JPS597224A - 偏光解析モニタの調整方法 - Google Patents

偏光解析モニタの調整方法

Info

Publication number
JPS597224A
JPS597224A JP11534782A JP11534782A JPS597224A JP S597224 A JPS597224 A JP S597224A JP 11534782 A JP11534782 A JP 11534782A JP 11534782 A JP11534782 A JP 11534782A JP S597224 A JPS597224 A JP S597224A
Authority
JP
Japan
Prior art keywords
section
laser beam
prism
angle
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11534782A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6237330B2 (enExample
Inventor
Yasuaki Hayashi
林　康明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP11534782A priority Critical patent/JPS597224A/ja
Publication of JPS597224A publication Critical patent/JPS597224A/ja
Publication of JPS6237330B2 publication Critical patent/JPS6237330B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP11534782A 1982-07-05 1982-07-05 偏光解析モニタの調整方法 Granted JPS597224A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11534782A JPS597224A (ja) 1982-07-05 1982-07-05 偏光解析モニタの調整方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11534782A JPS597224A (ja) 1982-07-05 1982-07-05 偏光解析モニタの調整方法

Publications (2)

Publication Number Publication Date
JPS597224A true JPS597224A (ja) 1984-01-14
JPS6237330B2 JPS6237330B2 (enExample) 1987-08-12

Family

ID=14660273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11534782A Granted JPS597224A (ja) 1982-07-05 1982-07-05 偏光解析モニタの調整方法

Country Status (1)

Country Link
JP (1) JPS597224A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01112271A (ja) * 1987-07-04 1989-04-28 Ricoh Co Ltd レーザプリンタ等の光走査装置

Also Published As

Publication number Publication date
JPS6237330B2 (enExample) 1987-08-12

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