JPS6238721Y2 - - Google Patents
Info
- Publication number
- JPS6238721Y2 JPS6238721Y2 JP6515482U JP6515482U JPS6238721Y2 JP S6238721 Y2 JPS6238721 Y2 JP S6238721Y2 JP 6515482 U JP6515482 U JP 6515482U JP 6515482 U JP6515482 U JP 6515482U JP S6238721 Y2 JPS6238721 Y2 JP S6238721Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas flow
- flow path
- degassing
- resistance
- flow rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007872 degassing Methods 0.000 claims description 30
- 239000002904 solvent Substances 0.000 claims description 20
- 239000007789 gas Substances 0.000 description 81
- 239000001307 helium Substances 0.000 description 29
- 229910052734 helium Inorganic materials 0.000 description 29
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 29
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 12
- 239000007788 liquid Substances 0.000 description 5
- 230000001105 regulatory effect Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Degasification And Air Bubble Elimination (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6515482U JPS58166804U (ja) | 1982-05-04 | 1982-05-04 | 溶媒脱気装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6515482U JPS58166804U (ja) | 1982-05-04 | 1982-05-04 | 溶媒脱気装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58166804U JPS58166804U (ja) | 1983-11-07 |
| JPS6238721Y2 true JPS6238721Y2 (enrdf_load_stackoverflow) | 1987-10-02 |
Family
ID=30075144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6515482U Granted JPS58166804U (ja) | 1982-05-04 | 1982-05-04 | 溶媒脱気装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58166804U (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5482191B2 (ja) * | 2009-12-24 | 2014-04-23 | 東ソー株式会社 | 脱気装置 |
| JP6391524B2 (ja) * | 2015-03-31 | 2018-09-19 | 株式会社Ｓｃｒｅｅｎホールディングス | 脱酸素装置および基板処理装置 |
-
1982
- 1982-05-04 JP JP6515482U patent/JPS58166804U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58166804U (ja) | 1983-11-07 |
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