JPS6240653Y2 - - Google Patents
Info
- Publication number
- JPS6240653Y2 JPS6240653Y2 JP17741980U JP17741980U JPS6240653Y2 JP S6240653 Y2 JPS6240653 Y2 JP S6240653Y2 JP 17741980 U JP17741980 U JP 17741980U JP 17741980 U JP17741980 U JP 17741980U JP S6240653 Y2 JPS6240653 Y2 JP S6240653Y2
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- processing
- tank
- liquid tank
- suction device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 139
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 239000012535 impurity Substances 0.000 description 20
- 239000007789 gas Substances 0.000 description 12
- 238000013019 agitation Methods 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 239000002250 absorbent Substances 0.000 description 2
- 230000002745 absorbent Effects 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17741980U JPS6240653Y2 (enrdf_load_stackoverflow) | 1980-12-10 | 1980-12-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17741980U JPS6240653Y2 (enrdf_load_stackoverflow) | 1980-12-10 | 1980-12-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5799713U JPS5799713U (enrdf_load_stackoverflow) | 1982-06-19 |
| JPS6240653Y2 true JPS6240653Y2 (enrdf_load_stackoverflow) | 1987-10-17 |
Family
ID=29971282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17741980U Expired JPS6240653Y2 (enrdf_load_stackoverflow) | 1980-12-10 | 1980-12-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6240653Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0649124B2 (ja) * | 1985-06-21 | 1994-06-29 | 株式会社日立製作所 | ▲ろ▼過エレメント |
-
1980
- 1980-12-10 JP JP17741980U patent/JPS6240653Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5799713U (enrdf_load_stackoverflow) | 1982-06-19 |
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