JPS6238850B2 - - Google Patents
Info
- Publication number
- JPS6238850B2 JPS6238850B2 JP9524078A JP9524078A JPS6238850B2 JP S6238850 B2 JPS6238850 B2 JP S6238850B2 JP 9524078 A JP9524078 A JP 9524078A JP 9524078 A JP9524078 A JP 9524078A JP S6238850 B2 JPS6238850 B2 JP S6238850B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- type
- gaas
- diffusion
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9524078A JPS5521186A (en) | 1978-08-03 | 1978-08-03 | Ohmic electrode material for p-type 3-5 families compound semiconductor and forming method of ohmic electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9524078A JPS5521186A (en) | 1978-08-03 | 1978-08-03 | Ohmic electrode material for p-type 3-5 families compound semiconductor and forming method of ohmic electrode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5521186A JPS5521186A (en) | 1980-02-15 |
| JPS6238850B2 true JPS6238850B2 (cs) | 1987-08-20 |
Family
ID=14132225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9524078A Granted JPS5521186A (en) | 1978-08-03 | 1978-08-03 | Ohmic electrode material for p-type 3-5 families compound semiconductor and forming method of ohmic electrode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5521186A (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01307219A (ja) * | 1988-06-03 | 1989-12-12 | Matsushita Electron Corp | 半導体装置の電極形成方法 |
-
1978
- 1978-08-03 JP JP9524078A patent/JPS5521186A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5521186A (en) | 1980-02-15 |
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