a rotary ultrasonic processing system of claim 8, wherein: the method for calculating the parameter curves of the first matching capacitor and the second matching capacitor which meet the primary side resonance and the secondary side resonance comprises the following steps:
when both the primary and secondary loop resonate, the result is obtained according to equations (7) and (8):
ω(C+C1)[(XpXst-RpRst)-ω2M2]-Xst＝0 (10)
Wherein X st represents the imaginary part of the resonance impedance Z st of the secondary coil and the ultrasonic vibrator;
Combined type (9) and (10), push:
wherein, H=r st 2 and X st 2;
and calculating the matching capacitance of the bilateral resonance under different ICPT inductance parameters according to the formulas (11) and (12).
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