JPS58166804U - 溶媒脱気装置 - Google Patents

溶媒脱気装置

Info

Publication number
JPS58166804U
JPS58166804U JP6515482U JP6515482U JPS58166804U JP S58166804 U JPS58166804 U JP S58166804U JP 6515482 U JP6515482 U JP 6515482U JP 6515482 U JP6515482 U JP 6515482U JP S58166804 U JPS58166804 U JP S58166804U
Authority
JP
Japan
Prior art keywords
gas flow
flow path
degassing
parallel
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6515482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6238721Y2 (enrdf_load_stackoverflow
Inventor
修 古川
勝彦 斉藤
章典 清藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP6515482U priority Critical patent/JPS58166804U/ja
Publication of JPS58166804U publication Critical patent/JPS58166804U/ja
Application granted granted Critical
Publication of JPS6238721Y2 publication Critical patent/JPS6238721Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Degasification And Air Bubble Elimination (AREA)
JP6515482U 1982-05-04 1982-05-04 溶媒脱気装置 Granted JPS58166804U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6515482U JPS58166804U (ja) 1982-05-04 1982-05-04 溶媒脱気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6515482U JPS58166804U (ja) 1982-05-04 1982-05-04 溶媒脱気装置

Publications (2)

Publication Number Publication Date
JPS58166804U true JPS58166804U (ja) 1983-11-07
JPS6238721Y2 JPS6238721Y2 (enrdf_load_stackoverflow) 1987-10-02

Family

ID=30075144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6515482U Granted JPS58166804U (ja) 1982-05-04 1982-05-04 溶媒脱気装置

Country Status (1)

Country Link
JP (1) JPS58166804U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011133367A (ja) * 2009-12-24 2011-07-07 Tosoh Corp 脱気装置
JP2016190195A (ja) * 2015-03-31 2016-11-10 株式会社Ｓｃｒｅｅｎホールディングス 脱酸素装置および基板処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011133367A (ja) * 2009-12-24 2011-07-07 Tosoh Corp 脱気装置
JP2016190195A (ja) * 2015-03-31 2016-11-10 株式会社Ｓｃｒｅｅｎホールディングス 脱酸素装置および基板処理装置

Also Published As

Publication number Publication date
JPS6238721Y2 (enrdf_load_stackoverflow) 1987-10-02

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