CN104993605A

CN104993605A - Circuit compensation network of non-contact power supply ultrasonic vibration system based on efficiency

Info

Publication number: CN104993605A
Application number: CN201510308215.4A
Authority: CN
Inventors: 林彬; 朱学明; 刘礼平
Original assignee: Tianjin University
Current assignee: Tianjin University
Priority date: 2015-06-05
Filing date: 2015-06-05
Publication date: 2015-10-21
Anticipated expiration: 2035-06-05
Also published as: CN104993605B

Abstract

The invention discloses a circuit compensation network for a non-contact power supply ultrasonic vibration system seeking to achieve maximum transmission efficiency, including a primary side compensation network and a secondary side compensation network, and the primary side compensation network is connected to an ultrasonic power supply and a non-contact electromagnetic coupler Between the primary side coils, it is used to compensate the reactive power of the system, so that the output voltage and current of the power supply are in the same phase. The secondary side compensation network is connected between the non-contact electromagnetic coupler secondary side coil and the ultrasonic vibrator. parameters to achieve energy transmission with the highest efficiency, and the compensation components are inductors and/or capacitors. The invention can be applied to occasions such as rotary ultrasonic processing, ultrasonic welding and the like where a non-contact electromagnetic coupler is required to supply power to ultrasonic vibrators, and realizes energy transmission with the highest efficiency by optimizing compensation element parameters.

Description

Circuit Compensation Network of Efficiency-Based Non-contact Powered Ultrasonic Vibration System

技术领域technical field

本发明涉及一种采用非接触旋转电磁耦合器为超声换能器供电的技术，特别涉及一种谋求实现该非接触能量传输系统的最大传输效率的电路补偿方法。The invention relates to a technology of using a non-contact rotating electromagnetic coupler to supply power to an ultrasonic transducer, in particular to a circuit compensation method for realizing the maximum transmission efficiency of the non-contact energy transmission system.

背景技术Background technique

旋转超声波加工利用固结式金刚石工具(电镀式或烧结式金刚石工具)作超声振动，同时高速旋转的方式进行加工。广泛应用于硬脆材料如工程陶瓷、复合材料、钛合金等的加工，旋转超声波加工可有效提高材料去除率、提高工件表面质量和延长刀具寿命。传统的旋转超声波机床多采用电刷滑环的供电方式。这种接触式的供电方式易产生火花和磨损，不能用于易燃易爆的恶劣环境中，且对主轴转速有限制。非接触式旋转电磁耦合器可以很好地解决这些问题，并在旋转超声波设备中有广泛的应用。如公开号为CN101213042A，公开日为2008年7月2日的中国专利申请公开了一种《超声波加工主轴装置》，采用无磁芯结构为超声波换能器供电。再如公告号为CN102151867B，公告日为2013年5月29日的中国发明专利中公开了《一种基于机床附件化的旋转超声波头》，采用副边单环磁芯的柱面耦合旋转电磁耦合器为换能器供电。再如，公开号为CN1324713A，公开日为2001年12月5日的中国专利申请公开了一种《有超声适配器的工具机》，采用圆环状U型同心磁芯柱面感应的旋转电磁耦合器为换能器供电。Rotary ultrasonic machining uses consolidated diamond tools (electroplated or sintered diamond tools) for ultrasonic vibration and high-speed rotation at the same time. Widely used in the processing of hard and brittle materials such as engineering ceramics, composite materials, titanium alloys, etc., rotary ultrasonic machining can effectively improve material removal rate, improve workpiece surface quality and prolong tool life. Traditional rotary ultrasonic machine tools mostly use the power supply method of brush slip ring. This contact power supply method is prone to sparks and wear, and cannot be used in inflammable and explosive harsh environments, and has restrictions on the spindle speed. The non-contact rotating electromagnetic coupler can solve these problems well and has a wide range of applications in rotating ultrasonic equipment. For example, the Chinese patent application whose publication number is CN101213042A and whose disclosure date is July 2, 2008 discloses a "Spindle Device for Ultrasonic Machining", which uses a coreless structure to supply power to an ultrasonic transducer. Another example is that the announcement number is CN102151867B, and the announcement date is May 29, 2013. In the Chinese invention patent, "A Rotary Ultrasonic Head Based on Machine Tool Attachment" is disclosed, which adopts the cylindrical coupling of the secondary single-ring magnetic core to rotate the electromagnetic coupling. The converter supplies power to the transducer. For another example, the publication number is CN1324713A, and the Chinese patent application dated December 5, 2001 discloses a "machine tool with an ultrasonic adapter", which adopts the rotating electromagnetic coupling induced by the circular U-shaped concentric magnetic core cylinder surface. The converter supplies power to the transducer.

非接触式旋转电磁耦合器也存在着一些不足。由于主副边磁芯之间存在间隙即磁路中含有部分空气路径，使得非接触旋转电磁耦合器存在较大漏磁通。漏磁通使初级线圈发射的能量不能完全被次级线圈吸收，有一部分储存在耦合器内部，不仅限制了其功率传输能力，且增加了自身损耗。旋转电磁耦合器的负载为超声振动系统(换能器、变幅杆及工具)，超声振动系统需工作于其谐振频率处才能获得最大的转化效率和振幅，换能器在其谐振频率处表现为一容性元件而非纯阻性，这必然会消耗大量的无功功率，降低了系统功率因数及传输效率。要解决这些问题必须增加补偿元件即电感或电容，以补偿系统的无功功率，改善功率传输性能。公告号为CN201393181Y，公告日为2010年1月27日的中国实用新型专利中公开了《回转式非接触超声波电信号传输装置》，包括外壳、原边磁芯线圈、副边磁芯线圈和驱动轴，外壳与原边磁芯线圈的磁芯外圆周固定连接构成定子部分，副边磁芯线圈与驱动轴连接构成转子部分，原边磁芯线圈与副边磁芯线圈之间具有一定间隙。所述原边磁芯线圈和副边磁芯线圈的磁芯同轴设置。采用罐状磁芯端面感应或圆环状U型同心磁芯柱面感应的旋转电磁耦合器为换能器供电，其中主边电路单边补偿，副边通过优化线圈自感(即线圈匝数)使其与换能器电容谐振提高系统的传输效率，主边通过补偿电感电容以补偿系统的无功功率，使电源输出电压电流同相位。但单边补偿由于限定了耦合器副边自感量，使耦合器的设计具有局限性，不能适用于所有的超声振子，因此副边也需要增加补偿元件，同时优化补偿元件值和副边自感以实现最佳效率的传输，双边补偿设计更灵活，更适用于生产实践。There are also some deficiencies in the non-contact rotary electromagnetic coupler. Because there is a gap between the main and secondary magnetic cores, that is, there is a part of the air path in the magnetic circuit, there is a large leakage flux in the non-contact rotating electromagnetic coupler. Leakage flux prevents the energy emitted by the primary coil from being completely absorbed by the secondary coil, and some of it is stored inside the coupler, which not only limits its power transmission capability, but also increases its own loss. The load of the rotating electromagnetic coupler is the ultrasonic vibration system (transducer, horn and tool). The ultrasonic vibration system needs to work at its resonant frequency to obtain the maximum conversion efficiency and amplitude. The transducer performs at its resonant frequency. It is a capacitive element rather than a pure resistive element, which will inevitably consume a large amount of reactive power, reducing the system power factor and transmission efficiency. To solve these problems, it is necessary to add compensation components, namely inductors or capacitors, to compensate the reactive power of the system and improve the power transmission performance. The announcement number is CN201393181Y, and the announcement date is January 27, 2010. The Chinese utility model patent discloses the "rotary non-contact ultrasonic electric signal transmission device", including the shell, the primary side magnetic core coil, the secondary side magnetic core coil and the driver. The shaft, the shell and the outer circumference of the magnetic core of the primary magnetic core coil are fixedly connected to form the stator part, and the secondary magnetic core coil is connected to the drive shaft to form the rotor part. There is a certain gap between the primary magnetic core coil and the secondary magnetic core coil. The magnetic cores of the primary side magnetic core coil and the secondary side magnetic core coil are coaxially arranged. The transducer is powered by a rotary electromagnetic coupler with pot-shaped magnetic core end face induction or circular U-shaped concentric magnetic core cylindrical induction, in which the primary side circuit is unilaterally compensated, and the secondary side is optimized by coil self-inductance (that is, the number of coil turns) ) to make it resonate with the transducer capacitance to improve the transmission efficiency of the system, and the main side compensates the reactive power of the system by compensating the inductance and capacitance, so that the output voltage and current of the power supply are in the same phase. However, the unilateral compensation limits the self-inductance of the secondary side of the coupler, which limits the design of the coupler and cannot be applied to all ultrasonic vibrators. In order to achieve the best efficiency of transmission, the bilateral compensation design is more flexible and more suitable for production practice.

发明内容Contents of the invention

针对现有技术中存在的问题，本发明提供一种基于效率的非接触供电超声振动系统的电路补偿网络，本发明的设计思路是基于副边串联电感或电容、副边并联电感或电容两种基本的双边补偿拓扑，采用主边和副边同时补偿电感和/或电容的补偿形式，其中，主边电路补偿网络用来补偿电源的无功功率，使电源输出电压电流同相位，副边电路补偿网络用来实现最大的传输效率。Aiming at the problems existing in the prior art, the present invention provides a circuit compensation network for an efficiency-based non-contact power supply ultrasonic vibration system. The basic bilateral compensation topology adopts the compensation form that the primary side and the secondary side compensate the inductance and/or capacitance at the same time. Among them, the compensation network of the primary side circuit is used to compensate the reactive power of the power supply, so that the output voltage and current of the power supply are in the same phase, and the secondary side circuit A compensation network is used to achieve maximum transmission efficiency.

为了解决上述技术问题，本发明提出的一种基于效率的非接触供电超声振动系统的电路补偿网络，其中的非接触供电超声振动系统包括非接触电磁耦合器，所述非接触电磁耦合器包括相互之间存在有间隙的主边磁芯和副边磁芯，所述主边磁芯上缠绕有主边线圈，所述副边磁芯上缠绕有副边线圈，所述主边线圈连接有主边补偿网络，所述副边线圈连接有由补偿元件构成的副边补偿网络，超声电源产生超声频交流电，经过所述主边补偿网络将电能传递给主边线圈，再通过电磁感应原理传输给所述副边线圈，所述副边补偿网络将超声电能传输给超声换能器，超声换能器通过逆压电效应产生的微小振动经变幅杆放大振幅后将振动传输振子。In order to solve the above technical problems, the present invention proposes a circuit compensation network for an efficiency-based non-contact power supply ultrasonic vibration system, wherein the non-contact power supply ultrasonic vibration system includes a non-contact electromagnetic coupler, and the non-contact electromagnetic coupler includes mutual There is a gap between the primary side magnetic core and the secondary side magnetic core, the primary side magnetic core is wound with a primary side coil, the secondary side magnetic core is wound with a secondary side coil, and the primary side coil is connected with a main side coil. Side compensation network, the secondary side coil is connected with a secondary side compensation network composed of compensation elements, the ultrasonic power supply generates ultrasonic frequency alternating current, and the electric energy is transmitted to the main side coil through the main side compensation network, and then transmitted to the main side coil through the principle of electromagnetic induction. The secondary coil and the secondary compensation network transmit the ultrasonic electric energy to the ultrasonic transducer, and the tiny vibration generated by the ultrasonic transducer through the inverse piezoelectric effect is amplified by the horn and then transmitted to the vibrator.

进一步讲，本发明基于效率的非接触供电超声振动系统的电路补偿网络，其中：Further speaking, the present invention is based on the circuit compensation network of the efficiency-based non-contact power supply ultrasonic vibration system, wherein:

所述副边补偿网络是由与副边线圈串联的补偿元件构成，所述补偿元件为电感或电容，其补偿元件的电抗满足下式：The secondary side compensation network is composed of a compensation element connected in series with the secondary side coil, the compensation element is an inductor or a capacitor, and the reactance of the compensation element satisfies the following formula:

X_s＝-ωL_s-X_t X _s ＝-ωL _s -X _t

其中：Xs-副边串联补偿元件的电抗，Ls-副边线圈自感，Xt-超声振子等效电抗，ω-电源输出信号的角频率。Among them: Xs-the reactance of the secondary side series compensation element, Ls-the self-inductance of the secondary side coil, Xt-the equivalent reactance of the ultrasonic vibrator, ω-the angular frequency of the output signal of the power supply.

所述副边补偿网络是由与副边线圈并联的补偿元件构成，所述补偿元件为电感或电容，其补偿元件的电纳满足下式：The secondary side compensation network is composed of a compensation element connected in parallel with the secondary side coil, the compensation element is an inductor or a capacitor, and the susceptance of the compensation element satisfies the following formula:

${B B}_{s the s} = = \frac{{R R}_{p p} {ωL ω L}_{s the s}}{{R R}_{p p} {R R}_{s the s}^{22} + + {ω ω}^{22} {M m}^{22} {R R}_{s the s} + + {R R}_{p p} {ω ω}^{22} {L L}_{s the s}^{22}} + + \frac{{X x}_{t t}}{{R R}_{t t}^{22} \times \times {X x}_{t t}^{22}}$

其中：其中：Bs-副边并联补偿元件的电纳，ω-电源输出信号的角频率，Rp-主边线圈交流电阻，Rs-副边线圈交流电阻，Ls-副边线圈自感，M-互感，Xt-超声振子等效电抗，Rt-超声振子等效电阻。Where: Bs- Susceptance of secondary parallel compensation components, ω- Angular frequency of power output signal, Rp- AC resistance of primary coil, Rs- AC resistance of secondary coil, Ls- self-inductance of secondary coil, M- Mutual inductance, Xt-ultrasonic vibrator equivalent reactance, Rt-ultrasonic vibrator equivalent resistance.

与现有技术相比，本发明的有益效果是：Compared with prior art, the beneficial effect of the present invention is:

由于本发明的电路补偿网络是基于电磁耦合互感模型推导出来的，只关心非接触电磁耦合器的互感和自感等参数，而与耦合器的实际物理结构尺寸无关，因此，可以适用于各种不同结构尺寸的非接触电磁耦合器，如图2所示的各种不同的非接触旋转电磁耦合器。Since the circuit compensation network of the present invention is derived based on the electromagnetic coupling mutual inductance model, it only cares about parameters such as the mutual inductance and self-inductance of the non-contact electromagnetic coupler, and has nothing to do with the actual physical structure size of the coupler. Therefore, it can be applied to various Non-contact electromagnetic couplers of different structural sizes, as shown in Figure 2, various non-contact rotating electromagnetic couplers.

其次，本发明的电路补偿网络在推导过程中，只关心超声振子的等效电阻Rt和等效电抗Xt两个参数，而不涉及超声振子的物理结构尺寸，因此，可以适用于各种场合的非接触供电的超声振动系统，不仅仅局限于图1所示的超声振子结构。Secondly, the circuit compensation network of the present invention only cares about the two parameters of the equivalent resistance Rt and the equivalent reactance Xt of the ultrasonic vibrator during the derivation process, and does not involve the physical structure size of the ultrasonic vibrator. Therefore, it can be applied to various occasions. The ultrasonic vibration system with non-contact power supply is not limited to the structure of the ultrasonic vibrator shown in Fig. 1 .

本发明的电路补偿网络中主边补偿网络是为了补偿系统的无功功率，使电源输出电压电流同相位，其结构不受限制，只要具备这种功能的补偿网络就可以。The main side compensation network in the circuit compensation network of the present invention is to compensate the reactive power of the system, so that the output voltage and current of the power supply are in the same phase, and its structure is not limited, as long as the compensation network has this function.

附图说明Description of drawings

图1非接触供电超声波加工装备的能量传输示意图；Fig. 1 Schematic diagram of energy transmission of non-contact power supply ultrasonic processing equipment;

图2不同结构形式的非接触旋转电磁耦合器；其中(a)是U型同心磁芯柱面感应线圈结构形式，(b)是上下罐状磁芯柱面感应线圈结构形式，(c)是上下罐状磁芯端面感应线圈结构形式，(d)是副边单环磁芯柱面感应线圈结构形式，(e)是无磁芯柱面感应线圈结构形式。Fig. 2 Non-contact rotating electromagnetic couplers with different structures; where (a) is the U-shaped concentric magnetic core cylindrical induction coil structure, (b) is the upper and lower tank-shaped magnetic core cylindrical induction coil structure, (c) is The structure form of the induction coil on the end surface of the upper and lower pot-shaped magnetic cores, (d) is the structure form of the cylindrical induction coil of the secondary single-ring magnetic core, and (e) is the structure form of the cylindrical induction coil without a magnetic core.

图3是图1的等效电路模型；Fig. 3 is the equivalent circuit model of Fig. 1;

图4是图3所示互感耦合模型的简化形式；Fig. 4 is a simplified form of the mutual inductance coupling model shown in Fig. 3;

图5双边补偿拓扑-副边串联补偿；Figure 5 Bilateral Compensation Topology - Secondary Series Compensation;

图6双边补偿拓扑-副边并联补偿；Figure 6 Bilateral Compensation Topology - Secondary Side Parallel Compensation;

图7耦合器绕线方式及磁芯结构示意图；Figure 7 is a schematic diagram of the coupler winding method and the structure of the magnetic core;

图8实验测量的主边线圈自感与线圈匝数的关系；The relationship between the self-inductance of the primary side coil and the number of turns of the coil measured experimentally in Fig. 8;

图9实验测量的副边线圈自感与线圈匝数的关系；The relationship between the self-inductance of the secondary coil and the number of turns of the coil measured experimentally in Fig. 9;

图10实验测量主副边交流电阻与线圈匝数的关系；Figure 10 experimentally measures the relationship between the AC resistance of the primary and secondary sides and the number of turns of the coil;

图11线圈及Litz线示意图；Figure 11 schematic diagram of coil and Litz line;

图12副边串联补偿的传输效率与线圈匝数的关系；The relationship between the transmission efficiency of the secondary side series compensation and the number of coil turns in Fig. 12;

图13副边并联补偿的传输效率与线圈匝数的关系。Figure 13 The relationship between the transmission efficiency of the secondary parallel compensation and the number of coil turns.

图中：In the picture:

1-超声电源 2-主边补偿网络1- Ultrasonic power supply

3-主边线圈 4-副边线圈3-Primary coil 4-Secondary coil

5-副边磁芯 6-主边磁芯5-Secondary core 6-Main core

7-副边补偿网络 8-换能器7-Secondary Compensation Network 8-Transducer

9-变幅杆 10-刀具9-horn 10-knife

g-主、副边磁芯之间的间隙 Ui-电源电压g-the gap between the main and secondary magnetic cores Ui-power supply voltage

Ii-电源电流 Rp-主边线圈交流电阻Ii-supply current Rp-main side coil AC resistance

Lp-主边线圈自感 Ip-主边线圈电流Lp-primary coil self-inductance Ip-primary coil current

M-互感 Rs-副边线圈交流电阻M-mutual inductance Rs-secondary coil AC resistance

Ls-副边线圈自感 Is-副边线圈电流Ls-secondary coil self-inductance Is-secondary coil current

It-换能器电流 R0-压电陶瓷静态电阻It-transducer current R0-piezoelectric ceramic static resistance

C0-压电陶瓷静态电容 L1-超声振子动态电感C0-Piezoelectric ceramic static capacitance L1-Dynamic inductance of ultrasonic vibrator

C1-超声振子动态电容 R1-超声振子动态电阻C1-ultrasonic vibrator dynamic capacitance R1-ultrasonic vibrator dynamic resistance

RL-超声振子的等效机械负载电阻 Zt-超声振子等效阻抗RL-equivalent mechanical load resistance of the ultrasonic vibrator Zt-equivalent impedance of the ultrasonic vibrator

Rt-超声振子等效电阻 Xt-超声振子等效电抗Rt-equivalent resistance of ultrasonic vibrator Xt-equivalent reactance of ultrasonic vibrator

Xs-副边串联补偿元件的电抗 Bs-副边并联补偿元件的电纳Xs-The reactance of the series compensation element on the secondary side Bs-The susceptance of the parallel compensation element on the secondary side

具体实施方式Detailed ways

下面结合附图和具体实施例对本发明技术方案作进一步详细描述，所描述的具体实施例仅仅对本发明进行解释说明，并不用以限制本发明。The technical solutions of the present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments, and the described specific embodiments are only to illustrate the present invention, and are not intended to limit the present invention.

如图1所示，本发明一种基于效率的非接触供电超声振动系统的电路补偿网络，其中的非接触供电超声振动系统包括非接触电磁耦合器，所述非接触电磁耦合器包括相互之间存在有间隙g的主边磁芯6和副边磁芯5，所述主边磁芯6上缠绕有主边线圈3，所述副边磁芯5上缠绕有副边线圈4，所述主边线圈3连接有主边补偿网络2，其特征在于，所述副边线圈4连接有由补偿元件构成的副边补偿网络7，超声电源1产生超声频交流电，经过所述主边补偿网络2将电能传递给主边线圈3，再通过电磁感应原理传输给所述副边线圈4，所述副边补偿网络7将超声电能传输给超声换能器，超声换能器8通过逆压电效应产生的微小振动经变幅杆9放大振幅后将振动传输给超声振子。As shown in Figure 1, the present invention is a circuit compensation network of an efficiency-based non-contact power supply ultrasonic vibration system, wherein the non-contact power supply ultrasonic vibration system includes a non-contact electromagnetic coupler, and the non-contact electromagnetic coupler includes mutual There is a primary side magnetic core 6 and a secondary side magnetic core 5 with a gap g, the primary side magnetic core 6 is wound with a primary side coil 3, the secondary side magnetic core 5 is wound with a secondary side coil 4, and the primary side magnetic core 6 is wound with a secondary side coil 4. The side coil 3 is connected with a main side compensation network 2, and it is characterized in that the secondary side coil 4 is connected with a secondary side compensation network 7 composed of compensation elements, and the ultrasonic power supply 1 generates ultrasonic frequency alternating current, which passes through the main side compensation network 2 The electric energy is transmitted to the primary coil 3, and then transmitted to the secondary coil 4 through the principle of electromagnetic induction, and the secondary compensation network 7 transmits the ultrasonic electric energy to the ultrasonic transducer, and the ultrasonic transducer 8 passes the inverse piezoelectric effect The tiny vibration generated is amplified by the horn 9 and transmitted to the ultrasonic vibrator.

压电超声振子的等效阻抗Equivalent Impedance of a Piezoelectric Ultrasonic Vibrator

如图3所示为图1的等效电路模型。压电陶瓷静态电阻R₀很大，通常被忽略。L₁、C₁和R₁分别代表超声振子的质量、刚度和阻尼。超声振子的等效阻抗可用式(1)-(5)表示，因此图3可以简化成图4所示。Figure 3 shows the equivalent circuit model of Figure 1. Piezoelectric ceramic static resistance R ₀ is very large and is usually ignored. L ₁ , C ₁ and R ₁ represent the mass, stiffness and damping of the ultrasonic vibrator, respectively. The equivalent impedance of the ultrasonic vibrator can be expressed by formulas (1)-(5), so Figure 3 can be simplified as shown in Figure 4.

${Z Z}_{t t} = = \frac{11}{{ω ω}^{22} {C C}_{00}^{22}} \cdot \cdot \frac{{R R}_{m m}}{{R R}_{m m}^{22} + + {(({ωL ωL}_{11} - - 11 / / ωC ω C))}^{22}} - - j j [[\frac{11}{ω ω {C C}_{00}} + + \frac{11}{{ω ω}^{22} {C C}_{00}^{22}} \cdot \cdot \frac{{ωL ωL}_{11} - - 11 / / ωC ω C}{{R R}_{m m}^{22} + + {((ω ω {L L}_{11} - - 11 / / ωC ω C))}^{22}}]] - - - - - - ((11))$

$C C = = \frac{{C C}_{00} {C C}_{11}}{{C C}_{00} + + {C C}_{11}} - - - - - - ((22))$

R_m＝R₁+R_L (3)R _m =R ₁ +R _L (3)

${R R}_{t t} = = \frac{11}{{ω ω}^{22} {C C}_{00}^{22}} \cdot \cdot \frac{{R R}_{m m}}{{R R}_{m m}^{22} + + {(({ωL ωL}_{11} - - 11 / / ωC ω C))}^{22}} - - - - - - ((44))$

${X x}_{t t} = = - - [[\frac{11}{ω ω {C C}_{00}} + + \frac{11}{{ω ω}^{22} {C C}_{00}^{22}} \cdot \cdot \frac{{ωL ωL}_{11} - - 11 / / ωC ω C}{{R R}_{m m}^{22} + + {(({ωL ωL}_{11} - - 11 / / ωC ω C))}^{22}}]] - - - - - - ((55))$

为了获得最大的电声转化效率和振幅，超声振子一般工作在其机械谐振频率处(ω_s)：In order to obtain the maximum electroacoustic conversion efficiency and amplitude, the ultrasonic vibrator generally works at its mechanical resonance frequency (ω _s ):

${ω ω}_{s the s} = = 11 / / \sqrt{{L L}_{11} {C C}_{11}} - - - - - - ((66))$

将式(6)带入式(4)和(5)，可得到谐振频率下超声振子的等效电阻和电抗：Substituting equation (6) into equations (4) and (5), the equivalent resistance and reactance of the ultrasonic vibrator at the resonant frequency can be obtained:

$\{\begin{matrix} {R R}_{t t} = = \frac{{R R}_{m m}}{{ω ω}_{s the s}^{22} {C C}_{00}^{22} {R R}_{m m}^{22} + + 11} \\ {X x}_{t t} = = - - \frac{{ω ω}_{s the s} {C C}_{00} {R R}_{m m}^{22}}{{ω ω}_{s the s}^{22} {C C}_{00}^{22} {R R}_{m m}^{22} + + 11} \end{matrix} - - - - - - ((77))$

(1)副边串联补偿(1) Secondary side series compensation

所述副边补偿网络7是由与副边线圈4串联的补偿元件构成，所述补偿元件为电感或电容，如图5所示为副边串联补偿网络的等效电路图。The secondary side compensation network 7 is composed of compensation elements connected in series with the secondary side coil 4, and the compensation elements are inductors or capacitors, as shown in FIG. 5 is an equivalent circuit diagram of the secondary side series compensation network.

副边电路对主边的作用可以用反射阻抗Zr来表示，反射阻抗Zr获得的功率就是主边传输给副边的功率。反射阻抗的实部为反射电阻Rr代表主边传输给副边的有功功率，反射阻抗的虚部为反射电抗Xr代表主边传输给副边的无功功率。The effect of the secondary side circuit on the main side can be expressed by the reflection impedance Zr, and the power obtained by the reflection impedance Zr is the power transmitted from the main side to the secondary side. The real part of the reflected impedance is the reflected resistance Rr, which represents the active power transmitted from the primary side to the secondary side, and the imaginary part of the reflected impedance is the reflected reactance Xr, which represents the reactive power transmitted from the primary side to the secondary side.

副边电路的阻抗Z_s可以定义为The impedance Z _s of the secondary circuit can be defined as

Z_s＝R_s+R_t+j(ωL_s+X_s+X_t) (8)Z _s ＝R _s +R _t +j(ωL _s +X _s +X _t ) (8)

反射阻抗的表达式为The expression for reflective impedance is

${Z Z}_{r r} = = \frac{{ω ω}^{22} {M m}^{22}}{{Z Z}_{s the s}} - - - - - - ((99))$

将式(8)带入式(9)可得Put formula (8) into formula (9) to get

$\{\begin{matrix} {R R}_{r r} = = \frac{{ω ω}^{22} {M m}^{22} (({R R}_{s the s} + + {R R}_{t t}))}{{(({R R}_{s the s} + + {R R}_{t t}))}^{22} + + {((ω ω {L L}_{s the s} + + {X x}_{t t} + + {X x}_{s the s}))}^{22}} \\ {X x}_{r r} = = - - \frac{{ω ω}^{22} {M m}^{22} ((ω ω {L L}_{s the s} + + {X x}_{t t} + + {X x}_{s the s}))}{{(({R R}_{s the s} + + {R R}_{t t}))}^{22} + + {((ω ω {L L}_{s the s} + + {X x}_{t t} + + {X x}_{s the s}))}^{22}} \end{matrix} - - - - - - ((1010))$

非接触电磁耦合器的功率传输效率为The power transfer efficiency of the non-contact electromagnetic coupler is

${η η}_{transf transf} = = {η η}_{p p} \times \times {η η}_{s the s} = = \frac{{R R}_{r r}}{{R R}_{r r} + + {R R}_{p p}} \times \times \frac{{R R}_{t t}}{{R R}_{s the s} + + {R R}_{t t}} - - - - - - ((1111))$

将式(10)带入式(11)可得Put formula (10) into formula (11) to get

${η η}_{transf transf} = = \frac{{ω ω}^{22} {M m}^{22} {R R}_{t t}}{{R R}_{p p} {(({R R}_{s the s} + + {R R}_{t t}))}^{22} + + {R R}_{p p} {(({ωL ωL}_{s the s} + + {X x}_{t t} + + {X x}_{s the s}))}^{22} + + {ω ω}^{22} {M m}^{22} (({R R}_{s the s} + + {R R}_{t t}))} - - - - - - ((1212))$

令make

$\frac{d d {η η}_{transf transf}}{{dX wxya}_{s the s}} = = 00 - - - - - - ((1313))$

可得Available

X_s＝-ωL_s-X_t (14)X _s = -ωL _s -X _t (14)

当副边串联补偿元件的电抗值Xs满足公式(14)时，即为实现最大传输效率的最优副边串联补偿元件电抗，补偿元件可能是电感或电容这要由最终的计算结果来确定。X_s＝ωL或-1/ωC，其中L和C分别是串联补偿元件的电感值和电容值。When the reactance value Xs of the secondary side series compensation element satisfies the formula (14), it is the optimal secondary side series compensation element reactance to achieve the maximum transmission efficiency. The compensation element may be an inductor or a capacitor, which is determined by the final calculation result. X _s =ωL or -1/ωC, where L and C are the inductance and capacitance of the series compensation element, respectively.

(2)副边并联补偿(2) Secondary parallel compensation

所述副边补偿网络7是由与副边线圈4并联的补偿元件构成，所述补偿元件为电感或电容，如图6所示为副边并联补偿网络的等效电路图。The secondary side compensation network 7 is composed of compensation elements connected in parallel with the secondary side coil 4, and the compensation elements are inductors or capacitors, as shown in FIG. 6 is an equivalent circuit diagram of the secondary side parallel compensation network.

副边电路的阻抗(Z_s)可以定义为The impedance (Z _s ) of the secondary circuit can be defined as

${Z Z}_{s the s} = = {R R}_{s the s} + + j j {ωL ω L}_{s the s} + + \frac{11}{{jB jB}_{s the s} + + \frac{11}{{R R}_{t t} + + j j {X x}_{t t}}} - - - - - - ((1515))$

将式(15)带入式(9)可得Put formula (15) into formula (9) to get

$\{\begin{matrix} {R R}_{r r} = = \frac{{ω ω}^{22} {M m}^{22} [[{R R}_{t t} + + {((11 - - {B B}_{s the s} {X x}_{t t}))}^{22} {R R}_{s the s} + + {B B}_{s the s}^{22} {R R}_{t t}^{22} {R R}_{s the s}]]}{{[[{R R}_{t t} ((11 - - {ωL ωL}_{s the s} {B B}_{s the s})) + + ((11 - - {B B}_{s the s} {X x}_{t t})) {R R}_{s the s}]]}^{22} + + {[[ω ω {L L}_{s the s} + + {X x}_{t t} ((11 - - {ωL ωL}_{s the s} {B B}_{s the s})) + + {B B}_{s the s} {R R}_{t t} {R R}_{s the s}]]}^{22}} \\ {X x}_{r r} = = \frac{{ω ω}^{22} {M m}^{22} [[(({R R}_{t t}^{22} + + {X x}_{t t}^{22})) ((11 - - ω ω {L L}_{s the s} {B B}_{s the s})) {B B}_{s the s} - - {X x}_{t t} - - {ωL ωL}_{s the s} + + 22 {ωL ω L}_{s the s} {X x}_{t t} {B B}_{s the s}]]}{{[[{R R}_{t t} ((11 - - {ωL ωL}_{s the s} {B B}_{s the s})) + + ((11 - - {B B}_{s the s} {X x}_{t t})) {R R}_{s the s}]]}^{22} + + {[[ω ω {L L}_{s the s} + + {X x}_{t t} ((11 - - {ωL ωL}_{s the s} {B B}_{s the s})) + + {B B}_{s the s} {R R}_{t t} {R R}_{s the s}]]}^{22}} \end{matrix} - - - - - - ((1616))$

${η η}_{transf transf} = = {η η}_{p p} \times \times {η η}_{s the s} = = \frac{{R R}_{r r}}{{R R}_{p p} + + {R R}_{r r}} \times \times \frac{{R R}_{t t}}{{R R}_{s the s} [[{(({X x}_{t t} {B B}_{s the s} - - 11))}^{22} + + {R R}_{t t}^{22} {B B}_{s the s}^{22}]] + + {R R}_{t t}} - - - - - - ((1717))$

将式(16)带入式(17)可得Put formula (16) into formula (17) to get

${η η}_{transf transf} = = \frac{{ω ω}^{22} {M m}^{22} {R R}_{t t}}{\{\begin{matrix} {R R}_{p p} {[[{R R}_{t t} ((11 - - {ωL ω L}_{s the s} {B B}_{s the s})) + + ((11 - - {B B}_{s the s} {X x}_{t t})) {R R}_{s the s}]]}^{22} \\ + + {R R}_{p p} {[[{ωL ω L}_{s the s} + + {X x}_{t t} ((11 - - {ωL ωL}_{s the s} {B B}_{s the s})) + + {B B}_{s the s} {R R}_{t t} {R R}_{s the s}]]}^{22} \\ + + {ω ω}^{22} {M m}^{22} [[{R R}_{t t} + + {((11 - - {B B}_{s the s} {X x}_{t t}))}^{22} {R R}_{s the s} + + {B B}_{s the s}^{22} {R R}_{t t}^{22} {R R}_{s the s}]] \end{matrix}\}} - - - - - - ((1818))$

令make

$\frac{d d {η η}_{transf transf}}{{dB dB}_{s the s}} = = 00 - - - - - - ((1919))$

可得Available

${B B}_{s the s} = = \frac{{R R}_{p p} {ωL ωL}_{s the s}}{{R R}_{p p} {R R}_{s the s}^{22} + + {ω ω}^{22} {M m}^{22} {R R}_{s the s} + + {R R}_{p p} {ω ω}^{22} {L L}_{s the s}^{22}} + + \frac{{X x}_{t t}}{{R R}_{t t}^{22} + + {X x}_{t t}^{22}} - - - - - - ((2020))$

其中：Bs-副边并联补偿元件的电纳，ω-电源输出信号的角频率，Rp-主边线圈交流电阻，Rs-副边线圈交流电阻，Ls-副边线圈自感，M-互感，Xt-超声振子等效电抗，Rt-超声振子等效电阻。Among them: Bs-the susceptance of the secondary parallel compensation component, ω-the angular frequency of the output signal of the power supply, Rp-the AC resistance of the primary coil, Rs-the AC resistance of the secondary coil, Ls-the self-inductance of the secondary coil, M-the mutual inductance, Xt-ultrasonic vibrator equivalent reactance, Rt-ultrasonic vibrator equivalent resistance.

当副边并联补偿元件的电纳值Bs满足公式(20)时，即为实现最大传输效率的最优副边并联补偿元件电纳，补偿元件可能是电感或电容这要由最终的计算结果来确定。B_s＝ωC或-1/ωL，其中L和C分别是并联补偿元件的电感值和电容值。When the susceptance value Bs of the secondary side parallel compensation element satisfies the formula (20), it is the optimal secondary side parallel compensation element susceptance to achieve the maximum transmission efficiency, and the compensation element may be an inductor or a capacitor, which depends on the final calculation result Sure. B _s =ωC or -1/ωL, where L and C are the inductance and capacitance of the parallel compensation element, respectively.

实施例：Example:

下面以图7所示U型同心磁芯柱面感应电磁耦合器为例，说明补偿元件及线圈优化的具体方法，该非接触电磁耦合器采用锰锌铁氧体PC40材料，尺寸参数见表1，所用换能器电学参数见表2。实验所测量的耦合器线圈自感及交流电阻与线圈匝数的关系见图8-10，线圈之间耦合系数k见表3。The following takes the U-shaped concentric magnetic core cylindrical induction electromagnetic coupler shown in Figure 7 as an example to illustrate the specific method of compensation components and coil optimization. The non-contact electromagnetic coupler is made of manganese-zinc ferrite PC40 material, and the size parameters are shown in Table 1. , the electrical parameters of the transducers used are shown in Table 2. The relationship between the self-inductance and AC resistance of the coupler coil measured in the experiment and the number of coil turns is shown in Figure 8-10, and the coupling coefficient k between the coils is shown in Table 3.

表1U型同心磁芯柱面感应电磁耦合器的尺寸参数(mm)Table 1 Dimensional parameters of U-type concentric magnetic core cylindrical induction electromagnetic coupler (mm)

d1d1 d2d2 d3d3 d4d4 Hh aa bb gg 6565 8282 8484 101101 2525 1818 44 11

表2超声振子电学参数Table 2 Electrical parameters of ultrasonic vibrator

C₀[nF]C ₀ [nF] C₁[nF]C ₁ [nF] L₁[mH]L ₁ [mH] R₁[Ω]R ₁ [Ω] R_L[Ω]R _L [Ω] f_s[KHz]f _s [KHz] 6.6938466.693846 1.1805321.180532 22.96434222.964342 16.28516.285 00 30.56730.567

表3耦合系数k与线圈匝数的关系Table 3 The relationship between the coupling coefficient k and the number of turns of the coil

可见，当采用靠外绕线方式时，即保持主副线圈之间的间隙不变时，耦合器的耦合系数也基本保持不变，约为0.975。因此依据实验测量结果可以拟合出如下线圈自感及交流电阻与线圈匝数之间的关系公式It can be seen that when the outer winding method is used, that is, when the gap between the primary and secondary coils is kept unchanged, the coupling coefficient of the coupler also remains basically unchanged, about 0.975. Therefore, according to the experimental measurement results, the following relationship formula between the self-inductance of the coil and the AC resistance and the number of turns of the coil can be fitted

$\{\begin{matrix} {L L}_{p p} = = 1.0402 1.0402 {N N}_{p p}^{1.9986 1.9986} \\ {L L}_{s the s} = = 1.0006 1.0006 {N N}_{s the s}^{2.0044 2.0044} \end{matrix} - - - - - - ((21 twenty one))$

$\{\begin{matrix} {R R}_{p p} = = 0.0214 0.0214 {N N}_{p p}^{1.1269 1.1269} \\ {R R}_{s the s} = = 0.0201 0.0201 {N N}_{s the s}^{1.1197 1.1197} \end{matrix} - - - - - - ((22 twenty two))$

耦合器互感的计算公式见(23)For the calculation formula of coupler mutual inductance, see (23)

$M m = = k k \times \times \sqrt{{L L}_{p p} {L L}_{s the s}} - - - - - - ((23 twenty three))$

将(21)带入(23)就建立了互感与线圈匝数之间的关系式，其中，k取0.975，这样图5和图6中所涉及到的电磁耦合器参数就都可以用线圈匝数来表达，式(12)和(18)的传输效率就可以转化为线圈匝数的函数。Bringing (21) into (23) establishes the relationship between the mutual inductance and the number of turns of the coil, where k is 0.975, so that the parameters of the electromagnetic coupler involved in Figure 5 and Figure 6 can all use the coil turns Expressed in numbers, the transmission efficiency of formulas (12) and (18) can be transformed into a function of the number of coil turns.

除了实验测量法，还可通过理论计算得到耦合器自感、互感及交流电阻与线圈匝数之间的关系。理论方法基于下列公式：In addition to the experimental measurement method, the relationship between the self-inductance, mutual inductance and AC resistance of the coupler and the number of coil turns can also be obtained through theoretical calculation. The theoretical approach is based on the following formula:

${L L}_{p p} = = \frac{{N N}_{p p}^{22}}{{R R}_{mp mp}} - - - - - - ((24 twenty four))$

${L L}_{s the s} = = \frac{{N N}_{s the s}^{22}}{{R R}_{ms ms}} - - - - - - ((2525))$

$k k = = \frac{{φ φ}_{M m}}{{φ φ}_{M m} + + {φ φ}_{L L}} - - - - - - ((2626))$

${R R}_{ac ac} = = {R R}_{dc dc} [[11 + + 22 {((\frac{{n no}_{str str} {d d}_{str str}}{{D D.}_{Litz Liz}}))}^{22} [[\frac{{d d}_{str str} \sqrt{{f f}_{s the s}}}{0.1044 0.1044}]]]] - - - - - - ((2727))$

其中：Np-主边线圈匝数，Ns-副边线圈匝数，Rmp-主边磁路磁阻，Rms-副边磁路磁阻，k-主副边之间的耦合系数，φ_M-耦合磁通，φ_L-漏磁通，R_ac-线圈交流电阻，R_dc-线圈直流电阻，n_str-Litz线中单根细线的个数，d_str-单根细线的直径(见图11)，D_Litz-Litz线的总外径(见图11)，f_s换能器串联谐振频率。Among them: Np-the number of turns of the primary side coil, Ns-the number of turns of the secondary side coil, Rmp-the reluctance of the main side magnetic circuit, Rms-the reluctance of the secondary side magnetic circuit, k-coupling coefficient between the main side and the secondary side, φ _M - Coupled magnetic flux, φ _L - leakage flux, R _ac - coil AC resistance, R _dc - coil DC resistance, n _str - the number of single thin wires in the Litz wire, d _str - the diameter of a single thin wire (see Figure 11), D _Litz - the total outer diameter of the Litz line (see Figure 11), f _s transducer series resonant frequency.

磁路的磁阻和耦合系数可以仿照《中国电机工程学报》第30卷第27期发表的论文“新型非接触变压器的磁路模型及其优化”一文中的方法进行计算。The reluctance and coupling coefficient of the magnetic circuit can be calculated according to the method in the paper "Magnetic circuit model and optimization of new non-contact transformer" published in "Proceedings of the Chinese Society for Electrical Engineering" Volume 30, Issue 27.

将基于效率的最优补偿参数(公式14和20)带入传输效率的表达式(12)和(18)，即无论线圈匝数为多少始终保持补偿元件为最优值。同时，将公式(21)(22)(23)待入输效率的表达式(12)和(18)，便可得到传输效率与线圈匝数的关系。如图12和图13所示。Bring the efficiency-based optimal compensation parameters (Equations 14 and 20) into the expressions (12) and (18) of the transmission efficiency, that is, keep the compensation element at the optimal value regardless of the number of turns of the coil. At the same time, the relationship between the transmission efficiency and the number of turns of the coil can be obtained by treating the formulas (21) (22) (23) with the expressions (12) and (18) of the input efficiency. As shown in Figure 12 and Figure 13.

若设计要求耦合器的传输效率在0.98以上，那么取图12和图13中，0.98等高线包围的区域即可，有多组主副边匝数满足要求，这样耦合器的设计会更加灵活和易于实现。If the design requires the transmission efficiency of the coupler to be above 0.98, then take the area surrounded by the 0.98 contour line in Figure 12 and Figure 13, and there are multiple groups of primary and secondary turns that meet the requirements, so that the design of the coupler will be more flexible and easy to implement.

如电磁耦合器匝数设计为Ns＝8，Np＝60，即Ls＝64.627μH，Lp＝3.7mH，M＝478.27μH。For example, the number of turns of the electromagnetic coupler is designed as Ns=8, Np=60, that is, Ls=64.627μH, Lp=3.7mH, M=478.27μH.

副边串联补偿电容431.33nF，效率为0.9833。The secondary side series compensation capacitor is 431.33nF, and the efficiency is 0.9833.

副边并联补偿电容60.611nF，效率为0.9817。The parallel compensation capacitor on the secondary side is 60.611nF, and the efficiency is 0.9817.

对比例comparative example

公告号为CN201393181Y，公告日为2010年1月27日的中国实用新型专利《回转式非接触超声波电信号传输装置》中副边的补偿条件为：The compensation conditions for the secondary side in the Chinese utility model patent "rotary non-contact ultrasonic electrical signal transmission device" with the announcement number CN201393181Y and the announcement date of January 27, 2010 are:

${L L}_{s the s} = = \frac{{C C}_{00} {R R}_{11}^{22}}{(({ω ω}_{s the s}^{22} {C C}_{00}^{22} {R R}_{11}^{22} + + 11))} - - - - - - ((2828))$

对于表2所示换能器，可得Ls＝1.7744μH，那么根据式(19)可计算出副边线圈匝数为For the transducer shown in Table 2, Ls=1.7744μH can be obtained, then according to formula (19), the number of turns of the secondary coil can be calculated as

可见耦合器采用磁芯结构是很难得到这么小的自感的。根据《内蒙古师大学报自然科学(汉文)版》1999年3月第28卷第1期的“单匝线圈电感的计算”，可知对于单匝空心线圈当其半径为38mm时，自感约为1.7744μH。若采用无磁芯的空心线圈，漏磁通会很大，没有封闭的磁路，漏磁通会在周围金属介质中产生涡流损耗。除了会产生较大的电磁辐射外，耦合系数也较低，这反而降低了耦合器的传输效率。由下面的传输效率计算公式也可看出，仅仅优化副边自感是不够的，传输效率也与互感系数有关，互感系数M越大，传输效率越高，较低的自感会导致较低的互感，反而会降低传输效率。It can be seen that it is difficult for the coupler to obtain such a small self-inductance with a magnetic core structure. According to "Calculation of Inductance of Single-turn Coil" in "Natural Science (Chinese) Edition of Journal of Inner Mongolia Normal University" in March 1999, Volume 28, No. 1, it can be known that when the radius of a single-turn air-core coil is 38mm, the self-inductance is about 1.7744 μH. If an air-core coil without a magnetic core is used, the leakage flux will be large, and there is no closed magnetic circuit, and the leakage flux will generate eddy current loss in the surrounding metal medium. In addition to generating large electromagnetic radiation, the coupling coefficient is also low, which in turn reduces the transmission efficiency of the coupler. It can also be seen from the following transmission efficiency calculation formula that it is not enough to optimize the self-inductance of the secondary side, and the transmission efficiency is also related to the mutual inductance coefficient. The larger the mutual inductance coefficient M, the higher the transmission efficiency, and the lower the self-inductance will lead to lower The mutual inductance will reduce the transmission efficiency.

${η η}_{transf transf} = = \frac{{ω ω}^{22} {M m}^{22} {R R}_{t t}}{{R R}_{p p} {(({R R}_{s the s} + + {R R}_{t t}))}^{22} + + {ω ω}^{22} {M m}^{22} (({R R}_{s the s} + + {R R}_{t t}))} = = \frac{11}{\frac{{R R}_{p p} {(({R R}_{s the s} + + {R R}_{t t}))}^{22}}{{ω ω}^{22} {M m}^{22} {R R}_{t t}} + + \frac{{R R}_{s the s}}{{R R}_{t t}} + + 11} - - - - - - ((2929))$

因此了可以看出，本对比例中，副边自补偿是不适用的。Therefore, it can be seen that in this comparative example, the secondary side self-compensation is not applicable.

尽管上面结合附图对本发明进行了描述，但是本发明并不局限于上述的具体实施方式，上述的具体实施方式仅仅是示意性的，而不是限制性的，本领域的普通技术人员在本发明的启示下，在不脱离本发明宗旨的情况下，还可以做出很多变形，这些均属于本发明的保护之内。Although the present invention has been described above in conjunction with the accompanying drawings, the present invention is not limited to the above-mentioned specific embodiments, and the above-mentioned specific embodiments are only illustrative, rather than restrictive. Under the enlightenment of the present invention, many modifications can be made without departing from the gist of the present invention, and these all belong to the protection of the present invention.

Claims

1. A circuit compensation network of an efficiency-based non-contact power supply ultrasonic vibration system, wherein the non-contact power supply ultrasonic vibration system includes a non-contact electromagnetic coupler, and the non-contact electromagnetic coupler includes main sides with gaps between them A magnetic core (6) and a secondary magnetic core (5), the primary coil (3) is wound on the primary magnetic core (6), and the secondary coil (4) is wound on the secondary magnetic core (5) ), the primary side coil (3) is connected with a primary side compensation network (2), it is characterized in that the secondary side coil (4) is connected with a secondary side compensation network (7) made of compensating elements, and the ultrasonic power supply ( 1) Generate ultrasonic frequency alternating current, pass the electric energy to the primary coil (3) through the primary side compensation network (2), and then transmit it to the secondary side coil (4) through the principle of electromagnetic induction, and the secondary side compensation network (7) Transmitting the ultrasonic electric energy to the ultrasonic transducer, and the tiny vibration generated by the ultrasonic transducer (8) through the inverse piezoelectric effect is amplified by the horn (9) and then transmitted to the ultrasonic vibrator.

2. The circuit compensation network of a kind of efficiency-based non-contact power supply ultrasonic vibration system according to claim 1, characterized in that, the secondary compensation network (7) is composed of a compensation element connected in series with the secondary coil (4) Composition, the compensation element is an inductor or a capacitor.

3. The circuit compensation network of a kind of efficiency-based non-contact power supply ultrasonic vibration system according to claim 1, characterized in that, the secondary compensation network (7) is composed of a compensation element connected in parallel with the secondary coil (4) Composition, the compensation element is an inductor or a capacitor.

4. The circuit compensation network of a kind of efficiency-based non-contact power supply ultrasonic vibration system according to claim 2, wherein the reactance of the compensation element satisfies the following formula:

X _s ＝-ωL _s -X _t

Among them: Xs-the reactance of the secondary side series compensation element, Ls-the self-inductance of the secondary side coil, Xt-the equivalent reactance of the ultrasonic vibrator, ω-the angular frequency of the output signal of the power supply.

5. The circuit compensation network of a kind of efficiency-based non-contact power supply ultrasonic vibration system according to claim 3, wherein the susceptance of the compensation element satisfies the following formula:

Among them: Bs-susceptance of secondary side parallel compensation components, ω-angular frequency of power output signal, Rp-primary side coil AC resistance, Rs-secondary side coil AC resistance, Ls-secondary side coil self-inductance, M-mutual inductance, Xt-ultrasonic vibrator equivalent reactance, Rt-ultrasonic vibrator equivalent resistance.