JPH0441932B2 - - Google Patents
Info
- Publication number
- JPH0441932B2 JPH0441932B2 JP60178522A JP17852285A JPH0441932B2 JP H0441932 B2 JPH0441932 B2 JP H0441932B2 JP 60178522 A JP60178522 A JP 60178522A JP 17852285 A JP17852285 A JP 17852285A JP H0441932 B2 JPH0441932 B2 JP H0441932B2
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- temperature
- holding member
- membrane
- air flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 6
- 230000017525 heat dissipation Effects 0.000 claims description 2
- 239000012528 membrane Substances 0.000 description 20
- 230000001419 dependent effect Effects 0.000 description 17
- 238000002485 combustion reaction Methods 0.000 description 7
- 238000011144 upstream manufacturing Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000020169 heat generation Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60178522A JPS6239720A (ja) | 1985-08-15 | 1985-08-15 | 直熱型流量センサ |
| US06/894,895 US4756190A (en) | 1985-08-09 | 1986-08-08 | Direct-heated flow measuring apparatus having uniform characteristics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60178522A JPS6239720A (ja) | 1985-08-15 | 1985-08-15 | 直熱型流量センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6239720A JPS6239720A (ja) | 1987-02-20 |
| JPH0441932B2 true JPH0441932B2 (enrdf_load_stackoverflow) | 1992-07-09 |
Family
ID=16049943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60178522A Granted JPS6239720A (ja) | 1985-08-09 | 1985-08-15 | 直熱型流量センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6239720A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH066929U (ja) * | 1992-06-26 | 1994-01-28 | 川崎重工業株式会社 | プラズマトーチによるスラグ閉塞防止装置 |
| JP6217119B2 (ja) * | 2013-04-12 | 2017-10-25 | 株式会社島津製作所 | 熱線式フローセンサ及び赤外線ガス分析計 |
-
1985
- 1985-08-15 JP JP60178522A patent/JPS6239720A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6239720A (ja) | 1987-02-20 |
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