JPS6236532U - - Google Patents

Info

Publication number
JPS6236532U
JPS6236532U JP12797485U JP12797485U JPS6236532U JP S6236532 U JPS6236532 U JP S6236532U JP 12797485 U JP12797485 U JP 12797485U JP 12797485 U JP12797485 U JP 12797485U JP S6236532 U JPS6236532 U JP S6236532U
Authority
JP
Japan
Prior art keywords
wafer
intensity
exposure
light source
reduction projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12797485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0416424Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985127974U priority Critical patent/JPH0416424Y2/ja
Publication of JPS6236532U publication Critical patent/JPS6236532U/ja
Application granted granted Critical
Publication of JPH0416424Y2 publication Critical patent/JPH0416424Y2/ja
Expired legal-status Critical Current

Links

JP1985127974U 1985-08-20 1985-08-20 Expired JPH0416424Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985127974U JPH0416424Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-08-20 1985-08-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985127974U JPH0416424Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-08-20 1985-08-20

Publications (2)

Publication Number Publication Date
JPS6236532U true JPS6236532U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-03-04
JPH0416424Y2 JPH0416424Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-13

Family

ID=31023222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985127974U Expired JPH0416424Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-08-20 1985-08-20

Country Status (1)

Country Link
JP (1) JPH0416424Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5068066A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-10-17 1975-06-07
JPS60177623A (ja) * 1984-02-24 1985-09-11 Hitachi Ltd 露光装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5068066A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-10-17 1975-06-07
JPS60177623A (ja) * 1984-02-24 1985-09-11 Hitachi Ltd 露光装置

Also Published As

Publication number Publication date
JPH0416424Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-13

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