JPS6242771Y2 - - Google Patents
Info
- Publication number
- JPS6242771Y2 JPS6242771Y2 JP1982000918U JP91882U JPS6242771Y2 JP S6242771 Y2 JPS6242771 Y2 JP S6242771Y2 JP 1982000918 U JP1982000918 U JP 1982000918U JP 91882 U JP91882 U JP 91882U JP S6242771 Y2 JPS6242771 Y2 JP S6242771Y2
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- ejection
- hole
- small
- joining member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009792 diffusion process Methods 0.000 claims description 28
- 239000012530 fluid Substances 0.000 claims description 19
- 238000004140 cleaning Methods 0.000 claims description 18
- 238000002347 injection Methods 0.000 description 13
- 239000007924 injection Substances 0.000 description 13
- 239000007788 liquid Substances 0.000 description 13
- 239000007921 spray Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000003380 propellant Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Nozzles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP91882U JPS58107158U (ja) | 1982-01-08 | 1982-01-08 | 洗浄用ノズル |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP91882U JPS58107158U (ja) | 1982-01-08 | 1982-01-08 | 洗浄用ノズル |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58107158U JPS58107158U (ja) | 1983-07-21 |
JPS6242771Y2 true JPS6242771Y2 (fr) | 1987-11-02 |
Family
ID=30013967
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP91882U Granted JPS58107158U (ja) | 1982-01-08 | 1982-01-08 | 洗浄用ノズル |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58107158U (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006159145A (ja) * | 2004-12-10 | 2006-06-22 | Renesas Technology Corp | 流体吐出ノズルおよびこれを用いた基板処理装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3801967B2 (ja) * | 2001-08-28 | 2006-07-26 | 株式会社いけうち | ノズルおよび該ノズルによる導管内周面への流体噴射方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5535960B2 (fr) * | 1973-06-08 | 1980-09-17 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5725730Y2 (fr) * | 1978-08-30 | 1982-06-04 | ||
JPS6216195Y2 (fr) * | 1979-04-11 | 1987-04-23 |
-
1982
- 1982-01-08 JP JP91882U patent/JPS58107158U/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5535960B2 (fr) * | 1973-06-08 | 1980-09-17 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006159145A (ja) * | 2004-12-10 | 2006-06-22 | Renesas Technology Corp | 流体吐出ノズルおよびこれを用いた基板処理装置 |
JP4652040B2 (ja) * | 2004-12-10 | 2011-03-16 | ルネサスエレクトロニクス株式会社 | 流体吐出ノズルおよびこれを用いた基板処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS58107158U (ja) | 1983-07-21 |
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