JPS6237330B2 - - Google Patents

Info

Publication number
JPS6237330B2
JPS6237330B2 JP11534782A JP11534782A JPS6237330B2 JP S6237330 B2 JPS6237330 B2 JP S6237330B2 JP 11534782 A JP11534782 A JP 11534782A JP 11534782 A JP11534782 A JP 11534782A JP S6237330 B2 JPS6237330 B2 JP S6237330B2
Authority
JP
Japan
Prior art keywords
light receiving
light source
light
sample
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11534782A
Other languages
English (en)
Japanese (ja)
Other versions
JPS597224A (ja
Inventor
Yasuaki Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP11534782A priority Critical patent/JPS597224A/ja
Publication of JPS597224A publication Critical patent/JPS597224A/ja
Publication of JPS6237330B2 publication Critical patent/JPS6237330B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP11534782A 1982-07-05 1982-07-05 偏光解析モニタの調整方法 Granted JPS597224A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11534782A JPS597224A (ja) 1982-07-05 1982-07-05 偏光解析モニタの調整方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11534782A JPS597224A (ja) 1982-07-05 1982-07-05 偏光解析モニタの調整方法

Publications (2)

Publication Number Publication Date
JPS597224A JPS597224A (ja) 1984-01-14
JPS6237330B2 true JPS6237330B2 (enExample) 1987-08-12

Family

ID=14660273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11534782A Granted JPS597224A (ja) 1982-07-05 1982-07-05 偏光解析モニタの調整方法

Country Status (1)

Country Link
JP (1) JPS597224A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01112271A (ja) * 1987-07-04 1989-04-28 Ricoh Co Ltd レーザプリンタ等の光走査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01112271A (ja) * 1987-07-04 1989-04-28 Ricoh Co Ltd レーザプリンタ等の光走査装置

Also Published As

Publication number Publication date
JPS597224A (ja) 1984-01-14

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