JPS6237327Y2 - - Google Patents

Info

Publication number
JPS6237327Y2
JPS6237327Y2 JP15169981U JP15169981U JPS6237327Y2 JP S6237327 Y2 JPS6237327 Y2 JP S6237327Y2 JP 15169981 U JP15169981 U JP 15169981U JP 15169981 U JP15169981 U JP 15169981U JP S6237327 Y2 JPS6237327 Y2 JP S6237327Y2
Authority
JP
Japan
Prior art keywords
sample
shaft
plates
high vacuum
partition wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15169981U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5855358U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15169981U priority Critical patent/JPS5855358U/ja
Publication of JPS5855358U publication Critical patent/JPS5855358U/ja
Application granted granted Critical
Publication of JPS6237327Y2 publication Critical patent/JPS6237327Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP15169981U 1981-10-13 1981-10-13 高真空装置用試料出入機構 Granted JPS5855358U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15169981U JPS5855358U (ja) 1981-10-13 1981-10-13 高真空装置用試料出入機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15169981U JPS5855358U (ja) 1981-10-13 1981-10-13 高真空装置用試料出入機構

Publications (2)

Publication Number Publication Date
JPS5855358U JPS5855358U (ja) 1983-04-14
JPS6237327Y2 true JPS6237327Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-24

Family

ID=29944383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15169981U Granted JPS5855358U (ja) 1981-10-13 1981-10-13 高真空装置用試料出入機構

Country Status (1)

Country Link
JP (1) JPS5855358U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0355238Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-10-02 1991-12-09
JPH01170900U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-05-19 1989-12-04

Also Published As

Publication number Publication date
JPS5855358U (ja) 1983-04-14

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