JPS58166804U - Solvent deaerator - Google Patents
Solvent deaeratorInfo
- Publication number
- JPS58166804U JPS58166804U JP6515482U JP6515482U JPS58166804U JP S58166804 U JPS58166804 U JP S58166804U JP 6515482 U JP6515482 U JP 6515482U JP 6515482 U JP6515482 U JP 6515482U JP S58166804 U JPS58166804 U JP S58166804U
- Authority
- JP
- Japan
- Prior art keywords
- gas flow
- flow path
- degassing
- parallel
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Degasification And Air Bubble Elimination (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はこの考案の溶媒脱気装置の一実施例の構成説明
図である。
１・・・・・・溶媒脱気装置、２・・・・・・ヘリウム
ガスボンベ、３・・・・・・ベロー弁、４・・・・・・
並列ガス流路、４ａ・・・・・・主ガス流蕗、４ｂ・・
・・・・小流量ガス流路、５゜６・・・・・・電磁弁、
７・・・・・・抵抗管、８・・・・・・制御部、９・・
・・・・分岐管、１０，１１．１２・・・・・・脱気ガ
ス流路、 −１３，１４，１５・・・・・・フィルタ、
１６．１７゜１８・・・・・・ストップバルブ、１９，
２０，２１゜２２、 ２３． ２４・・・・・・抵抗管
、２５． ２６． ２７・・・・・・脱気ガス流路のフ
ィルタに接続する部分、２８・・・・・・圧力計。
゛FIG. 1 is an explanatory diagram of the configuration of one embodiment of the solvent degassing device of this invention. 1... Solvent deaerator, 2... Helium gas cylinder, 3... Bellows valve, 4...
Parallel gas flow path, 4a... Main gas flow path, 4b...
...Small flow rate gas flow path, 5゜6...Solenoid valve,
7... Resistance tube, 8... Control section, 9...
... Branch pipe, 10, 11.12 ... Degassing gas flow path, -13, 14, 15 ... Filter,
16.17゜18...stop valve, 19,
20, 21° 22, 23. 24...Resistance tube, 25. 26. 27... Portion connected to the filter of the degassing gas flow path, 28... Pressure gauge.
゛
Claims (1)
ス流路を接続し、それら脱気ガス流路の先端にそれぞれ
フィルタ手段を取り付けた溶媒脱気装置において、 脱気ガス供給源と分岐手段との間もしくはガス流量調節
手段と分岐手段との間のガス流路に並列に小流量ガス流
路を一設置して並列ガス流路とすると共にその並列ガス
流路の選択導通手段を設け、また脱気ガス流路中にそれ
そ′糺フィルタ手段より抵抗の大なる抵抗手段を介設し
、さらにこの抵抗手段のそれぞれに続いて一端が開放さ
れた抵抗管を連結するか又は並列ガス流路のいぞれか一
方の流路もしくは脱気ガス流路のそれぞれに切換えに、
よって大気側と脱気ガス流路とを導通させうる３方コツ
ク弁を介設して脱気ガス供給停止時において脱気ガス流
路に大気を導入できるよう構成してなる溶媒脱気装置。[Claims for Utility Model Registration] A gas flow rate adjusting means is connected to a deaerated gas supply source. In a solvent deaerator, a plurality of degassing gas flow paths are connected to the gas flow rate adjusting means via a branching means, and a filter means is attached to each end of the degassing gas flow path, and a degassing gas supply source and a branching means are provided. A small flow rate gas flow path is installed in parallel with the gas flow path between the gas flow control means or between the gas flow rate adjustment means and the branching means to form a parallel gas flow path, and selective conduction means for the parallel gas flow path is provided. In addition, a resistance means having a higher resistance than the filter means is interposed in the deaerated gas flow path, and a resistance pipe with one end open is connected to each of the resistance means, or a parallel gas To switch to either one of the flow paths or each deaerated gas flow path,
Therefore, the solvent degassing device is constructed such that a three-way valve that can connect the atmosphere side and the degassing gas flow path is interposed so that the atmosphere can be introduced into the degassing gas flow path when the degassing gas supply is stopped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6515482U JPS58166804U (en) | 1982-05-04 | 1982-05-04 | Solvent deaerator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6515482U JPS58166804U (en) | 1982-05-04 | 1982-05-04 | Solvent deaerator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58166804U true JPS58166804U (en) | 1983-11-07 |
| JPS6238721Y2 JPS6238721Y2 (en) | 1987-10-02 |
Family
ID=30075144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6515482U Granted JPS58166804U (en) | 1982-05-04 | 1982-05-04 | Solvent deaerator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58166804U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011133367A (en) * | 2009-12-24 | 2011-07-07 | Tosoh Corp | Degassing apparatus |
| JP2016190195A (en) * | 2015-03-31 | 2016-11-10 | 株式会社Ｓｃｒｅｅｎホールディングス | Deoxygenation device and substrate treatment apparatus |
-
1982
- 1982-05-04 JP JP6515482U patent/JPS58166804U/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011133367A (en) * | 2009-12-24 | 2011-07-07 | Tosoh Corp | Degassing apparatus |
| JP2016190195A (en) * | 2015-03-31 | 2016-11-10 | 株式会社Ｓｃｒｅｅｎホールディングス | Deoxygenation device and substrate treatment apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6238721Y2 (en) | 1987-10-02 |
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