JPS6242368Y2 - - Google Patents
Info
- Publication number
- JPS6242368Y2 JPS6242368Y2 JP1980088445U JP8844580U JPS6242368Y2 JP S6242368 Y2 JPS6242368 Y2 JP S6242368Y2 JP 1980088445 U JP1980088445 U JP 1980088445U JP 8844580 U JP8844580 U JP 8844580U JP S6242368 Y2 JPS6242368 Y2 JP S6242368Y2
- Authority
- JP
- Japan
- Prior art keywords
- thermal conductivity
- gas
- flow path
- thin film
- detection element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 15
- 239000010409 thin film Substances 0.000 claims description 11
- 238000005259 measurement Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 20
- 239000012159 carrier gas Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 5
- 238000000357 thermal conductivity detection Methods 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 230000020169 heat generation Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980088445U JPS6242368Y2 (ko) | 1980-06-24 | 1980-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980088445U JPS6242368Y2 (ko) | 1980-06-24 | 1980-06-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5716855U JPS5716855U (ko) | 1982-01-28 |
| JPS6242368Y2 true JPS6242368Y2 (ko) | 1987-10-30 |
Family
ID=29450522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980088445U Expired JPS6242368Y2 (ko) | 1980-06-24 | 1980-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6242368Y2 (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6262668U (ko) * | 1985-10-07 | 1987-04-18 | ||
| JP5409076B2 (ja) * | 2009-03-27 | 2014-02-05 | 株式会社堀場製作所 | 熱伝導率センサ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5492788A (en) * | 1977-12-30 | 1979-07-23 | Weber Guenther | Device for measuring heat transfer |
-
1980
- 1980-06-24 JP JP1980088445U patent/JPS6242368Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5492788A (en) * | 1977-12-30 | 1979-07-23 | Weber Guenther | Device for measuring heat transfer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5716855U (ko) | 1982-01-28 |
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