JPS6241793B2 - - Google Patents

Info

Publication number
JPS6241793B2
JPS6241793B2 JP22090882A JP22090882A JPS6241793B2 JP S6241793 B2 JPS6241793 B2 JP S6241793B2 JP 22090882 A JP22090882 A JP 22090882A JP 22090882 A JP22090882 A JP 22090882A JP S6241793 B2 JPS6241793 B2 JP S6241793B2
Authority
JP
Japan
Prior art keywords
coating
nozzle
small holes
coating liquid
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22090882A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59109273A (ja
Inventor
Seiten Sugiura
Takao Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57220908A priority Critical patent/JPS59109273A/ja
Publication of JPS59109273A publication Critical patent/JPS59109273A/ja
Publication of JPS6241793B2 publication Critical patent/JPS6241793B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Nozzles (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP57220908A 1982-12-15 1982-12-15 回転塗布装置用ノズル Granted JPS59109273A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57220908A JPS59109273A (ja) 1982-12-15 1982-12-15 回転塗布装置用ノズル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57220908A JPS59109273A (ja) 1982-12-15 1982-12-15 回転塗布装置用ノズル

Publications (2)

Publication Number Publication Date
JPS59109273A JPS59109273A (ja) 1984-06-23
JPS6241793B2 true JPS6241793B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-04

Family

ID=16758412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57220908A Granted JPS59109273A (ja) 1982-12-15 1982-12-15 回転塗布装置用ノズル

Country Status (1)

Country Link
JP (1) JPS59109273A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012157434A1 (ja) * 2011-05-16 2012-11-22 武蔵エンジニアリング株式会社 膜状塗布ノズル、塗布装置および塗布方法
CN102899463A (zh) * 2012-10-09 2013-01-30 无锡信德隆工业炉有限公司 直线水帘装置
WO2020231747A1 (en) * 2019-05-12 2020-11-19 Magik Eye Inc. Mapping three-dimensional depth map data onto two-dimensional images
US11002537B2 (en) 2016-12-07 2021-05-11 Magik Eye Inc. Distance sensor including adjustable focus imaging sensor

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6351972A (ja) * 1986-08-22 1988-03-05 Nitto Seiko Co Ltd 自動グリス塗布方法およびその装置
JPH0641869U (ja) * 1992-06-30 1994-06-03 株式会社シーテック 液体塗布用ノズル
NL1020701C2 (nl) * 2002-05-29 2003-12-02 Stichting Energie Werkwijze en inrichting voor het op een laag van een nanokristallijn eerste materiaal aanbrengen van een laag van een tweede materiaal.
JP4767482B2 (ja) * 2003-07-08 2011-09-07 ノードソン コーポレーション 液体又は溶融体の塗布方法及びノズル
DE102004002421A1 (de) * 2004-01-16 2005-08-18 Atotech Deutschland Gmbh Düsenanordnung
JP2007058200A (ja) * 2005-07-28 2007-03-08 Hoya Corp マスクブランクの製造方法及び露光用マスクの製造方法
JP6847566B1 (ja) * 2020-10-01 2021-03-24 中外炉工業株式会社 塗布装置及び塗布方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012157434A1 (ja) * 2011-05-16 2012-11-22 武蔵エンジニアリング株式会社 膜状塗布ノズル、塗布装置および塗布方法
JP2012239930A (ja) * 2011-05-16 2012-12-10 Musashi Eng Co Ltd 膜状塗布ノズル、塗布装置および塗布方法
CN103596700A (zh) * 2011-05-16 2014-02-19 武藏工业株式会社 膜状涂布喷嘴、涂布装置及涂布方法
CN102899463A (zh) * 2012-10-09 2013-01-30 无锡信德隆工业炉有限公司 直线水帘装置
US11002537B2 (en) 2016-12-07 2021-05-11 Magik Eye Inc. Distance sensor including adjustable focus imaging sensor
WO2020231747A1 (en) * 2019-05-12 2020-11-19 Magik Eye Inc. Mapping three-dimensional depth map data onto two-dimensional images
US11019249B2 (en) 2019-05-12 2021-05-25 Magik Eye Inc. Mapping three-dimensional depth map data onto two-dimensional images

Also Published As

Publication number Publication date
JPS59109273A (ja) 1984-06-23

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