JPS6236521A - 直熱型流量センサ - Google Patents
直熱型流量センサInfo
- Publication number
- JPS6236521A JPS6236521A JP60175652A JP17565285A JPS6236521A JP S6236521 A JPS6236521 A JP S6236521A JP 60175652 A JP60175652 A JP 60175652A JP 17565285 A JP17565285 A JP 17565285A JP S6236521 A JPS6236521 A JP S6236521A
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- temperature
- heat insulating
- joining
- insulating member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 239000012528 membrane Substances 0.000 claims description 16
- 230000017525 heat dissipation Effects 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 18
- 230000004044 response Effects 0.000 abstract description 5
- 230000001419 dependent effect Effects 0.000 description 16
- 230000003187 abdominal effect Effects 0.000 description 7
- 230000007423 decrease Effects 0.000 description 7
- 238000011144 upstream manufacturing Methods 0.000 description 7
- 238000002485 combustion reaction Methods 0.000 description 5
- 238000009413 insulation Methods 0.000 description 4
- 239000007767 bonding agent Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000020169 heat generation Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 210000001015 abdomen Anatomy 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910015365 Au—Si Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910020220 Pb—Sn Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 239000005308 flint glass Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60175652A JPS6236521A (ja) | 1985-08-12 | 1985-08-12 | 直熱型流量センサ |
| US06/894,895 US4756190A (en) | 1985-08-09 | 1986-08-08 | Direct-heated flow measuring apparatus having uniform characteristics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60175652A JPS6236521A (ja) | 1985-08-12 | 1985-08-12 | 直熱型流量センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6236521A true JPS6236521A (ja) | 1987-02-17 |
| JPH0441931B2 JPH0441931B2 (enrdf_load_stackoverflow) | 1992-07-09 |
Family
ID=15999839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60175652A Granted JPS6236521A (ja) | 1985-08-09 | 1985-08-12 | 直熱型流量センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6236521A (enrdf_load_stackoverflow) |
-
1985
- 1985-08-12 JP JP60175652A patent/JPS6236521A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0441931B2 (enrdf_load_stackoverflow) | 1992-07-09 |
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