JPS6239834B2 - - Google Patents
Info
- Publication number
- JPS6239834B2 JPS6239834B2 JP55126697A JP12669780A JPS6239834B2 JP S6239834 B2 JPS6239834 B2 JP S6239834B2 JP 55126697 A JP55126697 A JP 55126697A JP 12669780 A JP12669780 A JP 12669780A JP S6239834 B2 JPS6239834 B2 JP S6239834B2
- Authority
- JP
- Japan
- Prior art keywords
- mesa portion
- layer
- photoresist
- mesa
- buffer layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005669 field effect Effects 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 16
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 11
- 230000015556 catabolic process Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 239000008186 active pharmaceutical agent Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000005275 alloying Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electrodes Of Semiconductors (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12669780A JPS5750478A (en) | 1980-09-12 | 1980-09-12 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12669780A JPS5750478A (en) | 1980-09-12 | 1980-09-12 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5750478A JPS5750478A (en) | 1982-03-24 |
| JPS6239834B2 true JPS6239834B2 (US20090163788A1-20090625-C00002.png) | 1987-08-25 |
Family
ID=14941602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12669780A Granted JPS5750478A (en) | 1980-09-12 | 1980-09-12 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5750478A (US20090163788A1-20090625-C00002.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6248437U (US20090163788A1-20090625-C00002.png) * | 1985-09-10 | 1987-03-25 | ||
| JPH03115044U (US20090163788A1-20090625-C00002.png) * | 1990-03-09 | 1991-11-27 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0789558B2 (ja) * | 1984-06-12 | 1995-09-27 | 日本電気株式会社 | 半導体装置の製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52109375A (en) * | 1976-03-10 | 1977-09-13 | Nec Corp | Manufacture of junction gate type field effect transistor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51151571U (US20090163788A1-20090625-C00002.png) * | 1975-05-27 | 1976-12-03 |
-
1980
- 1980-09-12 JP JP12669780A patent/JPS5750478A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52109375A (en) * | 1976-03-10 | 1977-09-13 | Nec Corp | Manufacture of junction gate type field effect transistor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6248437U (US20090163788A1-20090625-C00002.png) * | 1985-09-10 | 1987-03-25 | ||
| JPH03115044U (US20090163788A1-20090625-C00002.png) * | 1990-03-09 | 1991-11-27 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5750478A (en) | 1982-03-24 |
